Single level metal memory cell using chalcogenide cladding
View Patent ↗An apparatus including a volume of phase change material disposed between a first conductor and a second conductor on a substrate, and a plurality of electrodes coupled to the volume of phase change material and the first conductor. A method including introducing, over a first conductor on a substrate, a plurality of electrodes coupled to the first conductor, introducing a phase change material over the plurality of electrodes and in electrical communication with the plurality of electrodes, and introducing a second conductor over the phase change material and coupled to the phase change material.
1. A method comprising:
introducing, over a first conductor on a substrate, said first conductor extending in a first direction, a plurality of electrodes coupled to the first conductor, said electrodes extending in a second direction transverse to said first direction;
introducing a phase change material over the plurality of electrodes and in electrical communication with the plurality of electrodes, said material elongated in a third direction transverse to the first and second directions; and
introducing a second conductor over the phase change material and coupled to the phase change material, said second conductor being orthogonal to said second direction.
2. The method of claim 1 , wherein introducing a phase change material comprises patterning a dimension of the material and introducing the second conductor comprises patterning a dimension of the second conductor, and the dimension of the material and the dimension of the second conductor is similar.
3. The method of claim 2 , wherein patterning a dimension of the material with an orthogonal orientation to the first conductor.