Integrated circuit devices having corrosion resistant fuse regions and methods of fabricating the same
Integrated circuit devices are provided including an integrated circuit substrate and first through fourth spaced apart lower interconnects on the integrated circuit substrate. The third and fourth spaced apart lower interconnects are parallel to the first and second lower interconnects. A first fuse is provided on the first and second lower interconnects between the first and second lower interconnects and is electrically coupled to the first and second lower interconnects. A second fuse is provided spaced apart from the first fuse and on the third and fourth lower interconnects. The second fuse is between the third and fourth lower interconnects and is electrically coupled to the third and fourth lower interconnects. Related methods of fabricating integrated circuit devices are also provided.
1. An integrated circuit device comprising:
an integrated circuit substrate;
first through fourth spaced apart lower interconnects on the integrated circuit substrate, the third and fourth spaced apart lower interconnects being parallel to the first and second lower interconnects;
a first fuse on the first and second lower interconnects, the first fuse being between the first and second lower interconnects and electrically coupled to the first and second lower interconnects;
a second fuse, spaced apart from the first fuse, on the third and fourth lower interconnects, the second fuse being between the third and fourth lower interconnects and electrically coupled to the third and fourth lower interconnects; and
first, second and third intermediate interconnects on the integrated circuit substrate having surfaces that are substantially planar with surfaces of the first and second fuses, wherein the first intermediate interconnect is on the first lower interconnect and electrically coupled to the first lower interconnect, wherein the second intermediate interconnect is on the second and fourth lower interconnects and is electrically coupled to the second and fourth lower interconnects and wherein the third intermediate interconnect is on the third lower interconnect and is electrically coupled to the third lower interconnect.
2. The integrated circuit device of claim 1 , further comprising first, second and third lower metal interconnects on the first, second and third intermediate interconnects, respectively, and electrically coupled to the first, second and third intermediate interconnects, respectively.
3. The integrated circuit device of claim 1 , further comprising a fuse guard ring on the integrated circuit substrate that surrounds the first and second fuses.
4. The integrated circuit device of claim 3 , wherein the fuse guard ring comprises:
an intermediate interconnect guard ring between the first and second fuses and the first, second and third intermediate interconnects;
a first metal guard ring plug on the intermediate interconnect guard ring;
a first metal guard ring on the first metal guard ring plug;
a second metal guard ring plug on the first metal guard ring; and
a second metal guard ring on the second metal guard ring plug.
5. The integrated circuit device of claim 1 , further comprising first, second, third and fourth fuse contact plugs, wherein the first fuse is electrically coupled to the first and second lower interconnects through the first and second fuse contact plugs and wherein the second fuse is electrically coupled to the third and fourth lower interconnects through the third and fourth fuse contact plugs.
6. The integrated circuit device of claim 5 wherein the first, second, third and fourth fuse contact plugs comprise a barrier metal layer and a metal plug layer on the barrier metal layer.
7. The integrated circuit device of claim 6 wherein the barrier metal layer comprises a titanium nitride layer.
8. The integrated circuit device of claim 1 wherein the first, second, third and fourth lower interconnects comprise non-corrosive material layers.
9. The integrated circuit device of claim 8 wherein the non-corrosive material layers comprise at least one of a polysilicon layer and a polycide layer.
10. The integrated circuit device of claim 1 wherein the first, second and third intermediate interconnects and the first and second fuses comprise tungsten layers.