IP Library Granted Patent US 6,865,952
Granted Patent B2
US 6,865,952 · App. 10/853,358 · Granted Mar 15, 2005

Apparatus and methods for heat loss pressure measurement

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Quick Facts
Patent No.
US 6,865,952
App. No.
10/853,358
Granted
Mar 15, 2005
Kind
B2
Abstract

A heat loss gauge for measuring gas pressure in an environment includes a resistive sensing element and a resistive compensating element. The resistive compensating element is in circuit with the sensing element and is exposed to a substantially matching environment. An electrical source is connected to the sensing element and the compensating element for applying current through the elements. The current through the sensing element is substantially greater than the current through the compensating element. Measuring circuitry is connected to the sensing element and the compensating element for determining gas pressure in the environment to which the sensing element and compensating element are exposed based on electrical response of the sensing element and the compensating element.

Claims (28)

1. A heat loss gauge for measuring gas pressure in an environment comprising:

a resistive sensing element;

a resistive compensating element in circuit with the sensing element and being exposed to a substantially matching environment;

an electrical source connected to the sensing element and compensating element for applying current through the elements, the current through the sensing element being substantially greater than the current through the compensating element, the sensing and compensating elements being of different lengths; and

measuring circuitry connected to the sensing element and the compensating element for determining gas pressure in the environment to which the sensing element and compensating element are exposed based on electrical response of the sensing element and the compensating element.

2. The gauge of claim 1 in which the compensating element is shorter than the sensing element.

3. The gauge of claim 2 in which the sensing and compensating elements are configured to provide the compensating element with about 5%-8% lower resistance than the sensing element.

4. The gauge of claim 3 in which the sensing and compensating elements are configured to provide the compensating element with about 6%-7% lower resistance than the sensing element.

5. The gauge of claim 2 in which the compensating element is about 5%-8% shorter in length than the sensing element.

6. The gauge of claim 5 in which the compensating element is about 6%-7% shorter than the sensing element.

7. The gauge of claim 1 in which a parallel resistor is positioned across one of the sensing and compensating elements.

8. A heat loss gauge for measuring gas pressure in an environment comprising:

a resistive sensing element;

a resistive compensating element in circuit with the sensing element and being exposed to a substantially matching environment;

electrical means connected to the sensing element and compensating element for applying current through the elements, the current through the sensing element being substantially greater than the current through the compensating element, the sensing and compensating elements being of different lengths; and

measuring means connected to the sensing element and the compensating element for determining gas pressure in the environment to which the sensing element and compensating element are exposed based on electrical response of the sensing element and the compensating element.

9. A method of measuring gas pressure in an environment comprising:

providing a resistive sensing element;

providing a resistive compensating element that is in circuit with the sensing element and is exposed to a substantially matching environment;

applying current through the sensing element and compensating element from an electrical source, with the current through the sensing element being substantially greater than the current through the compensating element;

configuring the sensing and compensating elements to be of different lengths; and

with measuring circuitry connected to the sensing element and the compensating element, determining gas pressure in the environment to which the sensing element and compensating element are exposed based on electrical response of the sensing element and the compensating element.

10. The method of claim 9 further comprising configuring the compensating element to be shorter than the sensing element.

11. The method of claim 10 further comprising configuring the sensing and compensating elements to provide the compensating element with about 5%-8% lower resistance than the sensing element.

12. The method of claim 11 further comprising configuring the sensing and compensating elements to provide the compensating element with about 6%-7% lower resistance than the sensing element.

13. The method of claim 10 further comprising providing the compensating element with a length that is about 5%-8% shorter than the sensing element.

14. The method of claim 13 further comprising providing the compensating element with a length that is about 6%-7% shorter than the sensing element.

15. The method of claim 9 further comprising positioning a parallel resistor across one of the sensing and compensating elements.

Assignments (3)
CORRECTIVE ASSIGNMENT TO CORRECT THE STATE OF INCORPORATION INSIDE ASSIGNMENT PREVIOUSLY RECORDED AT REEL: 033190 FRAME: 0755. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Oct 10, 2014
From: BROOKS AUTOMATION, INC.
To: MKS INSTRUMENTS, INC.
Reel/Frame 033958/0363 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 26, 2014
From: BROOKS AUTOMATION, INC.
To: MKS INSTRUMENTS, INC.
Reel/Frame 033190/0755 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 27, 2006
From: HELIX TECHNOLOGY CORPORATION
To: BROOKS AUTOMATION, INC.
Reel/Frame 017176/0706 →