Patent Assignment
Reel/Frame 017176/0706
Assignment of Assignor's Interest
Recorded: 2006-01-27
Received: 2006-01-27
Pages: 10
Assignor
HELIX TECHNOLOGY CORPORATION
Executed: 2005-10-27
Assignee
BROOKS AUTOMATION, INC.
15 ELIZABETH DRIVE, CHELMSFORD, MA, 01824, UNITED STATES
Covered Properties
(50)
Efficient Heat Exchanger for Refrigeration Process
Application:
11/244,323 →
System and Method for Electronic Diagnostics of a Process Vacuum Environment
Application:
11/206,675 →
Wide-Range Combination Vacuum Gauge
Application:
11/150,868 →
Method of Operating a Resistive Heat-Loss Pressure Sensor
Application:
11/146,721 →
Integration of Automated Cryopump Safety Purge
Application:
11/136,325 →
Electronically Controlled Vacuum Pump
Application:
11/115,774 →
Very Low Temperature Refrigeration System Having a Scroll Compressor with Liquid Injection
Application:
11/081,003 →
Remote Display Module
Application:
11/071,996 →
Refrigeration cycle utilizing a mixed inert component refrigerant
Application:
11/046,655 →
Nonflammable Mixed Refrigerants (Mr) for Use with Very Low Temperature Throttle-Cycle Refrigeration Systems
Application:
11/032,701 →
Method and Apparatus for Storing Vacuum Gauge Calibration Parameters and Measurement Data on a Vacuum Gauge Structure
Application:
11/012,871 →
Efficient heat exchanger for refrigeration process
Application:
60/616,873 →
High Conductance Cryopump for Type Iii Gas Pumping
Application:
10/948,955 →
Method of Operating a Resistive Heat-Loss Pressure Sensor
Application:
10/900,504 →
Apparatus and Methods for Heat Loss Pressure Measurement
Application:
10/853,358 →
Apparatus and Methods for Heat Loss Pressure Measurement
Application:
10/852,896 →
Integrated Rough/Purge/Vent (Rpv) Valve
Application:
10/804,842 →
Ionization Gauge
Application:
10/799,446 →
Ultra-Low Temperature Closed-Loop Recirculating Gas Chilling System
Application:
10/470,123 →
Method and Apparatus for Detecting and Measuring State of Fullness in Cryopumps
Application:
10/763,056 →
Electronically controlled vacuum pump gauge
Application:
10/750,565 →
Cryopump Temperature Control of Arrays
Application:
10/750,547 →
Axial Loaded Seal System with a Static L-Seal
Application:
10/734,079 →
Apparatus and Methods for Heat Loss Pressure Measurement
Application:
10/630,458 →
Integration of Automated Cryopump Safety Purge
Application:
10/608,851 →
Fail-Safe Cryopump Safety Purge Delay
Application:
10/608,779 →
Very Low Temperature Refrigeration System with Controlled Cool Down and Warm Up Rates and Long Term Heating Capabilities
Application:
10/425,001 →
Liquid Chiller Evaporator
Application:
10/412,750 →
Radiation Shielding Coating
Application:
10/339,181 →
High Efficiency Very-Low Temperature Mixed Refrigerant System with Rapid Cool Down
Application:
10/316,176 →
Methods of Freezeout Prevention for Very Low Temperature Mixed Refrigerant Systems
Application:
10/281,881 →
Apparatus and Methods for Heat Loss Pressure Measurement
Application:
10/273,402 →
Electronically Controlled Cryopump
Application:
10/225,485 →
Wave Spring Loaded Split Seal System
Application:
10/166,577 →
Electronically Controlled Vacuum Pump
Application:
10/095,126 →
Cryopump System with Modular Electronics
Application:
09/982,719 →
Electronically Controlled Cryopump
Application:
09/977,559 →
Vacuum System Central Control Information Server
Application:
09/948,303 →
Helium Management Control System
Application:
09/909,863 →
Cooling System for Thermal Analysis
Application:
09/904,171 →
Nonflammable Mixed Refrigerants (Mr) for Use with Very Low Temperature Throttle-Cycle Refrigeration Systems
Application:
09/894,968 →
Mixed Refrigerant Temperature Control Using a Pressure Regulating Valve
Application:
09/894,964 →
Very Low Temperature Flow Switch Apparatus
Application:
09/886,936 →
System and Method for Recovering from a Power Failure in a Cryopump
Application:
09/878,160 →
Very Low Temperature Refrigeration System with Controlled Cool Down and Warm Up Rates and Long Term Heating Capabilities
Application:
09/870,385 →
Electronically controlled cryopump
Application:
09/826,692 →
Refrigeration System Pressure Control Using a Gas Volume
Application:
09/824,530 →
Vacuum System Information Network
Application:
09/822,106 →
Module and Connector Latch
Application:
09/821,830 →
Wave Spring Loaded Split Seal System
Application:
09/780,026 →