Method and apparatus for storing vacuum gauge calibration parameters and measurement data on a vacuum gauge structure
View Patent ↗A method and apparatus for measuring gas pressure by combining an ionization gauge with at least one other vacuum sensor. Nonvolatile memory coupled to the vacuum gauge contains calibration parameters unique to each individual sensor based on factory calibration. The nonvolatile memory may contain calibration parameters for a heat-sensitive vacuum sensor to compensate for the temperature gradients generated by the ionization gauge. The calibration parameters are a function of calibration data determined when the ionization gauge is both on and off. The nonvolatile memory may store a window of measurement data of the vacuum gauge that is updated at predetermined time intervals and in response to an event, such as an error event, to aid in investigating the cause of vacuum gauge malfunction or failure.
1. An apparatus for measuring gas pressure in an environment comprising:
an ionization gauge;
a heat-sensitive sensor; and
nonvolatile memory coupled to the heat-sensitive sensor, the nonvolatile memory containing temperature compensating calibration parameters of the heat sensitive sensor based on calibration data taken with the ionization gauge both on and off.
2. The apparatus according to claim 1 , wherein the heat-sensitive sensor is a heat-loss sensor.
3. The apparatus according to claim 1 , wherein the nonvolatile memory is integral to the ionization gauge and the heat-sensitive sensor.
4. The apparatus according to claim 1 , further comprising a controller coupled to the ionization gauge and the heat-sensitive sensor that turns the ionization gauge on in response to output of the heat-sensitive sensor.
5. The apparatus according to claim 4 , wherein the nonvolatile memory is integral to the ionization gauge and the heat-sensitive sensor.
6. A method for measuring gas pressure in an environment comprising the steps of:
providing an ionization gauge;
providing a heat-sensitive sensor;
providing nonvolatile memory coupled to the ionization gauge and the heat-sensitive sensor, the nonvolatile memory containing temperature compensating calibration parameters of the heat-sensitive sensor based on calibration data taken with the ionization gauge both on and off; and
applying the calibration parameters to measurement data output from the heat-sensitive sensor.
7. The method according to claim 6 , further comprising the step of turning on the ionization gauge in response to output of the heat-sensitive sensor.