Semiconductor memory device and method for fabricating the same
View Patent ↗In a fabrication method according to the present invention, a first insulating film and tungsten plugs are formed over a substrate including a logic section and a memory section. An upper portion of one of the tungsten plug located in a memory section is removed, thereby forming a recess. A resistance heating element film covering side and bottom surfaces of the recess and a storage element film filling the recess with the resistance heating element film interposed between the storage element film and the plug are formed. Then, a Cu interconnect is formed on the storage element film. Thus, it is possible to make the process step of forming the resistance heating element film and the storage element film have higher consistency with a logic process.
1. A semiconductor memory device comprising:
a substrate;
an insulating film formed on the substrate;
a storage element formed of a phase change material in an upper portion of the insulating film;
a resistance heating element covering lower and side surfaces of the storage element;
a plug provided in a region of the insulating film located under the storage element and being in contact with part of the resistance heating element covering the lower surface of the storage element and the substrate; and
an interconnect being in contact with an upper surface of the storage element.
2. The semiconductor memory device of claim 1 ,
wherein a hole reaching the substrate is provided in the insulating film,
wherein a plug fills lower part of the hole, and
wherein the storage element fills part of the hole located over the plug with the resistance heating element interposed between the storage element and the plug.
3. The semiconductor memory device of claim 1 ,
wherein the insulating film includes a first insulating film and a second insulating film provided on the first insulating film,
wherein the plug fills the hole provided in the first insulating film and reaching the substrate,
wherein the resistance heating element covers side and bottom surfaces of a groove provided in the second insulating film and reaching the plug, and
wherein the storage element fills the groove with the resistance heating element interposed between the storage element and the plug.
4. The semiconductor memory device of claim 1 , wherein the resistance heating element is TiAlN, TiSiN, TaAlN or TaSiN.
5. The semiconductor memory device of claim 1 ,
wherein the substrate includes a memory section and a logic section,
wherein the storage element is provided in part of the substrate located over the memory section, and
wherein the plug reaching the substrate is provided in part of the substrate located over the logic section.