Semiconductor device for reducing plasma charging damage
View Patent ↗A semiconductor device and method of manufacturing the semiconductor device including a semiconductor substrate of a first conductivity type. A scribe lane area formed in the substrate to define chip formation areas. A deep well area formed in each chip formation area. The deep well area has a second conductivity type which is opposite the first conductivity type. Also, at least one well area is formed within the deep well area.
1. A semiconductor device comprising:
a semiconductor substrate of a first conductivity type having chip formation areas, the semiconductor substrate including:
scribe lanes of the first conductivity type, which are formed therein to define the chip formation areas;
a deep well area of a second conductivity type, which is formed in the entire chip formation area;
first well areas of the first conductivity type, which are formed within the deep well area; and
second well areas of the second conductivity type, which are formed within the deep well area,
wherein the first well areas and the second well areas are formed separate from each other.
2. The semiconductor device of claim 1 , wherein,
the first conductivity type is a p-type conductor; and
the second conductivity type is a n-type conductor.
3. The semiconductor device of claim 1 , wherein,
the first conductivity type is a n-type conductor; and
the second conductivity type is a p-type conductor.