High wear resistant hard film
A high wear resistant hard film is characterized by including a coating layer consisting of a metal nitride, which is formed on the outside surface of an object to be treated; a substrate layer consisting of a nitride of Ti or Cr, which is provided between the coating layer and the object to be treated; and an intermediate layer containing compositions of the coating layer in contact with the intermediate layer and the substrate layer, which is provided at an interface between the coating layer and the substrate layer, and a tool is provided with the film. There is provided a hard film having excellent oxidation resistance even at 1000° C. or higher and also having very high wear resistance.
1. A high wear resistant hard film comprising:
a coating layer consisting of a composition of a metal nitride, which is formed on the outside surface of an object to be treated;
a substrate layer consisting of a composition of a nitride of Cr, which is provided between said coating layer and said object to be treated; and
an intermediate layer containing said compositions of i) said coating layer and ii) said substrate layer, wherein said compositions of said intermediate layer are located at an interface between said coating layer and said substrate layer,
wherein said coating layer is formed of a metal nitride whose main components are Al, Cr and Si.
2. The high wear resistant hard film according to claim 1 , wherein said intermediate layer has a film thickness of 0.1 to 2 mm.
3. The high wear resistant hard film according to claim 1 or 2 , wherein the composition ratio of said intermediate layer is 1:5 to 5:1 in the quantity ratio of composition of said substrate layer to the composition of said coating layer.
4. The high wear resistant hard film according to claim 1 or 2 , wherein said coating layer is a layer consisting of one or more layers in which there are alternately arranged a coating a layer, which is formed of a nitride whose main components are Al, Cr and Si, and a coating b layer, which is formed of a nitride whose main components are Ti and Al, containing 25–75 percent by atom of Al, the balance being Ti, of metallic components only, and an outermost layer is formed by said coating a layer.
5. A high wear resistant hard film comprising:
a coating layer comprising a composition of a metal nitride, which is formed on the outside surface of an object to be treated;
a substrate layer comprising a composition of a nitride of Cr, which is provided between said coating layer and said object to be treated; and
an intermediate layer comprising said compositions of i) said coating layer and ii) said substrate layer, wherein said compositions of the intermediate layer are located at an interface between said coating layer and said substrate layer,
wherein said coating layer is formed of a metal nitride whose main components comprise Al, Cr and Si.
6. A high wear resistant hard film comprising:
a coating layer comprising a composition of a metal nitride, which is formed on the outside surface of an object to be treated;
a substrate layer consisting essentially of a composition of a nitride of Cr, which is provide between said coating layer and said object to be treated; and
an intermediate layer comprising said compositions of i) said coating layer and ii) said substrate layer, wherein said compositions of the intermediate layer are located at an interface between said coating layer and said substrate layer,
wherein said coating layer is formed of a metal nitride whose main components comprise Al, Cr and Si.