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App. No. 10/870,216 · Confirmation No. 8667

Low K film application for interlevel dielectric and method of cleaning etched features

Inventors: Zhiping Yin, Gary Chen
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2007-10-03 ABN Abandonment 2 View
2007-10-03 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2007-03-23 CTFR Final Rejection 8 View
2007-03-23 SRFW Search information including classification, databases and other search related notes 1 View
2007-03-23 FWCLM Index of Claims 2 View
2007-03-23 BIB Bibliographic Data Sheet 1 View
2006-12-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2006-12-26 CLM Claims 11 View
2006-12-26 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2006-12-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2006-12-26 WFEE Fee Worksheet (SB06) 1 View
2006-08-23 CTNF Non-Final Rejection 8 View
2006-08-23 892 List of references cited by examiner 1 View
2006-08-23 1449 List of References cited by applicant and considered by examiner 1 View
2006-08-23 BIB Bibliographic Data Sheet 1 View
2006-08-23 FWCLM Index of Claims 2 View
2006-08-23 SRFW Search information including classification, databases and other search related notes 1 View
2006-08-20 SRNT Examiner's search strategy and results 1 View
2006-08-17 WFEE Fee Worksheet (SB06) 6 View
2006-06-14 WFEE Fee Worksheet (SB06) 1 View
2006-06-14 WCLM Claims Worksheet (PTO-2022) 2 View
2006-06-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2006-06-07 SPEC Specification 1 View
2006-06-07 ABST Abstract 1 View
2006-06-07 CLM Claims 10 View
2006-06-07 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2006-06-07 WFEE Fee Worksheet (SB06) 1 View
2006-06-07 WFEE Fee Worksheet (SB06) 1 View
2006-02-07 CTNF Non-Final Rejection 6 View
2006-02-07 1449 List of References cited by applicant and considered by examiner 4 View
2006-02-07 892 List of references cited by examiner 1 View
2006-02-07 FWCLM Index of Claims 2 View
2006-02-07 SRFW Search information including classification, databases and other search related notes 1 View
2006-02-07 BIB Bibliographic Data Sheet 1 View
2006-02-03 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2006-02-03 N417 Electronic Filing System Acknowledgment Receipt 1 View
2006-02-03 TRNA Transmittal of New Application 2 View
2006-01-19 SRNT Examiner's search strategy and results 3 View
2005-11-14 WFEE Fee Worksheet (SB06) 2 View
2005-11-14 WCLM Claims Worksheet (PTO-2022) 2 View
2005-11-02 A.PE Preliminary Amendment 1 View
2005-11-02 CLM Claims 8 View
2005-11-02 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2005-09-15 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2005-09-15 TRNA Transmittal of New Application 2 View
2005-09-15 N417 Electronic Filing System Acknowledgment Receipt 1 View
2005-04-18 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2005-04-18 TRNA Transmittal of New Application 2 View
2005-04-18 N417 Electronic Filing System Acknowledgment Receipt 1 View
2004-12-21 IDS Information Disclosure Statement (IDS) Form (SB08) 6 View
2004-10-07 WFEE Fee Worksheet (SB06) 1 View
2004-09-29 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-09-29 TRNA Transmittal of New Application 2 View
2004-09-29 N417 Electronic Filing System Acknowledgment Receipt 1 View
2004-06-17 136A Authorization for Extension of Time all replies 2 View
2004-06-17 SPEC Specification 11 View
2004-06-17 CLM Claims 15 View
2004-06-17 ABST Abstract 1 View
2004-06-17 DRW Drawings-only black and white line drawings 5 View
2004-06-17 OATH Oath or Declaration filed 4 View
2004-06-17 A.PE Preliminary Amendment 1 View
2004-06-17 SPEC Specification 2 View
2004-06-17 CLM Claims 6 View
2004-06-17 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-06-17 DRW Drawings-only black and white line drawings 5 View
2004-06-17 ADS Application Data Sheet 3 View
2004-06-17 WCLM Claims Worksheet (PTO-2022) 1 View
2004-06-17 WFEE Fee Worksheet (SB06) 1 View
2004-06-17 WFEE Fee Worksheet (SB06) 1 View
2004-06-17 TRNA Transmittal of New Application 2 View
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Quick Facts
App. No.
10/870,216
Filed
2004-06-17
Pub. No.
US20040245644A1
Art Unit
2818