IP Library Patent Application 09998729
Patent Application Utility
App. No. 09/998,729 · Confirmation No. 7022

DRY LOW K FILM APPLICATION FOR INTERLEVEL DIELECTRIC AND METHOD OF CLEANING ETCHED FEATURES

Inventors: Zhiping Yin, Gary Chen
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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Code Description Pages PDF
2001-11-30 TRNA Transmittal of New Application 2 View
2001-11-30 ADS Application Data Sheet 1 View
2001-11-30 SPEC Specification 11 View
2001-11-30 CLM Claims 15 View
2001-11-30 ABST Abstract 1 View
2001-11-30 DRW Drawings-only black and white line drawings 5 View
2001-11-30 OATH Oath or Declaration filed 4 View
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Quick Facts
App. No.
09/998,729
Filed
2001-11-30
Granted
2003-06-03
Art Unit
2818
PTA
-79 days