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App. No. 10/462,467 · Confirmation No. 8433

Low k film application for interlevel dielectric and method of cleaning etched features

Inventors: Zhiping Yin, Gary Chen
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2008-07-21 ABN Abandonment 2 View
2008-01-02 CTNF Non-Final Rejection 5 View
2008-01-02 892 List of references cited by examiner 1 View
2008-01-02 BIB Bibliographic Data Sheet 1 View
2008-01-02 SRFW Search information including classification, databases and other search related notes 1 View
2008-01-02 FWCLM Index of Claims 2 View
2007-10-24 RCEX Request for Continued Examination (RCE) 3 View
2007-10-24 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2007-10-24 CLM Claims 13 View
2007-10-24 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2007-10-24 WFEE Fee Worksheet (SB06) 2 View
2007-10-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-10-24 WFEE Fee Worksheet (SB06) 1 View
2007-08-24 CTFR Final Rejection 5 View
2007-08-24 BIB Bibliographic Data Sheet 1 View
2007-08-24 FWCLM Index of Claims 2 View
2007-08-24 SRFW Search information including classification, databases and other search related notes 1 View
2007-06-12 WFEE Fee Worksheet (SB06) 1 View
2007-06-12 FWCLM Index of Claims 2 View
2007-04-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2007-04-26 CLM Claims 10 View
2007-04-26 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2007-04-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-01-26 CTNF Non-Final Rejection 5 View
2007-01-26 892 List of references cited by examiner 1 View
2007-01-26 1449 List of References cited by applicant and considered by examiner 2 View
2007-01-26 FWCLM Index of Claims 2 View
2007-01-26 BIB Bibliographic Data Sheet 1 View
2007-01-26 SRFW Search information including classification, databases and other search related notes 1 View
2007-01-20 SRNT Examiner's search strategy and results 1 View
2007-01-11 DISQ Terminal Disclaimer review decision 1 View
2006-10-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2006-10-26 SPEC Specification 1 View
2006-10-26 ABST Abstract 1 View
2006-10-26 CLM Claims 9 View
2006-10-26 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2006-10-26 DIST Terminal Disclaimer Filed 1 View
2006-10-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2006-10-26 WFEE Fee Worksheet (SB06) 2 View
2006-10-26 WCLM Claims Worksheet (PTO-2022) 1 View
2006-10-26 WFEE Fee Worksheet (SB06) 1 View
2006-09-06 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2006-09-06 WFEE Fee Worksheet (SB06) 2 View
2006-09-06 N417 Electronic Filing System Acknowledgment Receipt 2 View
2006-07-13 CTNF Non-Final Rejection 4 View
2006-07-13 1449 List of References cited by applicant and considered by examiner 1 View
2006-07-13 FWCLM Index of Claims 2 View
2006-07-13 SRFW Search information including classification, databases and other search related notes 1 View
2006-07-13 BIB Bibliographic Data Sheet 1 View
2006-04-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2006-04-24 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2006-04-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2006-02-14 WFEE Fee Worksheet (SB06) 1 View
2006-02-14 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2006-02-14 LET. Miscellaneous Incoming Letter 2 View
2006-02-14 N417 Electronic Filing System Acknowledgment Receipt 1 View
2006-01-23 CTNF Non-Final Rejection 10 View
2006-01-23 892 List of references cited by examiner 1 View
2006-01-23 SRFW Search information including classification, databases and other search related notes 1 View
2006-01-23 FWCLM Index of Claims 2 View
2006-01-23 BIB Bibliographic Data Sheet 1 View
2006-01-17 SRNT Examiner's search strategy and results 2 View
2006-01-05 WFEE Fee Worksheet (SB06) 2 View
2005-12-22 RCEX Request for Continued Examination (RCE) 1 View
2005-12-12 CTAV Advisory Action (PTOL-303) 2 View
2005-12-12 BIB Bibliographic Data Sheet 1 View
2005-11-10 WFEE Fee Worksheet (SB06) 1 View
2005-11-10 FWCLM Index of Claims 1 View
2005-11-07 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2005-11-07 CLM Claims 7 View
2005-11-07 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2005-11-07 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2005-09-07 CTFR Final Rejection 7 View
2005-09-07 892 List of references cited by examiner 1 View
2005-09-07 SRFW Search information including classification, databases and other search related notes 1 View
2005-09-07 FWCLM Index of Claims 2 View
2005-09-07 BIB Bibliographic Data Sheet 1 View
2005-09-04 SRNT Examiner's search strategy and results 1 View
2005-06-21 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2005-06-21 CLM Claims 7 View
2005-06-21 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2005-06-21 WFEE Fee Worksheet (SB06) 1 View
2005-06-21 WCLM Claims Worksheet (PTO-2022) 1 View
2005-03-25 WFEE Fee Worksheet (SB06) 1 View
2005-03-25 FWCLM Index of Claims 2 View
2005-03-21 CTNF Non-Final Rejection 6 View
2005-03-21 1449 List of References cited by applicant and considered by examiner 1 View
2005-03-21 892 List of references cited by examiner 1 View
2005-03-21 FWCLM Index of Claims 1 View
2005-03-21 BIB Bibliographic Data Sheet 1 View
2005-03-21 SRFW Search information including classification, databases and other search related notes 1 View
2005-03-21 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2005-03-21 CLM Claims 8 View
2005-03-21 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2005-03-21 WFEE Fee Worksheet (SB06) 1 View
2005-03-21 WFEE Fee Worksheet (SB06) 1 View
2005-03-21 WFEE Fee Worksheet (SB06) 1 View
2005-01-10 FWCLM Index of Claims 1 View
2004-12-21 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-12-21 CLM Claims 6 View
2004-12-21 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-12-21 APPENDIX Appendix to the specification 6 View
2004-09-22 CTNF Non-Final Rejection 5 View
2004-09-22 1449 List of References cited by applicant and considered by examiner 2 View
2004-09-22 892 List of references cited by examiner 1 View
2004-09-22 FWCLM Index of Claims 1 View
2004-09-22 BIB Bibliographic Data Sheet 1 View
2004-09-22 SRFW Search information including classification, databases and other search related notes 1 View
2004-09-17 SRNT Examiner's search strategy and results 1 View
2004-08-27 WFEE Fee Worksheet (SB06) 1 View
2004-08-27 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2004-08-27 LET. Miscellaneous Incoming Letter 2 View
2004-08-27 N417 Electronic Filing System Acknowledgment Receipt 1 View
2004-07-07 WFEE Fee Worksheet (SB06) 2 View
2004-07-07 FWCLM Index of Claims 1 View
2004-07-06 WFEE Fee Worksheet (SB06) 2 View
2004-07-06 FWCLM Index of Claims 1 View
2004-06-16 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-06-16 SPEC Specification 1 View
2004-06-16 CLM Claims 6 View
2004-06-16 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2004-06-16 LET. Miscellaneous Incoming Letter 7 View
2004-06-16 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2004-06-01 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-03-08 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-09-03 CTNF Non-Final Rejection 5 View
2003-09-03 892 List of references cited by examiner 1 View
2003-09-03 FWCLM Index of Claims 1 View
2003-09-03 SRFW Search information including classification, databases and other search related notes 1 View
2003-08-22 SRNT Examiner's search strategy and results 1 View
2003-06-16 TRNA Transmittal of New Application 2 View
2003-06-16 ADS Application Data Sheet 3 View
2003-06-16 A.PE Preliminary Amendment 7 View
2003-06-16 SPEC Specification 11 View
2003-06-16 CLM Claims 15 View
2003-06-16 ABST Abstract 1 View
2003-06-16 DRW Drawings-only black and white line drawings 5 View
2003-06-16 OATH Oath or Declaration filed 4 View
2003-06-16 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-06-16 SRFW Search information including classification, databases and other search related notes 1 View
2003-06-16 FWCLM Index of Claims 1 View
2003-06-16 TRNA Transmittal of New Application 2 View
2003-06-16 DRW Drawings-only black and white line drawings 5 View
2003-06-16 SPEC Specification 11 View
2003-06-16 CLM Claims 15 View
2003-06-16 ABST Abstract 1 View
2003-06-16 OATH Oath or Declaration filed 4 View
2003-06-16 WFEE Fee Worksheet (SB06) 1 View
2003-06-16 WFEE Fee Worksheet (SB06) 1 View
2003-06-16 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-06-16 ADS Application Data Sheet 3 View
2003-06-16 A.PE Preliminary Amendment 1 View
2003-06-16 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-06-16 CLM Claims 5 View
2003-06-16 136A Authorization for Extension of Time all replies 2 View
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Quick Facts
App. No.
10/462,467
Filed
2003-06-16
Pub. No.
US20030205785A1
Art Unit
2892