IP Library › Patent Application 10178398
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App. No. 10/178,398 · Confirmation No. 7749

LOW K FILM APPLICATION FOR INTERLEVEL DIELECTRIC AND METHOD OF CLEANING ETCHED FEATURES

Inventors: Zhiping Yin, Gary Chen
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2002-06-24 TRNA Transmittal of New Application 2 View
2002-06-24 ADS Application Data Sheet 3 View
2002-06-24 A.PE Preliminary Amendment 26 View
2002-06-24 SPEC Specification 11 View
2002-06-24 CLM Claims 15 View
2002-06-24 ABST Abstract 1 View
2002-06-24 DRW Drawings-only black and white line drawings 5 View
2002-06-24 OATH Oath or Declaration filed 4 View
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Quick Facts
App. No.
10/178,398
Filed
2002-06-24
Granted
2003-08-12
Pub. No.
US20030102532A1
Art Unit
2818
PTA
-114 days