Method of manufacturing semiconductor device
View Patent ↗Described is a semiconductor device having a silicon oxide (SiO 2 ) film into which nitrogen atoms, in a range between approximately 2×10 20 atoms/cm 3 or more and 2×10 21 atoms/cm 3 or less, are introduced, used as an insulator film in the semiconductor device. For example, the device can be a nonvolatile memory device, and the silicon oxide film can be used as an insulator film between, e.g., a floating gate electrode and control gate electrode of the nonvolatile memory device. Stable operations and a retention capability of a nonvolatile memory device are obtained even if the nonvolatile memory device is scaled. Moreover, a programming voltage can be lowered. Also described are methods of fabricating the semiconductor device.
1. A semiconductor device comprising:
a plurality of non-volatile memory elements, each of the plurality of non-volatile memory elements including:
a first silicon oxide film formed on a silicon substrate,
a first silicon film formed on the first silicon oxide film and being a floating gate,
a second silicon oxide film formed on the first silicon film, and
a second silicon film formed on the second silicon oxide film and being a control gate,
wherein a nitrogen atomic concentration in a center portion of the second silicon oxide film, in a thickness direction thereof is not less than 2×10 20 atoms/cm 3 .
2. A semiconductor device according to claim 1 , wherein the nitrogen atomic concentration in the center portion of the second silicon oxide film is not more than 2×10 21 atoms/cm 3 .
3. A semiconductor device according to claim 1 , wherein the nitrogen atomic concentration in an upper portion of the second silicon film, in the thickness direction, is lower than that in the center portion of the second silicon oxide film, and wherein a nitrogen atomic concentration in a lower portion of the second silicon oxide film, in the thickness direction, is larger than that in the center portion of the second silicon oxide film.
4. A semiconductor device according to claim 1 , wherein a nitrogen atomic concentration in a lower portion of the second silicon film, in the thickness direction, is larger than that in an upper portion of the second silicon oxide film, in the thickness direction.
5. A semiconductor device according to claim 1 , wherein the hydrogen atomic concentration in the second silicon oxide film is not more than 5×10 20 .
6. A semiconductor device according to claim 1 , wherein each of the first and second silicon films includes n-type impurities.