Method for fabricating transistor of semiconductor device

1. A method for fabricating a transistor of a semiconductor device, the method comprising the steps of:

providing a semiconductor substrate including an isolation layer and a well;

forming a gate electrode by interposing a gate oxide layer between the substrate and the gate electrode;

performing a low-density ion implantation process with respect to the substrate using the gate electrode as a mask, forming an LDD ion implantation layer;

forming an insulation spacer on a sidewall of the gate electrode; performing the ion implantation process with respect to the substrate using the gate electrode including the insulation spacer as a mask, forming a diffusion barrier,

wherein the ion implantation process for forming the diffusion barrier is performed with ion energy of 10 to 35 keV and an ion dosage of 1.0E14 to 5.0E15 atoms/cm 2 , wherein, the ion implantation process is performed two to four times;

performing a high-density ion implantation process with respect to the substrate including the diffusion barrier using the gate electrode including the insulation spacer as a mask, forming a source/drain;

performing a first thermal treatment process with respect to a resultant structure including the source/drain, so as to activate impurities in the source/drain, and simultaneously causing a diffusion velocity of the impurities in the source/drain to be reduced by the diffusion barrier; and

depositing a metal layer on the substrate, which passes through the first thermal treatment process, and performing a second thermal treatment process, forming a salicide layer.

2. A method for fabricating a transistor of a semiconductor device, the method comprising the steps of:

providing a semiconductor substrate including an isolation layer and a well;

forming a gate electrode by interposing a gate oxide layer between the substrate and the gate electrode;

performing ion implantation respect to the substrate using the gate electrode as a mask, forming a halo ion implantation layer, wherein the halo ion includes Germanium;

performing a low-density ion implantation process with respect to the substrate using the gate electrode as a mask, forming an LDD (Lightly Doped Drain) ion implantation layer;

forming an insulation spacer on a sidewall of the gate electrode;

performing the ion implantation process with respect to the substrate using the gate electrode including the insulation spacer as a mask, forming a diffusion barrier;

performing a high-density ion implantation process with respect to the substrate including the diffusion barrier using the gate electrode including the insulation spacer as a mask, forming a source/drain;

performing a first thermal treatment process with respect to a resultant structure including the source/drain, so as to activate impurities in the source/drain, and simultaneously causing a diffusion velocity of the impurities in the source/drain to be reduced by the diffusion barrier; and

depositing a metal layer on the substrate, which passes through the first thermal treatment process, and performing a second thermal treatment process, forming a salicide layer.

3. The method as claimed in claim 2 , wherein the ion implantation process for forming the diffusion barrier is performed by implanting carbon ions.

4. The method as claimed in claim 2 , wherein the ion implantation process for forming the diffusion barrier is performed with ion energy of 10 to 35 keV and an ion dosage of 1.0E14 to 5.0E15 atoms/cm 2 .

5. The method as claimed in claim 2 , wherein the ion implantation process for forming the diffusion barrier is performed with a tilt angle of 10° to 30° and a twist angle of 1° to 360°.

6. The method as claimed in claim 2 , wherein the ion implantation process for forming the source/drain is performed by implanting boron ions.

7. The method as claimed in claim 2 , wherein the ion implantation process for forming the source/drain is performed with ion energy of 0.5 to 10 keV and an ion dosage of 2.0E15 to 5.0E15 atoms/cm 2 .

8. The method as claimed in claim 2 , wherein the ion implantation process for forming the source/drain is performed with a tilt angle of 0° to 30° and a twist angle of 0° to 360°.

9. The method as claimed in claim 2 , wherein the second thermal treatment process is performed at a temperature of about 900 to 1050° C. for 10 to 30 seconds.

10. The method as of aimed in claim 2 , wherein the second thermal treatment process is performed by maintaining a process chamber in a 100% nitrogen atmosphere.

11. The method as claimed in claim 2 , wherein the second thermal treatment process is performed by increasing a temperature in a rate of 30 to 50° C./sec.

12. The method as claimed in claim 2 , wherein the LDD ion implantation layer is formed with a shallower depth than that of the halo ion implantation layer.

13. A method for fabricating a transistor of a semiconductor device, the method comprising the steps of:

providing a semiconductor substrate including an isolation layer and a well;

forming a gate electrode by interposing a gate oxide layer between the substrate and the gate electrode;

performing ion implantation respect to the substrate using the gate electrode as a mask, forming a halo ion implantation layer;

performing a low-density ion implantation process with respect to the substrate using the gate electrode as a mask, forming an LDD (Lightly Doped Drain) ion implantation layer, wherein the thickness of the LDD ion implantation layer is less than the thickness of the halo ion implantation layer;

forming an insulation spacer on a sidewall of the gate electrode;

performing the ion implantation process with respect to the substrate using the gate electrode including the insulation spacer as a mask, forming a diffusion barrier;

performing a high-density ion implantation process with respect to the substrate including the diffusion barrier using the gate electrode including the insulation spacer as a mask, forming a source/drain;

performing a first thermal treatment process with respect to a resultant structure including the source/drain, so as to activate impurities in the source/drain, and simultaneously causing a diffusion velocity of the impurities in the source/drain to be reduced by the diffusion barrier; and

depositing a metal layer on the substrate, which passes through the first thermal treatment process, and performing a second thermal treatment process, forming a salicide layer.

14. The method as claimed in claim 13 , wherein halo ion implantation uses Germanium as halo ions.

15. The method as claimed in claim 13 , wherein the insulation spacer comprising a buffer layer and a silicon nitride layer.

16. The method of as claimed in claim 13 wherein the buffer layer is formed with LP-TEOS (Low Pressure-Tetra Ethyl Ortho Silicate) and the silicon nitride layer having a nominal stochiometric formula of Si 3 N 4 .

17. The method of as claimed in claim 13 wherein the silicon nitride layer having a nominal stochiometric formula of Si 3 N 4 .

18. The method as claimed in claim 13 wherein the depositing a metal layer on the substrate forming the salicide layer comprises sequentially depositing on an entire upper surface of the substrate a titanium nitride layer (TiN) and a cobalt metal layer.

19. The method as claimed in claim 13 , wherein, the second thermal treatment process is performed by maintaining the process chamber in about 100% nitrogen atmosphere.