Polarizer, projection lens system, exposure apparatus and exposing method
View Patent ↗The directions of amplitude of polarized light passing through a polarizer are concentric around a position. The polarizer is disposed on the surface of a pupil such that the position lies exactly on the center of the surface of the pupil. Rays of luminous flux of illumination light converted into polarized light by the polarizer are converged onto a wafer with concentric planes of polarization with respect to an optical axis. The illumination light is therefore incident on a photoresist as s-polarized light. Thus, the amount of light entering the photoresist is less likely to depend upon the angle of incidence. Consequently, the contrast of an optical image formed in the photoresist is improved, and hence, resolution characteristics are improved.
1. An exposure apparatus comprising an optical system employing a polarizer, wherein
said polarizer includes an even number of regions arranged adjacently to one another around a center and is provided on the surface of a pupil of said optical system, and
directions of amplitude of light passing through said even number of regions distribute in the form of a regular polygon with an even number of members.
2. The exposure apparatus according to claim 1 , wherein said even number of regions are arranged annularly.
3. The exposure apparatus according claim to claim 1 , wherein
an illumination light passing through said polarizer is incident on a photoresist over a wafer and expose said photoresist, and
content of s-polarized light in said illumination light incident on said photoresist is larger than content of p-polarized light in said illumination light.