Zero reflectance design for tilted devices
View Patent ↗Techniques that eliminate or otherwise reduce retroreflections associated with focal plane arrays (cooled and uncooled) and other tilted devices are disclosed. The device topology is designed so that incoming radiation is reflected outside of the incoming focusing optical cone. Planarization is used to eliminate concave geometries and angled sidewalls can be used to eliminate convex geometries, as such geometries cause retroreflection. The resultant structure is covered with reflective material (e.g., aluminum, titanium tungsten, or other standard metallization), which not only safely reflects light from the scene, but also prevents reflections from the underlying geometries of the via. Devices configured in accordance with the principles of the present invention require less tilt, thereby minimizing optical distortion.
1. A method for manufacturing a tilted focal plane array having a via structure that fills and planarizes at least one via and is configured to reduce retroreflections, the method comprising:
planarizing each via so as to provide each via with a planarized topmost surface for substantially eliminating internal physical geometries of each via;
creating external angled sidewalls for each via so as to provide each via with a built-in tilt; and
covering the planarized topmost surface and the external angled sidewalls with a reflective material.
2. The method of claim 1 wherein the covering includes metallizing the planarized topmost surface and the external angled sidewalls of each via.
3. The method of claim 1 wherein the reflective material is selected from one of the group consisting of aluminum and titanium tungsten.
4. The method of claim 1 wherein the planarizing includes filling internal concave geometries of each via with polyimide.
5. The method of claim 1 wherein the planarizing includes filling internal concave geometries of each via with at least one of the group consisting of spin-on-glass and selectively deposited metal.
6. The method of claim 1 wherein the external angled sidewalls are angled at about 45° relative to a focal plane of the focal plane array.
7. The method of claim 1 wherein the planarizing includes filling internal concave geometries of each via with polyimide, and creating the external angled sidewalls includes etching the polyimide.
8. The method of claim 1 wherein creating the external angled sidewalls includes etching the planarized topmost surface.
9. The method of claim 1 wherein creating the external angled sidewalls is carried out using one of the group consisting of spin-on-glass and sputter deposited dielectric.
10. The method of claim 1 wherein creating the external angled sidewalls is carried out using photodefinable polyimide.
11. A tilted focal plane array having a at least one via structure that fills and planarizes at least one via and is configured to reduce retroreflections, the array comprising:
a number of detection areas for detecting radiation;
each via structure having a planarized topmost surface for substantially eliminating internal physical via geometries and external angled sidewalls so as to provide each via with a built-in tilt; and
a reflective material covering the planarized topmost surface and the external angled sidewalls.
12. The array of claim 11 wherein the reflective material is a metal deposited on the planarized topmost surface and the external angled sidewalls of each via.
13. The array of claim 11 wherein the reflective material is one of the group consisting of aluminum and titanium tungsten.
14. The array of claim 11 wherein at least one of the planarized topmost surfaces and the external angled sidewalls are polyimide.
15. The array of claim 11 wherein each planarized topmost surface for substantially eliminating internal physical via geometries is at least one of the group consisting of spin-on-glass and selectively deposited metal.
16. The array of claim 11 wherein the external angled sidewalls are angled at about 45° relative to a focal plane of the focal plane array.
17. The array of claim 11 wherein the external angled sidewalls include one of the group consisting of spin-on-glass, sputter deposited dielectric, and photodefinable polyimide.
18. A via structure that fills and planarizes at least one via and is configured to reduce retroreflections of a tilted device, comprising:
a planarized topmost surface for substantially eliminating internal physical via geometries;
external angled sidewalls so as to provide each via with a built-in tilt; and
a reflective material covering the planarized topmost surface and the external angled sidewalls.
19. The via structure of claim 18 wherein the reflective material is a metal.
20. The via structure of claim 18 wherein the reflective material is one of the group consisting of aluminum and titanium tungsten.
21. The via structure of claim 18 wherein at least one of the planarized topmost surface and the external angled sidewalls is polyimide.
22. The via structure of claim 18 wherein the planarized topmost surface is at least one of the group consisting of spin-on-glass and selectively deposited metal.
23. The via structure of claim 18 wherein the external angled sidewalls are angled between 35° and 55° relative to a focal plane of the tilted device, and include one of polyimide, spin-on-glass, sputter deposited dielectric, or photodefinable polyimide.
24. A method for manufacturing a tilted focal plane array having a via structure configured to reduce retroreflections, the method comprising:
providing a via topology for said via structure configured to reflect incoming radiation outside of an incoming focusing optical cone associated with an imaged scene, by filling and planarizing a via to provide at least one external angled sidewall and a substantially planarized topmost surface, wherein said substantially planarized topmost surface and said external angled sidewall of said via topology reflect said incoming radiation outside of said incoming focusing optical cone.
25. A via structure that fills and planarizes a via and is configured to reduce retroreflections of a tilted device, comprising:
a via topology for said via structure configured to reflect incoming radiation outside of an incoming focusing optical cone associated with an imaged scene wherein said via topology includes at least one external angled side wall and with a substantially planarized topmost surface, wherein said substantially planarized topmost surface and said external angled sidewall of said via topology reflect said incoming radiation outside of said incoming focusing optical cone.