IP Library Granted Patent US 7,220,034
Granted Patent B2
US 7,220,034 · App. 10/888,302 · Granted May 22, 2007

Fiber optic darkfield ring light

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Quick Facts
Patent No.
US 7,220,034
App. No.
10/888,302
Granted
May 22, 2007
Kind
B2
Abstract

A fiber optic darkfield ring light with many angled fiber optic light lines with direct illumination in a very small package. The fiber optic darkfield ring light includes a base with multiple light heads and multiple light covers attached thereto, a main cover, an optional cord grip, and an optional hood. It incorporates multiple fiber optic line arrays positioned at low angle and used in conjunction with a strobe light source.

Claims (46)

1. A darkfield illuminator, comprising:

a base having a recess formed therein, the recess being defined by a bottom recess surface and a wall substantially surrounding the bottom recess surface, the bottom recess surface further including a first surface portion that is angled with respect to a surface to be illuminated;

a plurality of light heads attached to the base wherein each of the light heads is configured to hold a set of the fiber optic lines and provide darkfield illumination;

a plurality of fiber optic lines; and

wherein the first surface portion and the light heads attached thereto are angled at an angle of between about 5 and 25 degrees to provide light at a corresponding angle of between about 5 and 25 degrees.

2. The darkfield illuminator of claim 1 , wherein the light heads are each tapered.

3. A darkfield illuminator, comprising:

a base having a recess formed therein, the recess being defined by a bottom recess surface and a wall substantially surrounding the bottom recess surface the bottom recess surface further including a first surface portion that is angled with respect to a surface, to be illuminated;

a plurality of light heads attached to the base wherein each of the light heads is configured to hold a set of the fiber optic lines and provide darkfield illumination;

a plurality of fiber optic lines; and

wherein the bottom recess surface includes a second surface portion extending outward from and substantially surrounding the first surface portion, and wherein the second surface portion and the wall define a channel for routing fiber optic lines to the light heads.

4. The darkfield illuminator of claim 3 , wherein the second surface portion is substantially parallel to a surface to be illuminated.

5. The darkfield illuminator of claim 3 , wherein the first surface portion and the second surface portion are each ring shaped.

6. An automated inspection system for inspecting a substrate, comprising:

a darkfield illumination device for illuminating the substrate with darkfield illumination, the darkfield illumination device including a base having a recess formed therein, the base including a bottom surface at a bottom of the recess, the bottom surface including a first surface portion that is angled with respect to a surface to be illuminated, the darkfield illumination device including a plurality of light heads attached to the first surface portion in a substantially circular arrangement, the light heads each including a plurality of fiber optic lines for providing light toward a center of the substantially circular arrangement at an angle corresponding to the angle of the first surface portion;

a substrate provider for providing the substrate within the substantially circular arrangement of light heads;

a visual inspection device for capturing images of the substrate provided by the substrate provider;

a controller for identifying defects in the substrate based on the captured images; and,

wherein the bottom surface includes a second surface portion extending outward from and substantially surrounding the first surface portion, and wherein the second surface portion and a recess wall define a channel for routing fiber optic lines to the light heads.

7. The automated inspection system of claim 6 , wherein the second surface portion is substantially parallel to a surface to be illuminated.

8. The automated inspection system of claim 6 , wherein the first surface portion and the second surface portion are each ring shaped.

9. An automated inspection system for inspecting a substrate, comprising:

a darkfield illumination device for illuminating the substrate with darkfield illumination, the darkfield illumination device including a base having a recess formed therein, the base including a bottom surface at a bottom of the recess, the bottom surface including a first surface portion that is angled with respect to a surface to be illuminated, the darkfield illumination device including a plurality of light heads attached to the first surface portion in a substantially circular arrangement, the light heads each including a plurality of fiber optic lines for providing light toward a center of the substantially circular arrangement at an angle corresponding to the angle of the first surface portion;

a substrate provider for providing the substrate within the substantially circular arrangement of light heads;

a visual inspection device for capturing images of the substrate provided by the substrate provider;

a controller for identifying defects in the substrate based on the captured images; and,

wherein the first surface portion and the light heads attached thereto are angled at an angle of between about 5 and 25 degrees to provide light at a corresponding angle of between about 5 and 25 degrees.

10. The automated inspection system of claim 9 , wherein the first surface portion and the light heads attached thereto are further angled at an angle of about 15 degrees to provide light at an angle of about 15 degrees.

11. A darkfield illuminator, comprising:

a base having a recess formed therein, the recess being defined by a bottom recess surface and a wall substantially surrounding the bottom recess surface, the bottom recess surface further including a first surface portion that is angled with respect to a be illuminated;

a plurality of heads attached to the base wherein each of the light heads is configured to hold a set of the fiber optic lines and provide darkfield illumination;

a plurality of fiber optic lines; and

wherein the first surface portion and the light heads attached thereto are angled at an angle of about 15 degrees to provide light at an angle of about 15 degrees.

12. An automated inspection system for inspecting a substrate, comprising:

a darkfield illumination device for illuminating the substrate with darkfield illumination, the darkfield illumination device including a base having a recess formed therein, the base including a bottom surface at a bottom of the recess, the bottom surface including a first surface portion that is angled with respect to a surface to be illuminated, the darkfield illumination device including a plurality of light heads attached to the first surface portion in a substantially circular arrangement, the light heads each including a plurality of fiber optic lines for providing light toward a center of the substantially circular arrangement at an angle corresponding to the angle of the first surface portion;

a substrate provider for providing the substrate within the substantially circular arrangement of light heads;

a visual inspection device for capturing images of the substrate provided by the substrate provider;

a controller for identifying defects in the substrate based on the captured images; and,

wherein the recess is defined by

the bottom surface and a wall substantially surrounding the bottom surface.

13. An automated inspection system for inspecting a substrate, comprising:

a darkfield illumination device for illuminating the substrate with darkfield illumination, the darkfield illumination device including a base having a recess formed therein, the base including a bottom surface at a bottom of the recess, the bottom surface including a first surface portion that is angled with respect to a surface to be illuminated, the darkfield illumination device including a plurality of light heads attached to the first surface portion in a substantially circular arrangement, the light heads each including a plurality of fiber optic lines for providing light toward a center of the substantially circular arrangement at an angle corresponding to the angle of the first surface portion;

a substrate provider for providing the substrate within the substantially circular arrangement of light heads:

a visual inspection device for capturing images of the substrate provided by the substrate provider;

a controller for identifying defects in the substrate based on the captured images; and,

wherein the light heads are each tapered.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 20, 2012
From: AUGUST TECHNOLOGY CORPORATION
To: RUDOLPH TECHNOLOGIES, INC.
Reel/Frame 029583/0982 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 9, 2004
From: LI, FALAI
To: AUGUST TECHNOLOGY CORP.
Reel/Frame 015564/0567 →