Adhesive support method for wafer coating, thinning and backside processing
View Patent ↗A liquid form adhesive system is provided for spin-coating on wafers and mounting to rigid carrier substrates to support thinning and backside processing. The liquid adhesive comprises about 30–35% of a rosin, between 5–10% of a thermoplastic urethane, a nonionic surfactant present between 1–3%, and a trace of an ultraviolet fluorescing dye. The entire system is dissolved in 50–65%, by weight, of a dual solvent mixture composed of dimethylacetamide and propylene glycol monomethyl ether. When the mixture is made to a specific viscosity, filtered, applied by a spin-coating method to the wafer frontside surface, and cured, the result is a uniform and smooth surface of defined thickness. When the coated wafer is mounted to a rigid substrate, it may be mechanically thinned to thicknesses down to and beyond 25 um, depending upon the wafer composition, diameter, and process. Once thinned, the adhesive is safe for backside processing and is dissolved away at completion to provide a thinned wafer that is clean and ready for final dicing or chipping operations.
1. A method of processing patterned semiconductor wafers comprising:
applying on said wafers using a spin-on procedure a coating of a liquid adhesive composition comprising:
(a) a dual polymer system, including i) from about 30 percent to about 50 percent by weight of a resin tackifier adhesive and ii) from about 5 percent to about 25 percent by weight of a thermoplastic polymer adhesive strengthening agent,
(b) a dual solvent system for the polymers, comprising a relatively high boiling point and a relatively low boiling point solvent,
(c) a nonionic surfactant; and
(d) an ultraviolet (UV) dye detecting agent,
curing said applied composition,
mounting said wafer with cured coating onto a rigid substrate for thinning and backside processing of said wafer, and
subsequently dissolving and removing said coating from the wafer.
2. The method of claim 1 wherein the spin speed employed in applying the liquid adhesive to the wafer is between 1000–2000 rpm and results in coating of an approximate thickness of 10 microns (um) exhibiting a total thickness variation (TTV) of approximately 1 um .
3. The method of claim 1 wherein after the completion of a first spin-on application of the liquid adhesive using, when required, subsequent applications to obtain a coating of an approximate thickness of 25 microns (um) exhibiting a total thickness variation (TTV) of approximately 1–2 um.
4. The method of claim 3 wherein after application of the liquid adhesive a wafer package is obtained with a thickness of approximately 1000–2000 microns (um) and exhibiting a total thickness variation (TTV) of approximately 4 microns (um).
5. The method of claim 4 wherein a wafer package containing the spin-on liquid adhesive is chemically resistant to the etch chemistries used for post grinding and thinning stress relief.
6. The method of claim 1 wherein flaws including voids or bubbles are detected in the mounted wafer package by incorporating in the liquid adhesive a coating of diaminostilbenedisulfonic acid-cyanuric chloride ultraviolet (UV) fluorescent dye detecting agent as a means for emitting light of approximately 360 nm to excite the UV absorbing dye present, which in turn, produces a fluorescence in the visible range that can be easily observed with the aid of a simple observation microscope.
7. The method of claim 1 which utilizes a dimethylacetamide and propylene glycol monomethyl ether solvent system.
8. The method of claim 1 which utilizes an alkoxylated linear alcohol nonionic surfactant having a cloud point of 760° C.
9. The method of claim 1 which utilizes wherein the ultraviolet dye detection agent comprises a fluorescent diaminostilbenedisulfonic acid-cyanuric Chloride.
10. The method of claim 1 wherein the resin tackifier is a grain resin-modified maleic resin having a melting point between about 150° C.–200° C. and a total acid number (TAN) between about 150 mg–250 mg KOH/g.
11. The method of claim 1 wherein the polyurethane thermal plastic polymer has a softening point between about 50° C. and 80° C.