Optical fiber pressure and acceleration sensor fabricated on a fiber endface
View Patent ↗A fiber optic sensor has a hollow tube bonded to the endface of an optical fiber, and a diaphragm bonded to the hollow tube. The fiber endface and diaphragm comprise an etalon cavity. The length of the etalon cavity changes when applied pressure or acceleration flexes the diaphragm. The entire structure can be made of fused silica. The fiber, tube, and diaphragm can be bonded with a fusion splice. The present sensor is particularly well suited for measuring pressure or acceleration in high temperature, high pressure and corrosive environments (e.g., oil well downholes and jet engines). The present sensors are also suitable for use in biological and medical applications.
1. An optical fiber sensor, comprising:
a) an optical fiber with a fiber endface;
b) a hollow tube bonded to the fiber endface;
c) a diaphragm bonded to the hollow tube opposite the fiber endface, whereby the fiber endface and diaphragm define an etalon cavity.
2. The optical fiber sensor of claim 1 , wherein the hollow tube has a length in the range of 1–1000 microns.
3. The optical fiber sensor of claim 1 , wherein the hollow tube has an outer diameter approximately equal to an outer diameter of the optical fiber.
4. The optical fiber sensor of claim 1 , wherein the optical fiber, hollow tube and diaphragm are made of a material selected from the group consisting of silica and sapphire.
5. The optical fiber sensor of claim 1 , further comprising a weight bonded to the diaphragm.
6. The optical fiber sensor of claim 1 , wherein the diaphragm has a thickness in the range of 1–1000 microns.
7. The optical fiber sensor of claim 1 , wherein an exterior surface of the diaphragm is a chemically etched surface.
8. The optical fiber sensor of claim 1 further comprising an etchant protection layer on the optical fiber endface.
9. The optical fiber sensor of claim 1 further comprising a first fusion splice bonding the hollow tube to the fiber endface and a second fusion splice bonding the hollow tube to the diaphragm.
10. The optical fiber sensor of claim 1 further comprising an orifice in said hollow tube which extends from said etalon cavity to an outside wall of said hollow tube.
11. The optical fiber sensor of claim 1 further comprising a coating on at least one of said fiber endface and said diaphragm.
12. The optical fiber sensor of claim 11 wherein said coating is a metal.
13. The optical fiber sensor of claim 11 wherein said coating is a dielectric.
14. The optical fiber sensor of claim 1 further comprising a means to detect one of applied pressure and impact.
15. The optical fiber sensor of claim 1 further comprising a means to detect one of vibrations and acoustic waves.
16. The optical fiber sensor of claim 5 further comprising a means to detect one of acceleration and mechanical vibrations.
17. An optical fiber sensor, comprising:
a) an optical fiber with a relatively etchable core, and a relatively etch-resistant cladding, wherein the etchable core is recessed;
b) a diaphragm bonded to the etch-resistant cladding.
18. The optical fiber sensor of claim 17 wherein the optical fiber and diaphragm are primarily made of silica.
19. The optical fiber sensor of claim 17 wherein the etchable core is doped with a material selected from the group consisting of germanium and fluorine.
20. The optical fiber sensor of claim 17 wherein the diaphragm has a thickness in the range of 1–1000 microns.
21. The optical fiber sensor of claim 17 wherein an exterior surface of the diaphragm is a chemically etched surface.
22. A method for making an optical fiber pressure sensor, comprising the steps of:
a) fusion splicing a hollow tube to an endface of an optical fiber;
b) cleaving the hollow tube so that a portion of the hollow tube remains attached to the fiber endface;
c) fusion splicing a solid rod to a cleaved end of the hollow tube;
d) cleaving the solid rod so that a diaphragm remains attached to the hollow tube.
23. The method of claim 22 further comprising the step of chemically etching an exterior surface of the diaphragm to adjust a diaphragm thickness.