IP Library Granted Patent US 7,122,989
Granted Patent B2
US 7,122,989 · App. 10/913,267 · Granted Oct 17, 2006

Multiple speed mover assembly

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Quick Facts
Patent No.
US 7,122,989
App. No.
10/913,267
Granted
Oct 17, 2006
Kind
B2
Abstract

A mover assembly ( 16 ) that moves or positions an object ( 12 ) includes a mover output ( 226 ), an actuator ( 230 ), and a control system ( 18 ). The mover output ( 226 ) is connected to the object ( 12 ), and the actuator ( 230 ) causes the mover output ( 226 ) to move. The control system ( 18 ) selectively directs a drive signal to the actuator ( 230 ) in a first mode and in a second mode. In the first mode, a peak voltage and a baseline voltage are sequentially directed to the actuator ( 230 ). In the second mode an intermediate voltage is directed to the actuator ( 230 ), the intermediate voltage being intermediate the peak voltage and the baseline voltage.

Claims (28)

1. A mover assembly that moves or positions an object, the mover assembly comprising: a mover output that is coupled to the object, an actuator that includes an element that causes the mover output to rotate, and a control system that selectively directs a drive signal to the actuator in a first mode and in a second mode, in the first mode, a peak voltage is applied to the element to move the element to a first configuration and a baseline voltage is applied to the element to move the element to a second configuration, in the first mode, the peak voltage and the baseline voltage are sequentially applied to the element of the actuator, and in the second mode a single intermediate voltage is directed to the actuator, the intermediate voltage being less than the peak voltage.

2. The mover assembly of claim 1 wherein in the first mode, the actuator incrementally moves the mover output in a discrete step-like fashion.

3. The mover assembly of claim 1 wherein in the second mode, the control system directs a fixed voltage to the actuator that moves the mover output a fixed distance.

4. The mover assembly of claim 1 , wherein in the second mode, the element is moved to an intermediate configuration.

5. The mover assembly of claim 4 wherein in the first mode, the actuator moves the mover output in a step-like fashion and in the second mode, the control system directs a fixed voltage to the actuator.

6. The mover assembly of claim 1 wherein the element is a piezoelectric element that causes rotation of the mover output.

7. The mover assembly of claim 6 wherein the actuator includes a pair of opposed jaw elements that engage the mover output and the piezoelectric element moves the jaw elements relative to each other.

8. The mover assembly of claim 1 further comprising a measurement system that provides measurement information, and wherein the control system receives the measurement information and performs positional correction on the measurement information.

9. A precision apparatus including an object and the mover assembly of claim 1 .

10. A mover assembly that moves or positions an object, the mover assembly comprising: a mover output that is coupled to the object, a pair of jaw elements that engage the mover output, an actuator that causes relative movement of the jaw elements, the relative movement of the jaw elements causing the movement of the mover output, and a control system that selectively directs a fixed voltage to the actuator.

11. The mover assembly of claim 10 wherein the control system directs the drive signal to the actuator in a first mode and in a second mode, in the first mode, a peak voltage and a baseline voltage are sequentially directed to the actuator, and in the second mode the fixed voltage is directed to the actuator, the fixed voltage being intermediate the peak voltage and the baseline voltage.

12. The mover assembly of claim 10 wherein the actuator includes a piezoelectric element that causes rotation of the mover output.

13. A precision apparatus including an object and the mover assembly of claim 10 .

14. A method for moving or positioning an object, the method comprising the steps of:

connecting a mover output to the object;

coupling an actuator to the mover output, the actuator including an element that causes selective rotation of the mover output; and

selectively directing a drive signal to the actuator in a first mode and in a second mode, in the first mode, a peak voltage is applied to the element to move the element to a first configuration, and a baseline voltage is applied to the element to move the element to a second configuration, in the first mode, the peak voltage and the baseline voltage are sequentially applied to the element of the actuator, and in the second mode an intermediate voltage is directed to the element of the actuator to move the element to an intermediate configuration, the intermediate voltage being less than the peak voltage.

15. The method of claim 14 wherein in the first mode, the actuator incrementally moves the mover output in a discrete step-like fashion.

16. The method of claim 14 wherein in the second mode, the control system directs a fixed voltage to the actuator that moves the mover output a fixed distance.

17. The method of claim 14 wherein the element is a piezoelectric element that causes rotation of the mover output.

18. The method of claim 17 wherein the actuator includes a pair of opposed jaw elements that engage the mover output and the piezoelectric element moves the jaw elements relative to each other.

19. A mover assembly that moves or positions an object, the mover assembly comprising: a mover output that is coupled to the object, an actuator that includes an element that causes the mover output to rotate, and a control system that selectively directs a drive signal to the actuator in a first mode and in a second mode, in the first mode, a peak voltage is applied to the element to move the element to a first configuration, and a baseline voltage is applied to the element to move the element to a second configuration, and in the second mode a single intermediate voltage is directed to the element to move the element to an intermediate configuration, the intermediate voltage being less than the peak voltage, wherein in the second mode, the single intermediate voltage is a fixed voltage that moves the mover output a fixed distance.

20. A mover assembly that moves or positions an object, the mover assembly comprising: a mover output that is coupled to the object, an actuator including an element that causes the mover output to rotate, and a control system that selectively directs a drive signal to the actuator in a first mode and in a second mode, in the first mode, a peak voltage and a baseline voltage are applied to the actuator and the element is moved from a first configuration to a second configuration, and in the second mode a single intermediate voltage is directed to the actuator and the element is moved to an intermediate configuration, the intermediate voltage being less than the peak voltage.

21. The mover assembly of claim 20 wherein in the first mode, the actuator moves the mover output in a step-like fashion and in the second mode, the control system directs a fixed voltage to the actuator.

22. A mover assembly that moves or positions an object, the mover assembly comprising: a mover output that is coupled to the object, an actuator that includes a piezoelectric element that causes rotation of the mover output, and a control system that selectively directs a drive signal to the actuator in a first mode and in a second mode, in the first mode, a peak voltage and a baseline voltage are applied to the actuator, and in the second mode a single intermediate voltage is directed to the actuator, the intermediate voltage being less than the peak voltage.

23. The mover assembly of claim 22 wherein the actuator includes a pair of opposed jaw elements that engage the mover output and the piezoelectric element moves the jaw elements relative to each other.

24. A mover assembly that moves or positions an object, the mover assembly comprising: (i) a mover output that is coupled to the object, (ii) an actuator including an element that causes the mover output to rotate, (iii) a control system that selectively directs a drive signal to the element in a first mode and in a second mode, in the first mode, a peak voltage is applied to the element to move the element to a first configuration and a baseline voltage is applied to the element to move the element to a second configuration that is different from the first configuration, in the first mode the peak voltage and the baseline voltage are sequentially applied to the element, and in the second mode a single intermediate voltage is directed to the element to move the element to an intermediate configuration that is between the first configuration and the second configuration, the intermediate voltage being less than the peak voltage, and (iv) a measurement system that provides measurement information, and wherein the control system receives the measurement information and performs positional correction on the measurement information.

25. A mover assembly that moves or positions an object, the mover assembly comprising: a mover output that is coupled to the object, a pair of jaw elements that engage the mover output, an actuator that causes relative movement of the jaw elements and movement of the mover output, and a control system that selectively directs a fixed voltage to the actuator, wherein the actuator includes a piezoelectric element that causes rotation of the mover output.

Assignments (15)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
RELEASE OF SECURITY INTEREST Recorded Apr 29, 2016
From: JPMORGAN CHASE BANK N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 038581/0112 →
SECURITY AGREEMENT Recorded Jul 22, 2013
From: NEWPORT CORPORATION
To: JPMORGAN CHASE BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 030847/0005 →
RELEASE OF SECURITY INTEREST Recorded Jul 19, 2013
From: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 030833/0421 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 8, 2012
From: BOOKHAM TECHNOLOGY PLC
To: NEWPORT CORPORATION
Reel/Frame 027690/0415 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Oct 5, 2011
From: NEWPORT CORPORATION
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 027019/0462 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 10, 2009
From: BOOKHAM TECHNOLOGY
To: NEWPORT CORPORATION
Reel/Frame 023498/0574 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 5, 2004
From: GREEN, EVAN DRAKE HARRIMAN
To: BOOKHAM TECHNOLOGY PLC
Reel/Frame 015675/0696 →