Semiconductor device including a capacitor having improved structural stability and enhanced capacitance, and method of manufacturing the semiconductor device
In a method of manufacturing a semiconductor device including a capacitor having improved structural stability and enhanced capacitance, a contact region is formed on a surface portion of a semiconductor substrate. After a mold layer is formed on the substrate, a stabilizing member is formed to encompass a storage electrode. A contact hole is formed through the mold layer to expose a sidewall of the stabilizing member and the contact region. The storage electrode is formed on the exposed contact region and on the exposed sidewall of the stabilizing member. A dielectric layer and a plate electrode are successively formed on the storage electrode. The capacitor including the storage electrode and the stabilizing member will have improved structural stability that resists mechanical collapse even when the capacitor has an extremely high aspect ratio.
1. A capacitor comprising:
a storage electrode including polysilicon doped with first impurities;
a dielectric layer formed on the storage electrode;
a plate electrode formed on the dielectric layer;
a stabilizing member fixed to the storage electrode for structurally stabilizing the storage electrode, and including polysilicon doped with second impurities.
2. The capacitor of claim 1 , wherein the stabilizing member is connected to an adjacent stabilizing member of an adjacent capacitor.
3. The capacitor of claim 2 , wherein the stabilizing member and the adjacent stabilizing member are connected to each other along a diagonal direction relative to a direction where the storage electrode and an adjacent electrode are arranged.
4. The capacitor of claim 1 , wherein the stabilizing member is fixed at an upper portion of the storage electrode.
5. The capacitor of claim 4 , wherein the stabilizing member has an upper portion wider than a lower portion of the stabilizing member.
6. The capacitor of claim 5 , wherein the storage electrode has a cylindrical shape.
7. The capacitor of claim 6 , wherein the storage electrode has an upper portion wider than a lower portion of the storage electrode in accordance with the stabilizing member.
8. The capacitor of claim 7 , wherein an inside of the stabilizing member is partially embedded in the storage electrode, and the lower portion of the stabilizing member is supported by the storage electrode.
9. The capacitor of claim 8 , wherein the upper portion of the stabilizing member encompasses the storage electrode.
10. The capacitor of claim 5 , wherein the stabilizing member encompasses the upper portion of the storage electrode.
11. The capacitor of claim 10 , wherein the stabilizing member has a ring shape.
12. The capacitor of claim 10 , wherein the stabilizing member has a bowl shape having an opened bottom portion.
13. The capacitor of claim 1 , wherein the stabilizing member is resistant to an LAL solution.
14. The capacitor of claim 1 , wherein the first impurities are P type impurities, and the second impurities are N type impurities.
15. The capacitor of claim 14 , wherein the first impurities comprise phosphor(P) or arsenic(As), and the second impurities comprise boron(B) or gallium(Ga).
16. A capacitor comprising:
a cylindrical storage electrode;
a dielectric layer formed on the storage electrode;
a plate electrode formed on the dielectric layer; and
a ring-shaped structure fixed to an upper portion of the storage electrode, wherein the ring-shaped structure has an extended upper portion wider than a lower portion of the ring-shaped structure, and wherein the ring-shaped structure and an adjacent ring-shaped structure of an adjacent capacitor are connected with each other along a diagonal direction relative to a direction where the storage electrode and an adjacent storage electrode are arranged.
17. The capacitor of claim 16 , wherein a sidewall of the ring-shaped structure is partially embedded in the storage electrode, and the lower portion of the ring-shaped structure is supported by the storage electrode.