Method of fabricating AlGaInP light-emitting diode and structure thereof
A soft transparent adhesive layer is utilized to bond a transparent substrate material onto an AlGaInP light-emitting diode epitaxy on a GaAs substrate, and the GaAs substrate is next removed entirely. Then, a mesa etching process is performed to form a first top surface and a second top surface on the AlGaInP light-emitting diode epitaxy for respectively exposing an n-type layer and a p-type layer in the AlGaInP light-emitting diode epitaxy. Next, a metal reflective layer and a barrier layer are formed on the AlGaInP light-emitting diode epitaxy in turn, and electrodes are finally fabricated on the barrier layer.
1. A method of fabricating an AlGaInP light-emitting diode, comprising the steps of:
forming at least an AlGaInP light-emitting diode epitaxy on a substrate;
utilizing a soft transparent adhesive layer to bond a transparent substrate material onto the AlGaInP light-emitting diode epitaxy, wherein the soft transparent adhesive layer is between the transparent substrate material and the AlGaInP light-emitting diode epitaxy;
removing the substrate to expose entirely the AlGaInP light-emitting diode epitaxy;
etching the AlGaInP light-emitting diode epitaxy to remove a portion of the AlGaInP light-emitting diode epitaxy to a depth so the AlGaInP light-emitting diode epitaxy has a first top surface and a second top surface, wherein the first top surface has a greater distance than the second top surface from the transparent substrate material, the first top surface has a first-type electricity, and the second top surface has a second-type electricity;
forming a metal reflective layer on the first top surface and a portion of the second top surface of the AlGaInP light-emitting diode epitaxy; and
fabricating a first electrode and a second electrode on the metal reflective layer, wherein the first electrode is above the first top surface of the AlGaInP light-emitting diode epitaxy, and the second electrode is above the second top surface of the AlGaInP light-emitting diode epitaxy.
2. The method of claim 1 , wherein a method of forming the AlGaInP light-emitting diode epitaxy comprises the steps of:
forming a first-type AlGaInP layer on the substrate;
forming an active layer on the first-type AlGaInP layer; and
forming a second-type AlGaInP layer on the active layer.
3. The method of claim 1 , wherein the substrate is GaAs.
4. The method of claim 1 , wherein the soft transparent adhesive layer is made from bisbenzocyclobutene (BCB) resin.
5. The method of claim 1 , wherein the transparent substrate material is sapphire, glass, GaP, or SiC.
6. The method of claim 1 , wherein the metal reflective layer is made from Au, Al, Ag, or Ag alloy.
7. The method of claim 1 , wherein between the step of forming the AlGaInP light-emitting diode epitaxy and the step of utilizing the soft transparent adhesive layer to bond the transparent substrate material further comprises roughening a surface of the AlGaInP light-emitting diode epitaxy to form a rough surface.
8. The method of claim 7 , wherein the surface of AlGaInP light-emitting diode epitaxy is roughened by micro etching.
9. The method of claim 7 , wherein the rough surface of the AlGaInP light-emitting diode epitaxy is composed of bar-shaped, triangular, or round salient figures.
10. The method of claim 1 , wherein between the step of forming the metal reflective layer and the step of fabricating the first electrode and the second electrode further comprises forming a barrier layer, wherein a portion of the barrier layer is interlaid between the metal reflective layer and the first electrode, and another portion of the barrier layer is between the metal reflective layer and the second electrode.
11. The method of claim 10 , wherein the barrier layer is made from Ni, W, tungsten nitride (WN), titanium nitride (TiN), platinum (Pt), zinc oxide (ZnO), or indium tin oxide (ITO).
12. The method of claim 1 , further comprising a step of surface-roughening the transparent substrate material to form another rough surface.
13. A method of fabricating an AlGaInP light-emitting diode, comprising the steps of:
forming at least an AlGaInP light-emitting diode epitaxy on a substrate;
roughening the AlGaInP light-emitting diode epitaxy to form a rough surface;
utilizing a soft transparent adhesive layer to bond a transparent substrate material onto the AlGaInP light-emitting diode epitaxy, wherein the soft transparent adhesive layer is between the transparent substrate material and the AlGaInP light-emitting diode epitaxy;
removing the substrate to expose entirely the AlGaInP light-emitting diode epitaxy;
etching the AlGaInP light-emitting diode epitaxy to remove a portion of the AlGaInP light-emitting diode epitaxy to a depth so the AlGaInP light-emitting diode epitaxy has a first top surface and a second top surface, wherein the first top surface has a greater distance than the second top surface from the transparent substrate material, and the first top surface and the second top surface have a first-type electricity and a second-type electricity, respectively;
forming a metal reflective layer on the first top surface and a portion of the second top surface of the AlGaInP light-emitting diode epitaxy;
forming a barrier layer on the metal reflective layer; and
fabricating a first electrode and a second electrode on the metal reflective layer, wherein the first electrode is above the first top surface of the AlGaInP light-emitting diode epitaxy, and the second electrode is above the second top surface of the AlGaInP light-emitting diode epitaxy.