Composition to provide a layer with uniform etch characteristics
View Patent ↗The present invention includes a composition to form a layer on a substrate having uniform etch characteristics. To that end, the composition has a plurality of components, a subset of which has substantially similar rates of evaporation for an interval of time.
1. A composition comprising:
a plurality of polymerizable components, including a silicon-containing polymerizable component and a silicon-free polymerizable component; and
an initiator component to facilitate a change of phase state of said plurality of polymerizable components between a fluidic phase state and a solidified phase state, where said plurality of polymerizable components have a predetermined relative rate of evaporation less than 0.1% per second during a predetermined interval of time in a range of 0 to 20 seconds.
2. The composition as recited in claim 1 wherein said plurality includes all of said plurality of polymerizable components.
3. The composition as recited in claim 1 wherein each of said plurality of polymerizable components has a similar rate of evaporation within a predetermined range during a predetermined interval of time.
4. The composition as recited in claim 1 wherein said plurality of polymerizable components has a rate of evaporation within a predetermined range during an interval of time in a range of 10 to 20 seconds, inclusive.
5. The composition as recited in claim 1 wherein said composition has a viscosity associated therewith to facilitate formation of droplets upon a substrate having a volume associated therewith of at least 80 pL.
6. The composition as recited in claim 1 wherein said composition has a viscosity associated to facilitate deposition upon a substrate employing spincoating processes.
7. The composition as recited in claim 1 wherein said silicon-containing polymerizable component includes acryloxymethylbis(trimethylsiloxy)methylsilane and said silicon-free polymerizable component includes isobornyl acrylate.
8. The composition as recited in claim 1 wherein said silicon-containing polymerizable component includes acryloxymethyltris(trimethylsiloxy)silane and said silicon-free polymerizable component includes isobornyl acrylate.
9. The composition as recited in claim 1 wherein said silicon-containing polymerizable component includes 3-acryloxypropylbis(trimethylsiloxy) methylsilane and said silicon-free component includes isobornyl acrylate.
10. The composition as recited in claim 1 wherein said silicon-containing polymerizable component includes 3-acryloxypropyltris(trimethylsiloxy)silane molecules and said silicon-free polymerizable component includes isobornyl acrylate.
11. The composition as recited in claim 1 wherein said silicon-free polymerizable component includes a cross-linker component.
12. The composition as recited in claim 1 wherein said initiator component includes 2-hydroxy-2-methyl-1-phenyl-propan-1-one.
13. The composition as recited in claim 1 further including a surfactant.
14. The composition as recited in claim 1 wherein said silicon-free polymerizable component further includes first and second sub-components, with said first sub-component being a cross-linker component, with said cross-linker component consisting of approximately 10%-40% of said composition, and said second sub-component consisting of approximately 20% to 60% of said composition and said silicon-containing component consisting of approximately 30% to 50% of said composition.
15. A composition comprising:
a plurality of acrylate components, including a silicon-containing acrylate component and a first silicon-free acrylate component and a second silicon-free acrylate component; and
an initiator component to facilitate a change of phase state of said plurality of acrylate components between liquefied phase state and a solidified phase state, with each of said plurality of acrylate components having a predetermined relative rate of evaporation less than 0.1% per second during a predetermined interval of time in a range of 0 to 20 seconds.
16. The composition as recited in claim 15 wherein said composition has a viscosity associated therewith to facilitate formation of droplets upon a substrate having a volume associated as small as 80 pL.
17. The composition as recited in claim 15 wherein said composition has a viscosity associated to facilitate deposition upon a substrate employing spincoating processes.
18. The composition as recited in claim 15 wherein said silicon-containing acrylate component comprises 30% to 50% of said composition and includes acryloxymethylbis(trimethylsiloxy)methylsilane and said first silicon-free acrylate component comprises 20% to 60% of said composition and includes isobornyl acrylate and said second silicon-free acrylate components comprises 10% to 40% of said composition and includes ethylene glycol diacrylate.
19. The composition as recited in claim 15 wherein said silicon-containing acrylate component comprises 30% to 50% of said composition and includes acryloxymethyltris(trimethylsiloxy)silane and said first silicon-free acrylate component comprises 20% to 60% of said composition and includes isobornyl acrylate and said second silicon-free acrylate components comprises 10% to 40% of said composition and includes ethylene glycol diacrylate.
20. The composition as recited in claim 15 wherein said silicon-containing acrylate component comprises 30% to 50% of said composition and includes 3-acryloxypropylbis(trimethylsiloxy)methylsilane and said first silicon-free acrylate component comprises 20% to 60% of said composition and includes isobornyl acrylate and said second silicon-free acrylate components comprises 10% to 40% of said composition and includes ethylene glycol diacrylate.
21. The composition as recited in claim 15 wherein said silicon-containing acrylate component comprises 30% to 50% of said composition and includes 3 acryloxypropyltris(trimethylsiloxy)silane and said first silicon-free acrylate component comprises 20% to 60% of said composition and includes isobornyl acrylate and said second silicon-free acrylate components comprises 10% to 40% of said composition and includes ethylene glycol diacrylate.
22. The composition as recited in claim 15 wherein said silicon-free acrylate component includes a cross-linker component.
23. The composition as recited in claim 15 wherein said initiator component includes 2-hydroxy-2-methyl-1-phenyl-propan-1-one.
24. A composition comprising:
an isobornyl acrylate component;
an ethylene glycol diacrylate component;
a photo-initiator component; and
a silicon-containing acrylate component selected from a set of components consisting essentially of acryloxymethylbis(trimethylsiloxy)methylsilane, acryloxymethyltris(trimethylsiloxy)silane and 3-acryloxypropylbis(trimethylsiloxy)methylsilane where said polymerizable components have a predetermined rate of evaporation less than 0.1% per second during a predetermined interval of time in a range of 0 to 20 seconds.
25. The composition as recited in claim 24 wherein each of isobornyl acrylate component, said silicon-containing component, said ethylene glycol diacrylate component have a predetermined relative rate of evaporation associated therewith.
26. The composition as recited in claim 24 wherein said silicon-containing acrylate component comprises 30% to 50% of said composition isobornyl acrylate component comprises 20% to 60% of said composition and said ethylene glycol diacrylate component comprises 10% to 40% of said composition.
27. The composition as recited in claim 26 further including a surfactant.
28. The composition recited in claim 27 wherein said surfactant comprises approximately 0.5% to 2% of said composition and includes a fluorinated polymeric surfactant.
29. A composition comprising:
an isobornyl acrylate component;
an ethylene glycol diacrylate component; and
a photo-initiator component; and
a silicon-containing acrylate component consisting essentially of 3-acryloxypropyltris(trimethylsiloxy)silane where said polymerizable components have a predetermined rate of evaporation less than 0.1% per second during a predetermined interval of time in a range of 0 to 20 seconds.