Granted Patent B2

US 7,259,092 · App. 10/930,164 · Granted Aug 21, 2007

Abstract

Claims (41)

1. A method for fabricating a semiconductor device comprising:

forming a contact hole in an insulating interlayer of a semiconductor substrate;

depositing a barrier metal layer on an inner surface of the contact hole and an upper surface of the insulating interlayer, wherein the process of depositing the barrier metal is performed by sequentially progressing one cycle of:

injecting a reaction gas of SiH 4 to the chamber;

injecting a first purging gas to the chamber;

injecting a reaction gas of WF 6 to the chamber;

injecting a second purging gas to the chamber;

injecting a reaction gas of NH 3 to the chamber; and

injecting a third purging gas to the chamber;

depositing a first metal layer for nucleation on the barrier metal layer by the atomic layer deposition process; and

depositing a second metal layer on the first metal layer inside the contact hole, to fill the contact hole completely.

2. The method of claim 1 , wherein depositing the barrier metal layer and depositing the first metal layer are performed in the same chamber.

3. The method of claim 2 , wherein the barrier metal layer comprises a WSiN monatomic layer.

4. The method of claim 3 , wherein the WSiN monatomic layer has a thickness of 20 Å to 100 Å.

5. The method of claim 3 , wherein the WSiN layer is deposited at a chamber temperature between 200° C. and 600° C.

6. The method of claim 1 , wherein the reaction gas of SiH 4 is injected to the chamber at a flux of 50 to 100 SCCM.

7. The method of claim 1 , wherein the reaction gas of WF 6 is injected to the chamber at a flux of 10 to 50 SCCM.

8. The method of claim 1 , wherein the reaction gas of NH 3 is injected to the chamber at a flux of 30 to 80 SCCM.

9. The method of claim 1 , wherein the reaction gas of SiH 4 and the reaction gas of WF 6 are injected at a ratio from 4 to 1 to 7 to 1.

10. The method of claim 1 , wherein the first, second, and third purging gasses comprise argon gas.

11. The method of claim 1 , wherein the first, and second metal layers comprise a tungsten material.

12. The method of claim 11 , wherein the process of forming the first metal layer of the tungsten material is performed by sequentially progressing one cycle of:

injecting a reaction gas of SiH 4 to the chamber;

injecting a first purging gas to the chamber;

injecting a reaction gas of WF 6 to the chamber;

injecting a second purging gas to the chamber;

injecting a reaction gas of NH 3 to the chamber; and

injecting a third purging gas to the chamber.

13. The method of claim 12 , wherein the first, second, and third purging gasses comprise argon gas.

14. The method of claim 11 , wherein the first metal layer of the tungsten material has a thickness of 20 Å to 100 Å.

15. The method of claim 1 , wherein the second metal layer is deposited by chemical vapor deposition.

16. A semiconductor device comprising:

a semiconductor substrate;

an insulating interlayer having a contact hole, on the semiconductor substrate;

a barrier metal layer comprising WSiN on an inner surface of the contact hole;

a first metal layer for nucleation on the barrier metal layer inside the contact hole; and

a second metal layer on the first metal layer inside the contact hole, filling the contact hole.

17. The semiconductor device of claim 16 , wherein the first and second metal layers comprise a tungsten material.

18. The method of claim 10 , wherein the first, second, and third purging gasses further comprise hydrogen gas.

19. The method of claim 13 , wherein the first, second, and third purging gasses further comprise hydrogen gas.

20. The semiconductor device of claim 16 , wherein the barrier layer has a thickness of 20 Å to 100 Å.

Assignments (6)