Granted Patent B2

US 7,227,098 · App. 10/931,461 · Granted Jun 5, 2007

Abstract

Claims (48)

1. A method for operating a laser characterized by a PRF parameter that specifies a PRF at which pulses produced by the laser have desirable pulse properties for irradiating a target that is one of a set of structures on or within a workpiece, the laser emitting a laser pulse that propagates along a laser beam propagation path terminating at a laser beam spot on the workpiece, the method being effective to operate the laser at an effective PRF lower than the PRF parameter without substantially degrading the desirable pulse properties, the method comprising:

receiving data indicating the location on the workpiece of the target to be selectively irradiated with the laser pulse;

determining a firing position of the laser beam spot relative to the workpiece at which the laser should emit a pulse directed at the target;

calculating, based on a desired charging time, a charging start position of the laser beam spot relative to the workpiece at which the laser should begin charging so as to charge for the desired charging time before the laser beam spot reaches the firing position, wherein the charging start position is not a location of a structure on the workpiece;

moving the workpiece and the laser beam spot relative to one another such that the laser beam spot moves over the charging start position and then to the firing position;

sensing a position of the laser beam spot relative to the workpiece as the workpiece moves relative to the laser beam spot;

commencing charging of the laser when the laser beam spot is at the charging start position, whereby the laser charges for approximately the desired charging time; and

firing the laser when the laser beam spot reaches the firing position, whereby the laser emits a pulse having desired pulse properties.

2. The method of claim 1 , further comprising:

pumping the laser continuously at a constant power.

3. The method of claim 1 , further comprising:

repeating the determining, calculating, moving, sensing, commencing, and firing steps for each structure in the set of structures.

4. The method of claim 1 , wherein the commencing step comprises:

pre-pulsing the laser to thereby release charged laser energy in a pre-pulse and the pre-pulse when the laser beam spot is at the charging start position; and

preventing the pre-pulse from reaching the workpiece.

5. The method of claim 1 , wherein the laser comprises a Q switch, the commencing step comprises closing the Q switch, and the firing step comprises opening the Q switch.

6. The method of claim 1 , further comprising:

preventing the pulse from reaching the workpiece.

7. The method of claim 1 , further comprising:

allowing the pulse to reach the workpiece.

8. The method of claim 1 , wherein the desired charging time is a function of the PRF parameter.

9. A method for operating a machine having a laser characterized by a PRF parameter that specifies a PRF at which pulses produced by the laser have desirable pulse properties for irradiating structures on or within a workpiece for a given purpose, the structures being arranged in on the workpiece a linear pattern having an approximately equal pitch between adjacent structures, the laser emitting a laser pulse that propagates along a laser beam propagation path terminating at a laser beam spot on the workpiece, the machine being capable of moving the workpiece and the laser beam spot relative to one another at a maximum speed that is less than the product of the PRF parameter and the pitch, the method being effective to move the laser beam spot across the structures along the linear pattern to selectively irradiate selected ones of the structures with the laser without substantially degrading the desirable pulse properties, the method comprising:

receiving data indicating the locations on the workpiece of the structures;

moving the workpiece and the laser beam spot relative to one another such that the laser beam spot moves along the linear pattern across the structures at a motion speed less than the product of the PRF parameter and the pitch;

commencing charging of the laser approximately a desired charging time before the laser beam spot is expected to reach each structure location, wherein the desired charging time is less than the quotient of the pitch divided by the motion speed;

firing the laser when the laser beam spot reaches each structure location, whereby the laser emits a pulse having desired pulse properties; and

selectively blocking the laser beam propagation path depending upon whether the structure to which the laser beam is directed has been selected for irradiation.

10. A method according to claim 9 , wherein the laser has a Q switch, commencing charging of the laser comprises closing the Q switch, and firing the laser comprises opening the Q switch.

11. The method of claim 9 , further comprising:

monitoring the position of the laser beam spot relative to the workpiece as the laser beam spot;

determining charging start positions at which the laser beam spot will be located at the desired charging time before the laser beam spot is expected to reach each structure location; and

performing the firing step when the position of the laser beam spot relative to the workpiece as the laser beam spot matches a charge start position.

12. The method of claim 9 , further comprising:

calculating times at which to perform the commencing and firing steps; and

performing the commencing and firing steps at times calculated by the calculating step.

13. The method of claim 9 , wherein commencing charging comprise:

pre-pulsing the laser to emit a pre-pulse so that the pre-pulse ends as the commencing step begins; and

blocking the pre-pulse from reaching the workpiece.

14. The method of claim 9 , wherein the workpiece is a semiconductor substrate.

15. The method of claim 14 , wherein the structures are electrically conductive links that are severed when irradiated with the laser pulse.

16. The method of claim 9 , wherein the desired charging time is a function of the PRF parameter.

17. The method of claim 16 , wherein the firing step is initiated in advance of the laser beam spot intersecting each structure location by an amount based on one or more delays associated with firing the laser.

18. A computer-readable medium for use with a system for operating a machine having a laser characterized by a PRF parameter that specifies a PRF at which pulses produced by the laser have desirable pulse properties for irradiating structures on or within a workpiece for a given purpose, the structures being arranged in on the workpiece a linear pattern having an approximately equal pitch between adjacent structures, the laser emitting a laser pulse that propagates along a laser beam propagation path terminating at a laser beam spot on the workpiece, the machine being capable of moving the workpiece and the laser beam spot relative to one another at a maximum speed that is less than the product of the PRF parameter and the pitch, the method being effective to move the laser beam spot across the structures along the linear pattern to selectively irradiate selected ones of the structures with the laser without substantially degrading the desirable pulse properties, the computer-readable medium causing the controller to perform a method comprising:

receiving data indicating the locations on the workpiece of the structures;

moving the workpiece and the laser beam spot relative to one another such that the laser beam spot moves along the linear pattern across the structures at a motion speed less than the product of the PRF parameter and the pitch;

commencing charging of the laser approximately a desired charging time before the laser beam spot is expected to reach each structure location, wherein the desired charging time is less than the quotient of the pitch divided by the motion speed;

firing the laser when the laser beam spot reaches each structure location, whereby the laser emits a pulse having desired pulse properties; and

selectively blocking the laser beam propagation path depending upon whether the structure to which the laser beam is directed has been selected for irradiation.

Assignments (8)