Optical component formation method
View Patent ↗Provided are methods of forming optical components. The methods involves (a) forming over a substrate a layer of a photoimageable composition that includes a hybrid organic-inorganic polymer and a photoactive component, wherein the layer has a first index of refraction and a first dissolution rate; and (b) exposing by multi-photon absorption using actinic radiation a predefined volume of the layer. The volume is caused to have: (i) a second index of refraction which is different than the first index of refraction and/or (ii) a second dissolution rate which is different than the first dissolution rate. The methods have particular applicability in the formation of optical waveguides and other optical components.
1. A method of forming an optical component, comprising;
(a) forming over a substrate a layer of a photoimageable composition comprising a hybrid organic-inorganic polymer comprising polymerized units of the formula (RSiO 1.5 ), wherein R is a substituted or unsubstituted organic side chain group, and a photoactive component, wherein the layer has a first index of refraction and a first dissolution rate; and
(b) exposing by multi-photon absorption using actinic radiation a predefined volume of the layer, thereby causing the volume to have: (i) a second index of refraction which is different than the first index of refraction and/or (ii) a second dissolution rate which is different than the first dissolution rate.
2. The method of claim 1 , wherein the hybrid organic-inorganic polymer comprises polymerized units of the formula (R 1 SiO 1.5 ) and (R 2 SiO 1.5 ), wherein R 1 and R 2 are different and are substituted or unsubstituted organic side chain groups.
3. The method of claim 2 , wherein one of R 1 and R 2 is a substituted or unsubstituted aromatic group and the other of R 1 and R 2 is a substituted or unsubstituted aliphatic group.
4. The method of claim 3 , wherein one of R 1 and R 2 is a phenyl group and the other of R 1 and R 2 is a methyl group.
5. The method of claim 3 , wherein the hybrid organic-inorganic polymer further comprises a polymerized unit of the formula ((R 3 ) 2 SiO), wherein the R 3 groups are the same or different and are substituted or unsubstituted organic groups.
6. The method of claim 1 , wherein the hybrid organic-inorganic polymer further comprises a polymerized unit of the formula ((R 3 ) 2 SiO), wherein the R 3 groups are the same or different and are substituted or unsubstituted organic groups.
7. The method of claim 1 , wherein the photoactive component comprises a photoacid or a photobase generator.
8. The method of claim 1 , wherein the multi-photon absorption comprises two-photon absorption.
9. The method of claim 1 , wherein the actinic radiation is one or more selected from visible and near infrared radiation.
10. The method of claim 1 , wherein the actinic radiation is generated by a laser.
11. The method of claim 10 , wherein the laser generates the actinic radiation as a series of pulses.
12. The method of claim 10 , wherein the actinic radiation is generated by a plurality of laser beams.
13. The method of claim 1 , wherein the method is a development-free process.
14. The method of claim 1 , further comprising developing the exposed substrate with an aqueous base developer.
15. A method of forming an optical waveguide, comprising:
(a) forming over a substrate a layer of a photoimageable composition comprising a hybrid organic-inorganic polymer comprising polymerized units of the formula (RSiO 1.5 ), wherein R is a substituted or unsubstituted organic side chain group, and a photoactive component, wherein the layer has a first index of refraction and a first dissolution rate; and
(b) exposing by multi-photon absorption using actinic radiation a predefined volume of the layer, thereby causing the volume to have: (i) a second index of refraction which is different than the first index of refraction and/or (ii) a second dissolution rate which is different than the first dissolution rate, wherein the exposed volume of the layer forms a waveguide core.
16. The method of claim 15 , wherein the method is a development-free process.
17. The method of claim 15 , further comprising developing the exposed substrate with an aqueous base developer.