Solid-state imaging device, method for manufacturing the same, and method for driving the same
View Patent ↗In a solid-state imaging device in which a N-type photoelectric conversion region is formed in a P − -type well region, a light-blocking film and a transparent conductive film are formed on the N-type photoelectric conversion region with a second interlayer insulation film interposed therebetween. By applying a negative voltage to the light-blocking film and the transparent conductive film, a P ++ -type inversion region is formed in a topmost part of the N-type photoelectric conversion region.
1. A method for driving a solid-state imaging device, the solid-state imaging device comprising:
a first-conductivity-type semiconductor substrate;
a second-conductivity-type photoelectric conversion region formed in the first-conductivity-type semiconductor substrate;
a transfer channel region formed in the substrate so as to be juxtaposed to the second-conductivity-type photoelectric conversion region;
a transfer electrode formed on the transfer channel region with a gate insulation film interposed therebetween;
a conductive light-blocking film that covers the transfer electrode and that has an opening above the second-conductivity-type photoelectric conversion region; and
a transparent conductive film that is formed on the second-conductivity-type photoelectric conversion region with an interlayer insulation film interposed therebetween, and is connected electrically with the conductive light-blocking film,
the method comprising the steps of:
(a) accumulating signal charges generated by photoelectric conversion in the second-conductivity-type photoelectric conversion region, while transferring signal charges through the transfer channel region; and
(b) reading out the accumulated signal charges into the transfer channel region, wherein
in the step (a), a negative voltage is applied to the conductive light-blocking film and the transparent conductive film, and
in the step (b), a voltage of not less than 0 V is applied to the conductive light-blocking film and the transparent conductive film.
2. A method for driving a solid-state imaging device, the solid-state imaging device comprising:
a first-conductivity-type semiconductor substrate;
a second-conductivity-type photoelectric conversion region formed in the first-conductivity-type semiconductor substrate, the second-conductivity-type photoelectric conversion region having a peripheral portion including a periphery thereof and a central portion excluding the periphery thereof;
an electrode formed on a region juxtaposed to the second-conductivity-type photoelectric conversion region in the substrate with a gate insulation film interposed therebetween;
a conductive light-blocking film that is formed above the peripheral portion of the second-conductivity-type photoelectric conversion region and above the electrode, with an interlayer insulation film interposed therebetween, and that has an opening above the central portion of the second-conductivity-type photoelectric conversion region; and
a first-conductivity-type semiconductor region that is an impurity diffusion region formed in a topmost part in the central portion of the second-conductivity-type photoelectric conversion region,
the method comprising the steps of:
(a) accumulating signal charges generated by photoelectric conversion in the second-conductivity-type photoelectric conversion region, while transferring signal charges through the transfer channel region; and
(b) reading out the accumulated signal charges into the transfer channel region, wherein
in the step (a), a negative voltage is applied to the conductive light-blocking film, and
in the step (b), a voltage of not less than 0 V is applied to the conductive light-blocking film.
3. A method for manufacturing the solid-state imaging device, the solid-state imaging device comprising:
a first-conductivity-type semiconductor substrate;
a second-conductivity-type photoelectric conversion region formed in the first-conductivity-type semiconductor substrate, the second-conductivity-type photoelectric conversion region having a peripheral portion including a periphery thereof and a central portion excluding the periphery thereof;
an electrode formed on a region juxtaposed to the second-conductivity-type photoelectric conversion region in the substrate with a gate insulation film interposed therebetween;
a conductive light-blocking film that is formed above the peripheral portion of the second-conductivity-type photoelectric conversion region and above the electrode, with an interlayer insulation film interposed therebetween, and that has an opening above the central portion of the second-conductivity-type photoelectric conversion region; and
a first-conductivity-type semiconductor region that is an impurity diffusion region formed in a topmost part in the central portion of the second-conductivity-type photoelectric conversion region,
the method comprising the steps of:
(a) forming a second-conductivity-type photoelectric conversion region in a first-conductivity-type semiconductor substrate, the second-conductivity-type photoelectric conversion region having a peripheral portion including a periphery thereof and a central portion excluding the periphery thereof;
(b) forming an electrode on a region juxtaposed to the second-conductivity-type photoelectric conversion region in the substrate, with a gate insulation film interposed therebetween;
(c) forming a conductive light-blocking film above the peripheral portion of the second-conductivity-type photoelectric conversion region and above the electrode, with an interlayer insulation film interposed therebetween;
(d) providing an opening in the conductive light-blocking film at a position corresponding to the central portion of the second-conductivity-type photoelectric conversion region; and
(e) forming a first-conductivity-type semiconductor region in a topmost part of the central portion of the second-conductivity-type photoelectric conversion region by implanting ions of a first-conductivity-type impurity therein.
4. The method according to claim 3 , wherein the step (e) includes sub-steps of:
forming a photoresist that covers the peripheral portion of the second-conductivity-type photoelectric conversion region and has an opening above the central portion of the second-conductivity-type photoelectric conversion region; and
implanting ions of a first-conductivity-type impurity into the second-conductivity-type photoelectric conversion region, by using the photoresist as a mask.
5. The method according to claim 3 , wherein the step (e) includes the sub-steps of:
forming a photoresist that covers at least one side part of the peripheral portion of the second-conductivity-type photoelectric conversion region and has an opening above the central portion of the second-conductivity-type photoelectric conversion region; and
implanting ions of a first-conductivity-type impurity into the second-conductivity-type photoelectric conversion region in a direction tilt with respect to a face of the semiconductor substrate, by using the photoresist as a mask.
6. The method according to claim 3 , wherein the step (e) is carried out after the step (b) is carried out, and the step (e) includes the sub-steps of:
forming a side wall on a side face of the electrode; and
implanting ions of a first-conductivity-type impurity into the second-conductivity-type photoelectric conversion region, by using the electrode and the side wall as masks.
7. The method according to claim 3 , wherein the step (e) is carried out after the step (d) is carried out, and the step (e) includes the sub-step of implanting ions of a first-conductivity-type impurity into the second-conductivity-type photoelectric conversion region, by using the conductive light-blocking film as a mask.