Semiconductor device with multilayered metal pattern
View Patent ↗A semiconductor device comprises a first insulating film formed on a semiconductor substrate, a first metal pattern formed on the first insulating film, a second insulating film formed on the first metal pattern, a second metal pattern formed on the second insulating film, and a third metal pattern formed in the second insulating film and connecting between the first metal pattern and the second metal pattern. The third metal pattern is a single continuous structure, and the principal orientation axes of crystals of a metal constituting the third metal pattern are parallel to the principal surface of the semiconductor substrate.
1. A semiconductor device comprising:
a first insulating film formed on a semiconductor substrate;
a first metal pattern formed on the first insulating film;
a second insulating film formed on the first metal pattern;
a second metal pattern formed on the second insulating film; and
a third metal pattern connecting between the first metal pattern and the second metal pattern, said third metal pattern being formed in the second insulating film,
wherein the third metal pattern is a single continuous structure having a honeycomb structure.
2. The semiconductor device of claim 1 , further comprising
at least one first interconnect electrically insulated from the first metal pattern through the first insulating film, said first interconnect being formed directly below the first metal pattern,
wherein the first metal pattern is different from the first interconnect in electrical potential.
3. The semiconductor device of claim 1 , farther comprising at least one second interconnect electrically connected to the first metal pattern with the first insulating film interposed therebetween, said second interconnect being formed directly below the first metal pattern,
wherein the first metal pattern is connected to the second interconnect through a via formed in the first insulating film.
4. The semiconductor device of claim 1 , wherein
the first metal pattern is formed larger than the second metal pattern so that an edge of the first metal pattern does not overlap with the second metal pattern.
5. The semiconductor device of claim 1 , wherein
semiconductor active elements are formed on a region of the semiconductor substrate overlapping the first metal pattern in plan configuration.
6. The semiconductor device of claim 1 , wherein
in plan configuration, the proportion of the third metal pattern to the region of the semiconductor device in which the second metal pattern is formed is 50% or more.
7. The semiconductor device of claim 1 , wherein
the metal constituting the first metal pattern is aluminum or copper.
8. The semiconductor device of claim 1 , wherein
the metal constituting the second metal pattern is aluminum or copper.
9. The semiconductor device of claim 1 , wherein
the metal constituting the third metal pattern is tungsten or copper.
10. The semiconductor device of claim 1 , wherein the principal orientation axes of crystals of a metal constituting the third metal pattern are parallel to a principal surface of the semiconductor substrate.
11. The semiconductor device of claim 10 , wherein the distribution of orientations of the principal orientation axes of crystals of the metal constituting the third metal pattern is substantially uniform in a plane parallel to the principal surface of the semiconductor substrate.
12. The semiconductor device of claim 11 , wherein the metal constituting the third metal pattern has a body-centered cubic structure, and the principal orientation axes of crystals of the metal constituting the third metal pattern are <110> axes.