Semiconductor device and method for producing the same
A semiconductor device in which chips are resin-molded, including: frames having front and back surfaces and die pads; power chips mounted on the surfaces of the die pads; an insulation resin sheet having a first and a second surfaces which are opposed against each other, the resin sheet being disposed such that the back surfaces of the die pads contact the first surface of the resin sheet; and a mold resin applied on the first surface of the resin sheet so as to seal up the power chips. The thermal conductivity of the resin sheet is larger than that of the mold resin.
1. A semiconductor device in which chips are resin-molded, comprising:
frames having die pads including front and back surfaces;
power chips mounted on the front surfaces of the die pads;
an insulation resin sheet having first and second surfaces on opposite sides of said insulation resin sheet, the insulation resin sheet being disposed such that the back surfaces of the die pads contact the first surface of the insulation resin sheet;
a mold resin applied on the first surface of the insulation resin sheet so as to seal up the power chips;
a mixture layer formed on the first surface of the insulation resin sheet where the insulation resin sheet contacts the mold resin and formed of a mixture of said insulation resin sheet and said mold resin; and
a metal foil disposed on the second surface of the insulation resin sheet,
wherein the thermal conductivity of the insulation resin sheet is at least twice as large as that of the mold resin, and
wherein the mixture layer results from contacting the insulation resin sheet in a molten state with the mold resin in a molten state.
2. The semiconductor device according to claim 1 , wherein the insulation resin sheet and the mold resin are both formed by an epoxy resin.
3. The semiconductor device according to claim 1 , wherein the area size of the insulation resin sheet is larger than that of the die pads which are on the insulation resin sheet.
4. The semiconductor device according to claim 1 , wherein the insulation resin sheet and the die pads are in direct contact.
5. The semiconductor device according to claim 1 , wherein the frames include the die pads, lead portions which are approximately parallel to the die pads, and step portions which connect the die pads with the lead portions in such a manner that the die pads and the lead portions form steps.
6. The semiconductor device according to claim 1 , wherein the insulation resin sheet is formed by a resin which contains at least one filler selected from SiO 2 , Al 2 O 3 , AlN, Si 4 and BN.
7. The semiconductor device according to claim 6 , wherein the filler has a shape like scales.
8. The semiconductor device according to claim 7 , wherein the filler is comprised of two or more types of fillers having different maximum particle diameters.