Substrates for growth of chemical compound semiconductors, chemical compound semiconductors using the substrates and processes for producing thereof
In a substrate for growth of a chemical compound semiconductor, at least on one surface of a Si single crystal substrate 2 with a thickness of 300 μm, a porous Si single crystal 4 is formed. Pores of the porous Si single crystal 4 is opened outward. The surface of the porous Si single crystal 4 is covered by a 3C—SiC single crystal layer 3 with a thickness of 1 nm. The thickness of the porous Si single crystal 4 is, for example, 10 μm.
1 . A substrate for growth of chemical compound semiconductor, comprising:
(1) a Si single crystal substrate and
(2) a porous Si single crystal layer which pores opened outward, which is formed on at least one surface of said Si single crystal substrate.
2 . A substrate as set forth in claim 1 , wherein a thickness of said porous Si single crystal layer is from not less than 100 nm to not more than 1000 μm.
3 . A substrate for growth of chemical compound semiconductor, comprising:
(1) a Si single crystal substrate and
(2) a porous Si single crystal layer formed on at least one surface of said Si single crystal substrate, wherein said surface is covered with a 3C—SiC single crystal layer.
4 . A substrate as set forth in claim 3 , wherein a thickness of said 3C—SiC single crystal layer is from not less than 0.1 nm to not more than 100 nm.
5 . A substrate for growth of chemical compound semiconductor, comprising:
(1) a Si single crystal substrate and
(2) a porous Si single crystal layer formed by making an upper part of said Si single crystal substrate porous, wherein a surface layer part thereof is carbonized to a desired depth.
6 . A substrate as set forth in claim 5 , wherein said porous Si single crystal layer is heat-treated at from not less than 800° C. to not more than 1400° C. in an atmosphere which includes carbon and said surface layer part is carbonized in a depth of from not less than 0.1 nm to not more than 100 nm from said surface.
7 . A substrate for growth of chemical compound semiconductor, comprising:
(1) a Si single crystal substrate,
(2) a porous Si single crystal layer formed on at least one surface of said Si single crystal substrate, and
(3) a SiC single crystal layer formed on said porous Si single crystal layer.
8 . A substrate for growth of chemical compound semiconductor, comprising:
(1) a Si single crystal substrate,
(2) a porous Si single crystal layer formed on said Si single crystal substrate, wherein a surface layer part thereof is carbonized to a desired depth, and
(3) a SiC single crystal layer formed on said porous Si single crystal layer.
9 . A substrate for growth of chemical compound semiconductor, comprising:
(1) a Si single crystal substrate,
(2) a porous Si single crystal layer formed on said Si single crystal substrate, wherein a surface layer thereof is recrystallized, and
(3) a SiC single crystal layer formed on said porous Si single crystal layer.
10 . A substrate for growth of chemical compound semiconductor, comprising:
(1) a Si single crystal substrate and
(2) a porous 3C—SiC single crystal layer which pores opened outward, which is formed on at least one surface of said Si single crystal substrate.
11 . A substrate for growth of chemical compound semiconductor, comprising:
(1) a Si single crystal substrate
(2) a porous Si single crystal layer which pores opened outward which is formed on at least one surface of said Si single crystal substrate
(3) a Si single crystal layer with a thickness of 0.1 to 5 μm which is formed on said porous Si single crystal layer, and
(4) a 3C—SiC single crystal layer which is formed on said Si single crystal layer.
12 . A chemical compound semiconductor, comprising:
(1) a Si single crystal substrate,
(2) a porous Si single crystal layer formed on said Si single crystal substrate, wherein a surface layer thereof is recrystallized,
(3) a c-BP single crystal layer formed on said porous Si single crystal layer, and
(4) a chemical compound semiconductor single crystal film formed on said c-BP single crystal layer.
13 . A chemical compound semiconductor, comprising:
(1) a Si single crystal substrate,
(2) a porous Si single crystal layer formed on said Si single crystal substrate,
(3) a SiC single crystal layer formed on said porous Si single crystal layer, and
(4) a 3C—SiC single crystal layer formed on said SiC single crystal layer.
14 . A substrate as set forth in claim 13 , wherein a thickness of said SiC single crystal layer is from not less than 0.1 μm to not more than 5 μm.
15 . A substrate as set forth in claim 13 , wherein said Si single crystal substrate is removed by scission or separation of said porous Si single crystal layer.
16 . A process for producing a substrate for growth of chemical compound semiconductor, comprising the steps of:
(1) forming a porous Si single crystal layer by making at least one surface of a Si single crystal substrate porous and
(2) heat-treating said porous Si single crystal layer at from not less than 800° C. to not more than 1400° C. in an atmosphere which includes carbon and carbonizing a whole thereof.
17 . A process for producing a substrate for growth of chemical compound semiconductor, comprising the steps of:
(1) forming a porous Si single crystal layer by making at least one surface of a Si single crystal substrate porous,
(2) laminating a Si single crystal film with a thickness of from not less than 0.1 μm to not more than 5 μm on said porous Si single crystal film by vapor deposition, and
(3) heat-treating said Si single crystal film at from not less than 800° C. to not more than 1400° C. in an atmosphere which includes carbon and carbonizing a surface thereof.
18 . A process as set forth in claim 17 , wherein:
after carbonization of an upper part of said Si single crystal layer, said Si single crystal substrate is removed by scission or separation of said porous Si single crystal layer.
19 . A process for producing a substrate for growth of chemical compound semiconductor, comprising the steps of:
(1) forming a porous Si layer in a depth of from not less than 300 nm to not more than 50 μm from at least one surface of a Si single crystal substrate and
(2) annealing said porous Si layer at from not less than 800° C. to not more than 1200° C. in a H 2 atmosphere and recrystallizing a surface layer thereof in a depth of from not less than 0.1 nm to not more than 1 μm.
20 . A process for producing a substrate for growth of chemical compound semiconductor, comprising the steps of:
(1) forming a porous Si layer in a depth of from not less than 300 nm to not more than 50 μm from surface of a Si single crystal substrate,
(2) annealing said porous Si layer at from not less than 800° C. to not more than 1200° C. in a H 2 atmosphere and recrystallizing a surface layer thereof in a depth of from not less than 0.1 nm to not more than 1 μm,
(3) laminating a c-BP single crystal layer on said recrystallized Si single crystal layer by epitaxial growth, and
(4) laminating a chemical compound semiconductor single crystal film on said c-BP single crystal layer by epitaxial growth.
21 . A process as set forth in claim 20 , wherein:
after lamination of said chemical compound semiconductor single crystal film, said chemical compound semiconductor single crystal film and said Si single crystal substrate are cut and separated on said porous Si layer.