Methods for forming a field effect transistor
View Patent ↗Methods for forming a field effect transistor are disclosed. An illustrated method comprises: forming a gate electrode on a substrate; and forming a nitride layer on at least a part of the gate electrode and the substrate.
1. A method for forming a field effect transistor comprising:
forming a gate electrode on a substrate;
performing nitrogen ion implantation on the gate electrode and the substrate to form a nitride layer at top surfaces of the gate electrode and the substrate that expedites subsequent growth of an oxide; and
after forming the nitride layer, forming a screen oxide layer on the nitride layer by an oxidation process.
2. A method as defined in claim 1 , wherein the nitrogen ions are implanted at an energy level of about 10 KeV˜160 KeV.
3. A method as defined in claim 1 , wherein the nitrogen ions are implanted at a dose of about 1×10 13 ions/cm 2 ˜1×10 16 ions/cm 2 .
4. A method as defined in claim 1 , wherein an injection angle of the nitrogen ion implantation is about 0°˜7°.
5. A meted as defined in claim 1 , wherein a thickness of the nitride layer is less than or equal to about 30 Å.
6. A method as defined in claim 1 , wherein forming the gate electrode comprises forming a gate oxide layer on a surface of the substrate, forming a gate conducting layer on the gate oxide layer, and etching the gate oxide layer and the gate conducting layer.
7. A method as defined in claim 6 , wherein the gate conducting layer comprises at least one layer selected from the group consisting of: a polysilicon layer, a tungsten nitride layer, a tungsten suicide layer, a TiN layer, a Ti layer and a layer including two or more of polysilicon, tungsten nitride, tungsten suicide, TiN and Ti.
8. A method for forming a field effect transistor comprising:
forming a gate electrode on a substrate;
performing nitrogen ion implantation on the gate electrode and the substrate to form a nitride layer at top surfaces of the gate electrode and the substrate;
after forming the nitride layer, forming a screen oxide layer on the nitride layer;
forming a lightly doped drain region in the substrate;
removing the screen oxide layer and the nitride layer;
forming a spacer on a sidewall of the gate electrode; and
forming a source/drain region in the substrate adjacent to the lightly doped drain region.
9. A method as defined in claim 8 , wherein the nitrogen ions are implanted at an energy level of about 10 KeV˜160 KeV.
10. A method as defined in claim 8 , wherein the nitrogen ions are implanted at a dose of about 1×10 13 ions/cm 2 1×10 16 ions/cm 2 .
11. A method as defined in claim 8 , wherein an injection angle of the nitrogen ion implantation is about 0°˜7°.
12. A method as defined in claim 8 , wherein a thickness of the nitride layer is less than or equal to about 30 Å.
13. A method as defined in claim 8 , wherein forming the gate electrode comprises: forming a gate oxide layer on a surface of the substrate, forming a gate conducting layer on the Late oxide layer, and etching the gate oxide layer and the gate conducting layer.
14. A method as defined in claim 13 , wherein the gate conducting layer comprises at least one layer selected from the group consisting of: a polysilicon layer, a tungsten nitride layer, a tungsten suicide layer, a TiN layer, a Ti layer and a layer including two or more of polysilicon, tungsten nitride, tungsten silicide, TiN and Ti.