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App. No. 10/956,607 · Confirmation No. 6748

Etching apparatus, semiconductor devices and methods of fabricating semiconductor devices

Inventor: Jung Ho Kang
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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 Code Description Pages PDF
2009-08-12 ABN Abandonment 2 View
2009-01-07 CTFR Final Rejection 16 View
2008-10-15 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2008-10-15 REM Applicant Arguments/Remarks Made in an Amendment 12 View
2008-10-15 AF/D Affidavit-submitted prior to Mar 15, 2013 16 View
2008-10-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-10-10 NTC.A.NONCPL Notice to the applicant regarding a non-compliant or non-responsive amendment 3 View
2008-07-14 RCEX Request for Continued Examination (RCE) 1 View
2008-07-14 LET. Miscellaneous Incoming Letter 3 View
2008-07-14 XT/ Extension of Time 1 View
2008-07-14 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2008-06-26 CTAV Advisory Action (PTOL-303) 3 View
2008-06-13 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2008-06-13 REM Applicant Arguments/Remarks Made in an Amendment 12 View
2008-06-13 AF/D Affidavit-submitted prior to Mar 15, 2013 16 View
2008-06-13 LET. Miscellaneous Incoming Letter 3 View
2008-06-13 XT/ Extension of Time 1 View
2008-02-13 CTFR Final Rejection 19 View
2008-02-13 892 List of references cited by examiner 1 View
2008-02-13 SRNT Examiner's search strategy and results 14 View
2007-11-13 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2007-11-13 SPEC Specification 1 View
2007-11-13 CLM Claims 4 View
2007-11-13 REM Applicant Arguments/Remarks Made in an Amendment 14 View
2007-11-13 DRW Drawings-only black and white line drawings 3 View
2007-11-13 LET. Miscellaneous Incoming Letter 3 View
2007-11-13 XT/ Extension of Time 1 View
2007-11-13 WFEE Fee Worksheet (SB06) 1 View
2007-10-17 EXIN Examiner Interview Summary Record (PTOL - 413) 4 View
2007-07-13 CTNF Non-Final Rejection 16 View
2007-07-13 892 List of references cited by examiner 3 View
2007-07-13 FOR Foreign Reference 7 View
2007-07-13 SRFW Search information including classification, databases and other search related notes 1 View
2007-07-08 SRNT Examiner's search strategy and results 5 View
2007-04-20 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2007-04-20 CLM Claims 4 View
2007-04-20 REM Applicant Arguments/Remarks Made in an Amendment 11 View
2007-04-20 DRW Drawings-only black and white line drawings 3 View
2007-04-20 IMIS Miscellaneous Internal Document 1 View
2007-04-20 LET. Miscellaneous Incoming Letter 1 View
2007-04-20 XT/ Extension of Time 2 View
2007-04-20 WFEE Fee Worksheet (SB06) 1 View
2006-12-27 CTNF Non-Final Rejection 6 View
2006-12-27 1449 List of References cited by applicant and considered by examiner 2 View
2006-12-27 892 List of references cited by examiner 2 View
2006-12-27 FOR Foreign Reference 10 View
2006-12-27 FOR Foreign Reference 8 View
2006-12-27 FOR Foreign Reference 9 View
2006-12-27 FOR Foreign Reference 23 View
2006-12-27 CLM Claims 2 View
2006-12-27 SRFW Search information including classification, databases and other search related notes 1 View
2006-12-20 SRNT Examiner's search strategy and results 2 View
2006-10-16 ELC. Response to Election / Restriction Filed 3 View
2006-10-16 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2006-09-15 CTRS Requirement for Restriction/Election 6 View
2006-04-20 N570 Communication - Re: Power of Attorney (PTOL-308) 2 View
2006-04-12 PA.. Power of Attorney 1 View
2006-04-12 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2006-04-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2005-09-30 LET. Miscellaneous Incoming Letter 1 View
2005-09-26 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-09-26 FOR Foreign Reference 3 View
2004-12-20 CFILE Request for Corrected Filing Receipt 4 View
2004-09-30 TRNA Transmittal of New Application 4 View
2004-09-30 SPEC Specification 8 View
2004-09-30 CLM Claims 3 View
2004-09-30 ABST Abstract 1 View
2004-09-30 DRW Drawings-only black and white line drawings 3 View
2004-09-30 OATH Oath or Declaration filed 2 View
2004-09-30 WFEE Fee Worksheet (SB06) 1 View
2004-09-30 WFEE Fee Worksheet (SB06) 1 View
2004-09-30 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-09-30 FRPR Certified Copy of Foreign Priority Application 14 View
2004-09-30 136A Authorization for Extension of Time all replies 4 View
2004-09-30 IMIS Miscellaneous Internal Document 1 View
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Quick Facts
App. No.
10/956,607
Filed
2004-09-30
Pub. No.
US20050085089A1
Art Unit
2894