Plasma etching method
View Patent ↗The present invention is a plasma etching method including: an arranging step of arranging a pair of electrodes oppositely in a chamber and making one of the electrodes support a substrate to be processed in such a manner that the substrate is arranged between the electrodes, the substrate having an organic-material film; and an etching step of applying a high-frequency electric power to at least one of the electrodes to form a high-frequency electric field between the pair of the electrodes, supplying a process gas into the chamber to form a plasma of the process gas by means of the electric field, and plasma-etching the organic-material film of the substrate by means of the plasma partway in order to form a groove having a flat bottom. A frequency of the high-frequency electric power applied to the at least one of the electrodes is 50 to 150 MHz in the etching step.
1. A plasma etching method comprising
an arranging step of arranging a pair of electrodes oppositely in a chamber and making one of the electrodes support a substrate to be processed in such a manner that the substrate is between the electrodes, the substrate having an organic-material film, and
an etching step of applying a first high-frequency electric power and a second high-frequency electric power to the electrode made to support the substrate to form a high-frequency electric field between the pair of electrodes, of supplying a process gas into the chamber to form a plasma of the process gas by means of the electric field, and of plasma-etching the organic-material film of the substrate by means of the plasma partway in order to form a groove having a flat bottom with a width not less than 0.5 μm,
wherein, in the etching step,
the frequency of the first high-frequency electric power is 50 MHz to 150 MHz,
the frequency of the second high-frequency electric power is 500 kHz to 27 MHz,
the first and second frequencies are applied concurrently in order to achieve high etching rates,
a pressure in the chamber is 53 to 133 Pa,
a self-bias electric voltage of the electrode supporting the substrate to be processed is not higher than 600 V, and
a residence time of the process gas in the chamber is 70 to 180 msec,
to achieve high plasma density, low self-bias voltage, uniform plasma and inhibition of micro-trenching.
2. A plasma etching method according to claim 1 , wherein
the process gas comprises at least one selected from an N 2 gas, an H 2 gas, an O 2 gas, a CO gas, an NH 3 gas, a C x H y gas (x, y are natural numbers) and a rare gas.
3. A plasma etching method according to claim 1 , wherein the organic-material film includes O, C and H.
4. A plasma etching method according to claim 1 , wherein the organic-material film includes Si, O, C and H.
5. A plasma etching method according to claim 1 , wherein the organic-material film has a low dielectric constant.
6. A plasma etching method according to claim 1 , wherein a distance between the pair of electrodes is shorter than 50 mm.