Method for fabricating micro-electro-mechanical systems
The present invention relates to micro-electro-mechanical systems (MEMS). The present invention relates to a design feature that allows lower actuation voltage for electrostatically actuated structures (i.e., switches or mirrors). The present invention further relates to a method for fabricating such a design that allows lower actuation voltage.
1. A method for fabricating an actuator having a recessed, movable electrode, comprising the steps of:
(a) forming a stationary electrode having first and second ends on a substrate;
(b) depositing a first sacrificial layer on the stationary electrode and the substrate;
(c) depositing a second sacrificial layer on the first sacrificial layer;
(d) patterning the second sacrificial layer in such a manner that the patterned second sacrificial layer includes a recessed portion on the first sacrificial layer located over the second end of the stationary electrode, and the second sacrificial layer is completely removed from a proximal portion of the first sacrificial layer located over a central portion of the stationary electrode between the first and second ends;
(e) forming a movable electrode having a first portion over the patterned recessed portion of the second sacrificial layer and a second portion over the proximal portion of the first sacrificial layer;
(f) depositing a structural layer on the first sacrificial layer, the second sacrificial layer, and the movable electrode; and
(g) removing a sufficient amount of the first and second sacrificial layers so as to separate the movable electrode from the substrate, wherein the structural layer is supported by the substrate at a fixed end and is freely suspended above the substrate at an opposing suspended end, and wherein the second portion of the movable electrode is separated from the substrate by a distance less than the distance separating the first portion from the substrate.
2. The method according to claim 1 wherein the second portion of the movable electrode is closer to the suspended end of the structural layer than the first portion of the movable electrode and the first portion of the movable electrode is closer to the fixed end of the structural layer than the second portion of the movable electrode.