Self-aligned contact structure and process for forming self-aligned contact structure
View Patent ↗A CMOS structure and a process for forming CMOS devices are disclosed in which gate film stacks are formed over a semiconductor substrate. A barrier layer and a first dielectric film are formed such that they extend over the gate film stacks. Metal lines are formed over the pre-metal dielectric film and spacers are formed that extend on opposite sides of the metal lines. A second dielectric film is formed that extends over the metal lines. A masking structure is formed that defines a contact opening. Selective etch processes are performed to form a self-aligned contact opening, with the adjacent metal lines and spacers aligning the self-aligned contact opening between adjacent gate film stacks. A metal layer is then deposited and planarized to form a self-aligned contact. The masking structure can also define additional contact openings, which are simultaneously etched and filled with metal to form borderless, strapped and shared contacts. These borderless contacts, contacts and shared contacts can either be aligned on one side or can be positioned using only the masking structure.
1. For a structure that includes adjacent gate film stacks that include gate electrodes, a barrier layer that overlies said adjacent gate film stacks, and a first dielectric film that extends over said barrier layer, a process for forming a CMOS device comprising:
forming adjacent metal lines that extend over said first dielectric film;
forming spacers that extend on opposite sides of said metal lines;
forming a second dielectric film that extends over said spacers and over said adjacent metal lines;
forming an opening so as to expose a portion of said semiconductor substrate, said opening extending between adjacent metal lines and between said adjacent gate film stacks, portions of said adjacent metal lines aligned with said adjacent gate film stacks so as to align said opening between said adjacent gate film stacks; and
filling said opening with conductive material so as to form a self-aligned contact that is electrically coupled to said semiconductor substrate.
2. The process of claim 1 wherein said forming an opening comprises:
forming a patterned photoresist layer that extends over said second dielectric film, said patterned photoresist layer including an opening, some of said opening extending between said adjacent metal lines;
performing a first selective etch so as form an opening that extends through said first dielectric film so as to expose a portion of said barrier layer; and
performing a second selective etch so as to extend said opening through said barrier layer.
3. The process of claim 2 wherein said first selective etch preferentially etches the material in said first and second dielectric films, over the material in said barrier layer and in said spacers, such that said opening extends between ones of said spacers.
4. The process of claim 3 wherein said spacers and said barrier layer comprise nitride, and wherein said first and second dielectric films comprises oxide.
5. The process of claim 1 wherein each of said adjacent gate film stacks include a gate electrode and do not include a hard mask layer that overlies said gate electrode.
6. The process of claim 5 wherein said adjacent gate film stacks extend within a first region of said semiconductor substrate, said process further comprising:
forming a plurality of additional gate film stacks within a second region of said semiconductor substrate, said gate film stacks in said first region of said semiconductor substrate spaced more closely together than said additional gate film stacks.
7. The process of claim 6 wherein said forming an opening further comprises simultaneously forming additional openings that extend within said second region of said semiconductor substrate.
8. The process of claim 7 wherein said forming adjacent metal lines further comprises forming additional metal lines that extend in said second region of said semiconductor substrate, said additional openings exposing portions of said additional metal lines, said filling said opening filling said additional openings so as to form additional contacts that are electrically coupled to said additional metal lines.
9. For a structure that includes gate film stacks that include gate electrodes, a barrier layer that overlies said gate film stacks, and a first dielectric film that extends over said barrier layer, a process for forming a CMOS device comprising:
forming adjacent metal lines that extend over said first dielectric film;
forming spacers that extend on opposite sides of said metal lines;
forming a second dielectric film that extends over said spacers and over said adjacent metal lines;
forming a masking structure that extends over said second dielectric film, said masking structure including a first opening that at least partially extends between said adjacent metal lines;
performing a first selective etch so as to form an opening that extends through said first and second dielectric films so as to expose a portion of said barrier layer;
performing a second selective etch so as to extend said opening through said barrier layer to expose a portion of said semiconductor substrate, said adjacent metal lines aligned with said adjacent gate film stacks such that said opening extends between said adjacent gate film stacks; and
filling said opening with conductive material so as to form a self-aligned contact that is electrically coupled to said semiconductor substrate.
10. The process of claim 9 wherein said filling said opening with conductive material further comprises:
depositing a metal layer over said semiconductor substrate such that said metal layer fills said opening; and
removing that portion of said metal layer that extends above said second dielectric film.
11. The process of claim 9 wherein said first selective etch preferentially etches the material in said first and second dielectric films, over the material in said barrier layer and in said spacers.
12. The process of claim 11 wherein said spacers and said barrier layer comprise nitride, and wherein said first and second dielectric films comprises oxide.
13. The process of claim 9 wherein said adjacent gate film stacks do not include a hard mask layer that overlies said gate electrode.
14. The process of claim 13 wherein said adjacent gate film stacks extend within a first region of said semiconductor substrate, said process further comprising:
forming a plurality of additional gate film stacks within a second region of said semiconductor substrate, said gate film stacks in said first region of said semiconductor substrate spaced more closely together than said additional gate film stacks.
15. The process of claim 14 wherein said forming an opening further comprises simultaneously forming additional openings that extend within said second region of said semiconductor substrate.
16. The process of claim 15 wherein said first region comprises a core region and said second region comprises a non-core region, said step of filling said contact opening further comprising filling said additional contact openings so as to form strapped contacts, borderless contacts, and shared contacts in said second region of said semiconductor substrate.