Method and apparatus for fluid processing a workpiece
A method and apparatus for fluid processing a workpiece are described. The system can include a process module and a system of one or more fluid processing elements to control the fluid flow and/or the electric field distribution during the fluid processing of the workpiece. A member can be used to agitate the fluid during deposition of a film (e.g., using an oscillatory motion). A plate can be used to shape an electric field incident on a surface of a workpiece. By controlling the fluid flow and the electric field distribution, improved deposition of the film on the workpiece surface can result. Furthermore, a vertical configuration and/or a modular architecture can be employed to improve throughput, increase productivity, and reduce cost.
1 . An apparatus for fluid processing a workpiece, comprising:
a housing capable of containing a fluid;
a workpiece holder disposed within the housing and adapted to retain the workpiece; and
a member disposed within the housing adjacent the workpiece holder and adapted to move substantially parallel to a surface of the workpiece with a non-uniform oscillatory motion to agitate the fluid.
2 . The apparatus of claim 1 wherein the non-uniform oscillatory motion comprises a reversal position that changes after each stoke of the non-uniform oscillatory motion.
3 . The apparatus of claim 1 wherein the non-uniform oscillatory motion comprises a primary oscillation stroke and at least one secondary oscillation stroke.
4 . The apparatus of claim 3 wherein the length of the primary oscillation stroke is substantially the same as the separation of spaced openings defined by the member, and a secondary oscillation stroke changes the reversal position of the non-uniform oscillatory motion of the member.
5 . The apparatus of claim 1 wherein the member defines a plurality of spaced openings.
6 . The apparatus of claim 1 wherein the member comprises a plurality of spaced blades.
7 . The apparatus of claim 6 wherein a profile of at least one of the plurality of spaced blades comprises a cup shape.
8 . The apparatus of claim 6 wherein a profile of at least one of the plurality of spaced blades comprises an angled profile.
9 . The apparatus of claim 1 wherein the member comprises two paddle plates joined by a spacer feature into a single assembly so that the workpiece holder is insertable into the member.
10 . The apparatus of claim 1 further comprising a linear motor assembly to move the member.
11 . The apparatus of claim 1 further comprising a plate disposed adjacent the member to shape the electric field incident on a surface of the workpiece.
12 . The apparatus of claim 11 wherein a body of the plate defines a plurality of holes, diameters of the plurality of holes varying on a surface of the plate.
13 . The apparatus of claim 12 wherein the plurality of holes vary in a substantially radial pattern.
14 . The apparatus of claim 1 wherein the member forms a non-periodic fluid boundary layer at the surface of the workpiece.
15 . The apparatus of claim 1 wherein the member reduces a fluid boundary layer thickness at the surface of the workpiece.
16 . The apparatus of claim 15 wherein the fluid boundary layer thickness is reduced to less than about at 10 μm.
17 . The apparatus of claim 1 wherein the member is positioned less than about 2 mm from the surface of the workpiece.
18 . A method of fluid processing a workpiece, comprising:
disposing a workpiece holder within a housing capable of containing a fluid, the workpiece holder retaining the workpiece;
positioning a member within the housing adjacent the workpiece holder; and
agitating the fluid by moving the member substantially parallel to a surface of the workpiece with a non-uniform oscillatory motion.
19 . The method of claim 18 further comprising changing a reversal position of the non-uniform oscillatory motion after each stoke of the non-uniform oscillatory motion.
20 . The method of claim 18 wherein the non-uniform oscillatory motion comprises a primary oscillation stroke and at least one secondary oscillation stroke.
21 . The method of claim 20 further comprising matching the length of the primary oscillation stroke to the separation of spaced openings defined by the member and changing the reversal position of the non-uniform oscillatory motion of the member using a secondary oscillation stroke.
22 . The method of claim 18 further comprising minimizing electric field imaging of the member on the surface of the workpiece via the non-uniform oscillatory motion.
23 . The method of claim 18 further comprising minimizing fluid flow imaging of the member on the surface of the workpiece via the non-uniform oscillatory motion of the member.
24 . The method of claim 18 further comprising shaping the electric field incident on a surface of the workpiece using a plate disposed adjacent the member.
25 . The method of claim 16 further comprising removing gas bubbles entrapped in the fluid from the surface of the workpiece.
26 . The method of claim 18 further comprising forming a non-periodic fluid boundary layer at the surface of the workpiece via the non-uniform oscillatory motion of the member.
27 . The method of claim 18 further comprising reducing a fluid boundary layer thickness at the surface of the workpiece via the non-uniform oscillatory motion of the member.
28 . The method of claim 27 further comprising reducing the fluid boundary layer thickness to less than about 10 μm.
29 . The method of claim 18 further comprising positioning the member less than about 2 mm from the surface of the workpiece.
30 . The method of claim 18 further comprising depositing a metal or a plastic on a surface of the workpiece.
31 . The method of claim 18 further comprising dissoluting a metal or a plastic on a surface of the workpiece.
32 . An apparatus for varying an electric field at a surface of a workpiece, comprising:
a housing capable of containing a fluid;
a workpiece holder disposed within the housing and adapted to retain the workpiece; and
a plate disposed within the housing and spaced from the workpiece, the plate defining a plurality of holes having a distribution of hole sizes to vary a property of the electric field passing through the plate to the surface of the workpiece.
33 . The apparatus of claim 32 wherein the distribution of hole sizes comprises a continuous gradient of hole size.
34 . The apparatus of claim 33 wherein the continuous gradient of hole size varies across the surface of the shield plate with a substantially radial pattern.
35 . The apparatus of claim 32 wherein the electric field proximate to the surface of the workpiece is uniform.
36 . The apparatus of claim 32 wherein the property of the electric field includes amplitude.
37 . The apparatus of claim 32 wherein the plate comprises a non-conductive material that serves to block a portion of the electric field as it passes through the plate to the surface of the workpiece.
38 . The apparatus of claim 32 further comprising a member adapted to move substantially parallel to a surface of the workpiece with a non-uniform oscillatory motion to agitate the fluid.
39 - 43 . (canceled)
44 . A method for varying an electric field at a surface of a workpiece, comprising:
disposing a workpiece holder within a housing capable of containing a fluid, the workpiece holder retaining the workpiece;
positioning a plate within the housing spaced from the workpiece holder, the plate defining a plurality of holes having a distribution of hole sizes; and
passing the electric field through the plate to vary a property of the electric field incident on the surface of the workpiece.
45 . The method of claim 44 wherein the distribution of hole sizes comprises a continuous gradient of hole size.
46 . The method of claim 45 wherein the continuous gradient of hole size varies across the surface of the shield plate with a substantially radial pattern.
47 . The method of claim 44 wherein the electric field proximate to the surface of the workpiece is uniform.
48 . The method of claim 44 wherein the property of the electric field includes amplitude.
49 . The method of claim 44 wherein the passing step comprises blocking a portion of the electric field as it passes through the plate to the surface of the workpiece.
50 . The method of claim 44 wherein the plate comprises a non-conductive material.
51 . The method of claim 44 further comprising disposing a member within the housing between the workpiece holder and the plate.
52 . The method of claim 51 further comprising agitating the fluid by moving the member substantially parallel to a surface of the workpiece with a non-uniform oscillatory motion.
53 - 60 . (canceled)
61 . The method of claim 44 further comprising depositing a metal or a plastic on a surface of the workpiece.
62 . The method of claim 44 further comprising dissoluting a metal or a plastic on a surface of the workpiece.
63 . The apparatus of claim 1 wherein
the member defines a plurality of spaced openings.
64 . The apparatus of claim 63 wherein a non-uniform oscillatory motion of the plurality of spaced openings agitates the fluid.
65 - 75 . (canceled)
76 . The method of claim 18 wherein the member defines a plurality of spaced openings.
77 . The method of claim 76 further comprising agitating the fluid using a non-uniform oscillatory motion of the plurality of spaced openings of the member.
78 - 90 . (canceled)
91 . An apparatus for fluid processing a workpiece, comprising:
a mean for retaining the workpiece in a housing capable of containing a fluid; and
a means for agitating the fluid with a non-uniform oscillatory motion substantially parallel to a surface of the workpiece.
92 . An apparatus for varying an electric field at a surface of a workpiece, comprising:
a mean for retaining the workpiece in a housing capable of containing a fluid; and
a means defining a plurality of holes having distribution of hole sizes for varying the electric field incident on the surface of the workpiece.
93 . (canceled)