IP Library Assignment 017507/0280
Patent Assignment
Reel/Frame 017507/0280

Assignment of Assignor's Interest

Recorded: 2006-04-21 Pages: 6
Assignor
NEXX SYSTEMS PACKAGING LLC
Executed: 2006-04-11
Assignee
NEXX SYSTEMS, INC.
5 SUBURBAN PARK DRIVE, BILLERICA, MASSACHUSETTS, 01821-3904
Covered Properties (13)
Multi-Layer Sputter Deposition Apparatus
Patent: 6,328,858 →
Application: 09/401,754 →
In-Line Sputter Deposition System
Patent: 6,217,272 →
Application: 09/404,516 →
Disk Furnace for Thermal Processing
Patent: 6,234,788 →
Application: 09/433,859 →
Permanent Magnet Ecr Plasma Source with Integrated Multipolar Magnetic Confinement
Patent: 6,396,024 →
Application: 09/469,382 →
Substrate Processing Pallet and Related Substrate Processing Method and Machine
Patent: 6,682,288 →
Application: 09/916,643 →
Publication: US 2002/0033133
Substrate Processing Pallet and Related Substrate Processing Method and Machine
Patent: 6,530,733 →
Application: 09/917,223 →
Publication: US 2002/0034429
Substrate Processing Pallet and Related Substrate Processing Method and Machine
Patent: 6,821,912 →
Application: 09/917,224 →
Publication: US 2002/0034883
Ultra-Thin Wafer Handling System
Patent: 7,100,954 →
Application: 10/618,091 →
Publication: US 2005/0110291
Method and Apparatus for Fluid Processing a Workpiece
Patent: 7,445,697 →
Application: 10/971,530 →
Publication: US 2005/0160977
Method and apparatus for fluid processing a workpiece
Application: 10/971,726 →
Publication: US 2005/0167275
Method and Apparatus for Fluid Processing a Workpiece
Patent: 7,722,747 →
Application: 10/971,729 →
Publication: US 2005/0089645
Method and apparatus for fluid processing and drying a workpiece
Application: 11/155,008 →
Publication: US 2005/0283993
Balancing Pressure to Improve a Fluid Seal
Patent: 7,727,366 →
Application: 11/265,543 →
Publication: US 2006/0110536
Related Assignments (25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest Apr 3, 2000
From: LEE, CHUNGHSIN
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 010720/0453 →
Assignment of Assignor's Interest Sep 14, 2000
From: FELSENTHAL, DAVID; LEE, CHUNGHSIN; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 011094/0484 →
Assignment of Assignor's Interest Sep 14, 2000
From: FELSENTHAL, DAVID; LEE, CHUNGHSIN; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 011093/0520 →
Assignment of Assignor's Interest Sep 29, 2000
From: DOUGHTY, FRANK CHRISTIAN; BAILEY, JOEL BRAD
To: APPLIED SCIENCE & TECHNOLOGY, INC.
Reel/Frame 011160/0938 →
Assignment of Assignor's Interest Sep 10, 2001
From: FELSENTHAL, DAVID; LEE, CHUNGHSIN; SFERALZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012146/0306 →
Assignment of Assignor's Interest Sep 10, 2001
From: FELSENTHAL, DAVID; LEE, CHUNGHSIN; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012362/0245 →
Corrective Assignment to Correct the State of Incorporation of the Assignee, Previously Recorded on Reel 010720 Frame 0453, Assignor Confirms the Assignment of the Entire Interest. Sep 10, 2001
From: LEE, CHUNGHSIN
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012148/0027 →
Assignment of Assignor's Interest Oct 1, 2001
From: MKS INSTRUMENTS, INC.; APPLIED SCIENCE AND TECHNOLOGY, INC.
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 012211/0008 →
Assignment of Assignor's Interest Jan 3, 2002
From: KLEIN, MARTIN P.; FELSENTHAL, DAVID; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012424/0407 →
Assignment of Assignor's Interest Jan 4, 2002
From: KLEIN, MARTIN P.; FELSENTHAL, DAVID; SFERLAZZO, PEIRO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012430/0656 →
Assignment of Assignor's Interest Jan 16, 2002
From: KLEIN, MARTIN P.; FELSENTHAL, DAVID; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012477/0810 →
Assignment of Assignor's Interest Feb 17, 2004
From: KLEIN, MARTIN P.; KEIGLER, ARTHUR; FELSENTHAL, DAVID
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 014978/0755 →
Security Agreement Nov 4, 2004
From: NEXX SYSTEMS, INC.
To: ENTERPRISE PARTNERS VI, L.P., AS COLLATERAL AGENT
Reel/Frame 015328/0752 →
Security Agreement Nov 5, 2004
From: NEXX SYSTEMS PACKAGING, LLC
To: ENTERPRISE PARTNERS VI, L.P.; ENTERPRISE PARTNERS V, L.P.; POST, RICHARD S.
Reel/Frame 015334/0079 →
Assignment of Assignor's Interest Apr 7, 2005
From: KEGLER, ARTHUR; HARRELL, JOHN; LIU, ZHENQIU; WU, QUNWEI
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 016032/0321 →
Corrective Assignment to Correct the Name of the First Assignor Previously Recorded on Reel 016032 Frame 0321. May 23, 2005
From: KEIGLER, ARTHUR; HARRELL, JOHN; LIU, ZHENGIU; WU, QUNWEI
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 016268/0578 →
Assignment of Assignor's Interest Sep 9, 2005
From: WU, QUNWEI; KEIGLER, ARTHUR; LIU, ZHENQIU; HARRELL, JOHN
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 016965/0877 →
Assignment of Assignor's Interest Feb 16, 2006
From: KEIGLER, ARTHUR; WU, QUNWEI; LIU, ZHENQIU; HARRELL, JOHN
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 017177/0399 →
Assignment of Assignor's Interest May 30, 2006
From: ASTEX PLASMAQUEST, INC., NEXX SYSTEMS PACKAGING, LLC
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 017931/0809 →
Assignment of Assignor's Interest Nov 5, 2007
From: NEXX SYSTEMS, INC.
To: HERCULES TECHNOLOGY GROWTH CAPITAL, INC.
Reel/Frame 020064/0111 →
Assignment of Assignor's Interest Sep 23, 2008
From: NEXX SYSTEMS, INC.
To: SEMIGEAR, INC.
Reel/Frame 021570/0022 →
Assignment of Patent Security Interest Jun 28, 2010
From: NEXX SYSTEMS, INC.
To: COMERICA BANK
Reel/Frame 024599/0050 →
Release of Security Interest May 16, 2011
From: HERCULES TECHNOLOGY GROWTH CAPITAL, INC.
To: NEXX SYSTEMS, INC.
Reel/Frame 026277/0147 →
Grant of Security Interest Jun 23, 2011
From: NEXX SYSTEMS, INC., A DELAWARE CORPORATION
To: COMERICA BANK, A TEXAS BANKING ASSOCIATION
Reel/Frame 026480/0576 →
Release of Security Interest Nov 7, 2011
From: ENTERPRISE PARTNERS VI, L.P., AS COLLATERAL AGENT; ENTERPRISE PARTNERS VI, L.P.; ENTERPRISE PARTNERS V, L.P.; POST, RICHARD S.
To: NEXX SYSTEMS, INC., A DELAWARE CORPORATION
Reel/Frame 027184/0423 →