Patent Assignment
Reel/Frame 017507/0280
Assignment of Assignor's Interest
Recorded: 2006-04-21
Pages: 6
Assignor
NEXX SYSTEMS PACKAGING LLC
Executed: 2006-04-11
Assignee
NEXX SYSTEMS, INC.
5 SUBURBAN PARK DRIVE, BILLERICA, MASSACHUSETTS, 01821-3904
Covered Properties
(13)
Multi-Layer Sputter Deposition Apparatus
Patent:
6,328,858 →
Application:
09/401,754 →
In-Line Sputter Deposition System
Patent:
6,217,272 →
Application:
09/404,516 →
Disk Furnace for Thermal Processing
Patent:
6,234,788 →
Application:
09/433,859 →
Permanent Magnet Ecr Plasma Source with Integrated Multipolar Magnetic Confinement
Patent:
6,396,024 →
Application:
09/469,382 →
Substrate Processing Pallet and Related Substrate Processing Method and Machine
Substrate Processing Pallet and Related Substrate Processing Method and Machine
Substrate Processing Pallet and Related Substrate Processing Method and Machine
Ultra-Thin Wafer Handling System
Method and Apparatus for Fluid Processing a Workpiece
Method and apparatus for fluid processing a workpiece
Application:
10/971,726 →
Publication:
US 2005/0167275
Method and Apparatus for Fluid Processing a Workpiece
Method and apparatus for fluid processing and drying a workpiece
Application:
11/155,008 →
Publication:
US 2005/0283993
Balancing Pressure to Improve a Fluid Seal
Related Assignments
(25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Apr 3, 2000
From: LEE, CHUNGHSIN
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 010720/0453 →
Assignment of Assignor's Interest
Sep 14, 2000
From: FELSENTHAL, DAVID; LEE, CHUNGHSIN; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 011094/0484 →
Assignment of Assignor's Interest
Sep 14, 2000
From: FELSENTHAL, DAVID; LEE, CHUNGHSIN; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 011093/0520 →
Assignment of Assignor's Interest
Sep 29, 2000
From: DOUGHTY, FRANK CHRISTIAN; BAILEY, JOEL BRAD
To: APPLIED SCIENCE & TECHNOLOGY, INC.
Reel/Frame 011160/0938 →
Assignment of Assignor's Interest
Sep 10, 2001
From: FELSENTHAL, DAVID; LEE, CHUNGHSIN; SFERALZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012146/0306 →
Assignment of Assignor's Interest
Sep 10, 2001
From: FELSENTHAL, DAVID; LEE, CHUNGHSIN; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012362/0245 →
Corrective Assignment to Correct the State of Incorporation of the Assignee, Previously Recorded on Reel 010720 Frame 0453, Assignor Confirms the Assignment of the Entire Interest.
Sep 10, 2001
From: LEE, CHUNGHSIN
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012148/0027 →
Assignment of Assignor's Interest
Oct 1, 2001
From: MKS INSTRUMENTS, INC.; APPLIED SCIENCE AND TECHNOLOGY, INC.
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 012211/0008 →
Assignment of Assignor's Interest
Jan 3, 2002
From: KLEIN, MARTIN P.; FELSENTHAL, DAVID; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012424/0407 →
Assignment of Assignor's Interest
Jan 4, 2002
From: KLEIN, MARTIN P.; FELSENTHAL, DAVID; SFERLAZZO, PEIRO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012430/0656 →
Assignment of Assignor's Interest
Jan 16, 2002
From: KLEIN, MARTIN P.; FELSENTHAL, DAVID; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012477/0810 →
Assignment of Assignor's Interest
Feb 17, 2004
From: KLEIN, MARTIN P.; KEIGLER, ARTHUR; FELSENTHAL, DAVID
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 014978/0755 →
Security Agreement
Nov 4, 2004
From: NEXX SYSTEMS, INC.
To: ENTERPRISE PARTNERS VI, L.P., AS COLLATERAL AGENT
Reel/Frame 015328/0752 →
Security Agreement
Nov 5, 2004
From: NEXX SYSTEMS PACKAGING, LLC
To: ENTERPRISE PARTNERS VI, L.P.; ENTERPRISE PARTNERS V, L.P.; POST, RICHARD S.
Reel/Frame 015334/0079 →
Assignment of Assignor's Interest
Apr 7, 2005
From: KEGLER, ARTHUR; HARRELL, JOHN; LIU, ZHENQIU; WU, QUNWEI
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 016032/0321 →
Corrective Assignment to Correct the Name of the First Assignor Previously Recorded on Reel 016032 Frame 0321.
May 23, 2005
From: KEIGLER, ARTHUR; HARRELL, JOHN; LIU, ZHENGIU; WU, QUNWEI
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 016268/0578 →
Assignment of Assignor's Interest
Sep 9, 2005
From: WU, QUNWEI; KEIGLER, ARTHUR; LIU, ZHENQIU; HARRELL, JOHN
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 016965/0877 →
Assignment of Assignor's Interest
Feb 16, 2006
From: KEIGLER, ARTHUR; WU, QUNWEI; LIU, ZHENQIU; HARRELL, JOHN
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 017177/0399 →
Assignment of Assignor's Interest
May 30, 2006
From: ASTEX PLASMAQUEST, INC., NEXX SYSTEMS PACKAGING, LLC
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 017931/0809 →
Assignment of Assignor's Interest
Nov 5, 2007
From: NEXX SYSTEMS, INC.
To: HERCULES TECHNOLOGY GROWTH CAPITAL, INC.
Reel/Frame 020064/0111 →
Assignment of Assignor's Interest
Sep 23, 2008
From: NEXX SYSTEMS, INC.
To: SEMIGEAR, INC.
Reel/Frame 021570/0022 →
Assignment of Patent Security Interest
Jun 28, 2010
From: NEXX SYSTEMS, INC.
To: COMERICA BANK
Reel/Frame 024599/0050 →
Release of Security Interest
May 16, 2011
From: HERCULES TECHNOLOGY GROWTH CAPITAL, INC.
To: NEXX SYSTEMS, INC.
Reel/Frame 026277/0147 →
Grant of Security Interest
Jun 23, 2011
From: NEXX SYSTEMS, INC., A DELAWARE CORPORATION
To: COMERICA BANK, A TEXAS BANKING ASSOCIATION
Reel/Frame 026480/0576 →
Release of Security Interest
Nov 7, 2011
From: ENTERPRISE PARTNERS VI, L.P., AS COLLATERAL AGENT; ENTERPRISE PARTNERS VI, L.P.; ENTERPRISE PARTNERS V, L.P.; POST, RICHARD S.
To: NEXX SYSTEMS, INC., A DELAWARE CORPORATION
Reel/Frame 027184/0423 →