IP Library Assignment 027184/0423
Patent Assignment
Reel/Frame 027184/0423

Release of Security Interest

Recorded: 2011-11-07 Pages: 5
Assignors
ENTERPRISE PARTNERS VI, L.P.
Executed: 2011-06-10
ENTERPRISE PARTNERS V, L.P.
Executed: 2011-06-10
POST, RICHARD S.
Executed: 2011-06-10
Assignee
NEXX SYSTEMS, INC., A DELAWARE CORPORATION
900 MIDDLESEX TURNPIKE, BUILDING 6, BILLERICA, MASSACHUSETTS, 01821
Covered Properties (6)
Multi-Layer Sputter Deposition Apparatus
Patent: 6,328,858 →
Application: 09/401,754 →
In-Line Sputter Deposition System
Patent: 6,217,272 →
Application: 09/404,516 →
Permanent Magnet Ecr Plasma Source with Integrated Multipolar Magnetic Confinement
Patent: 6,396,024 →
Application: 09/469,382 →
Substrate Processing Pallet and Related Substrate Processing Method and Machine
Patent: 6,682,288 →
Application: 09/916,643 →
Publication: US 2002/0033133
Substrate Processing Pallet and Related Substrate Processing Method and Machine
Patent: 6,530,733 →
Application: 09/917,223 →
Publication: US 2002/0034429
Substrate Processing Pallet and Related Substrate Processing Method and Machine
Patent: 6,821,912 →
Application: 09/917,224 →
Publication: US 2002/0034883
Related Assignments (18)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest Sep 14, 2000
From: FELSENTHAL, DAVID; LEE, CHUNGHSIN; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 011093/0520 →
Assignment of Assignor's Interest Sep 14, 2000
From: FELSENTHAL, DAVID; LEE, CHUNGHSIN; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 011094/0484 →
Assignment of Assignor's Interest Sep 29, 2000
From: DOUGHTY, FRANK CHRISTIAN; BAILEY, JOEL BRAD
To: APPLIED SCIENCE & TECHNOLOGY, INC.
Reel/Frame 011160/0938 →
Assignment of Assignor's Interest Sep 10, 2001
From: FELSENTHAL, DAVID; LEE, CHUNGHSIN; SFERALZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012146/0306 →
Assignment of Assignor's Interest Sep 10, 2001
From: FELSENTHAL, DAVID; LEE, CHUNGHSIN; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012362/0245 →
Assignment of Assignor's Interest Oct 1, 2001
From: MKS INSTRUMENTS, INC.; APPLIED SCIENCE AND TECHNOLOGY, INC.
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 012211/0008 →
Assignment of Assignor's Interest Jan 3, 2002
From: KLEIN, MARTIN P.; FELSENTHAL, DAVID; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012424/0407 →
Assignment of Assignor's Interest Jan 4, 2002
From: KLEIN, MARTIN P.; FELSENTHAL, DAVID; SFERLAZZO, PEIRO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012430/0656 →
Assignment of Assignor's Interest Jan 16, 2002
From: KLEIN, MARTIN P.; FELSENTHAL, DAVID; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012477/0810 →
Security Agreement Nov 4, 2004
From: NEXX SYSTEMS, INC.
To: ENTERPRISE PARTNERS VI, L.P., AS COLLATERAL AGENT
Reel/Frame 015328/0752 →
Security Agreement Nov 5, 2004
From: NEXX SYSTEMS PACKAGING, LLC
To: ENTERPRISE PARTNERS VI, L.P.; ENTERPRISE PARTNERS V, L.P.; POST, RICHARD S.
Reel/Frame 015334/0079 →
Assignment of Assignor's Interest Apr 21, 2006
From: NEXX SYSTEMS PACKAGING LLC
To: NEXX SYSTEMS, INC.
Reel/Frame 017507/0280 →
Assignment of Assignor's Interest May 30, 2006
From: ASTEX PLASMAQUEST, INC., NEXX SYSTEMS PACKAGING, LLC
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 017931/0809 →
Assignment of Assignor's Interest Nov 5, 2007
From: NEXX SYSTEMS, INC.
To: HERCULES TECHNOLOGY GROWTH CAPITAL, INC.
Reel/Frame 020064/0111 →
Assignment of Patent Security Interest Jun 28, 2010
From: NEXX SYSTEMS, INC.
To: COMERICA BANK
Reel/Frame 024599/0050 →
Release of Security Interest Nov 7, 2011
From: HERCULES TECHNOLOGY GROWTH CAPITAL, INC.
To: NEXX SYSTEMS, INC., A DELAWARE CORPORATION
Reel/Frame 027182/0505 →
Merger, Change of Name Oct 8, 2012
From: NEXX SYSTEMS, INC.; SUB NEXX, INC.
To: TEL NEXX, INC.
Reel/Frame 029093/0857 →
Release of Security Interest Oct 18, 2012
From: COMERICA BANK
To: NEXX SYSTEMS, INC.
Reel/Frame 029151/0161 →