Patent Assignment
Reel/Frame 027184/0423
Release of Security Interest
Recorded: 2011-11-07
Pages: 5
Assignors
ENTERPRISE PARTNERS VI, L.P., AS COLLATERAL AGENT
Executed: 2011-06-10
ENTERPRISE PARTNERS VI, L.P.
Executed: 2011-06-10
ENTERPRISE PARTNERS V, L.P.
Executed: 2011-06-10
POST, RICHARD S.
Executed: 2011-06-10
Assignee
NEXX SYSTEMS, INC., A DELAWARE CORPORATION
900 MIDDLESEX TURNPIKE, BUILDING 6, BILLERICA, MASSACHUSETTS, 01821
Covered Properties
(6)
Multi-Layer Sputter Deposition Apparatus
Patent:
6,328,858 →
Application:
09/401,754 →
In-Line Sputter Deposition System
Patent:
6,217,272 →
Application:
09/404,516 →
Permanent Magnet Ecr Plasma Source with Integrated Multipolar Magnetic Confinement
Patent:
6,396,024 →
Application:
09/469,382 →
Substrate Processing Pallet and Related Substrate Processing Method and Machine
Substrate Processing Pallet and Related Substrate Processing Method and Machine
Substrate Processing Pallet and Related Substrate Processing Method and Machine
Related Assignments
(18)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 14, 2000
From: FELSENTHAL, DAVID; LEE, CHUNGHSIN; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 011093/0520 →
Assignment of Assignor's Interest
Sep 14, 2000
From: FELSENTHAL, DAVID; LEE, CHUNGHSIN; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 011094/0484 →
Assignment of Assignor's Interest
Sep 29, 2000
From: DOUGHTY, FRANK CHRISTIAN; BAILEY, JOEL BRAD
To: APPLIED SCIENCE & TECHNOLOGY, INC.
Reel/Frame 011160/0938 →
Assignment of Assignor's Interest
Sep 10, 2001
From: FELSENTHAL, DAVID; LEE, CHUNGHSIN; SFERALZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012146/0306 →
Assignment of Assignor's Interest
Sep 10, 2001
From: FELSENTHAL, DAVID; LEE, CHUNGHSIN; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012362/0245 →
Assignment of Assignor's Interest
Oct 1, 2001
From: MKS INSTRUMENTS, INC.; APPLIED SCIENCE AND TECHNOLOGY, INC.
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 012211/0008 →
Assignment of Assignor's Interest
Jan 3, 2002
From: KLEIN, MARTIN P.; FELSENTHAL, DAVID; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012424/0407 →
Assignment of Assignor's Interest
Jan 4, 2002
From: KLEIN, MARTIN P.; FELSENTHAL, DAVID; SFERLAZZO, PEIRO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012430/0656 →
Assignment of Assignor's Interest
Jan 16, 2002
From: KLEIN, MARTIN P.; FELSENTHAL, DAVID; SFERLAZZO, PIERO
To: APPLIED SCIENCE AND TECHNOLOGY, INC.
Reel/Frame 012477/0810 →
Security Agreement
Nov 4, 2004
From: NEXX SYSTEMS, INC.
To: ENTERPRISE PARTNERS VI, L.P., AS COLLATERAL AGENT
Reel/Frame 015328/0752 →
Security Agreement
Nov 5, 2004
From: NEXX SYSTEMS PACKAGING, LLC
To: ENTERPRISE PARTNERS VI, L.P.; ENTERPRISE PARTNERS V, L.P.; POST, RICHARD S.
Reel/Frame 015334/0079 →
Assignment of Assignor's Interest
Apr 21, 2006
From: NEXX SYSTEMS PACKAGING LLC
To: NEXX SYSTEMS, INC.
Reel/Frame 017507/0280 →
Assignment of Assignor's Interest
May 30, 2006
From: ASTEX PLASMAQUEST, INC., NEXX SYSTEMS PACKAGING, LLC
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 017931/0809 →
Assignment of Assignor's Interest
Nov 5, 2007
From: NEXX SYSTEMS, INC.
To: HERCULES TECHNOLOGY GROWTH CAPITAL, INC.
Reel/Frame 020064/0111 →
Assignment of Patent Security Interest
Jun 28, 2010
From: NEXX SYSTEMS, INC.
To: COMERICA BANK
Reel/Frame 024599/0050 →
Release of Security Interest
Nov 7, 2011
From: HERCULES TECHNOLOGY GROWTH CAPITAL, INC.
To: NEXX SYSTEMS, INC., A DELAWARE CORPORATION
Reel/Frame 027182/0505 →
Merger, Change of Name
Oct 8, 2012
From: NEXX SYSTEMS, INC.; SUB NEXX, INC.
To: TEL NEXX, INC.
Reel/Frame 029093/0857 →
Release of Security Interest
Oct 18, 2012
From: COMERICA BANK
To: NEXX SYSTEMS, INC.
Reel/Frame 029151/0161 →