Patent Assignment
Reel/Frame 011160/0938
Assignment of Assignor's Interest
Recorded: 2000-09-29
Pages: 5
Assignee
APPLIED SCIENCE & TECHNOLOGY, INC.
90 INDUSTRIAL WAY, WILMINGTON, MASSACHUSETTS, 01887
Covered Property
(1)
Permanent Magnet Ecr Plasma Source with Integrated Multipolar Magnetic Confinement
Patent:
6,396,024 →
Application:
09/469,382 →
Related Assignments
(10)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Oct 1, 2001
From: MKS INSTRUMENTS, INC.; APPLIED SCIENCE AND TECHNOLOGY, INC.
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 012211/0008 →
Security Agreement
Nov 4, 2004
From: NEXX SYSTEMS, INC.
To: ENTERPRISE PARTNERS VI, L.P., AS COLLATERAL AGENT
Reel/Frame 015328/0752 →
Security Agreement
Nov 5, 2004
From: NEXX SYSTEMS PACKAGING, LLC
To: ENTERPRISE PARTNERS VI, L.P.; ENTERPRISE PARTNERS V, L.P.; POST, RICHARD S.
Reel/Frame 015334/0079 →
Assignment of Assignor's Interest
Apr 21, 2006
From: NEXX SYSTEMS PACKAGING LLC
To: NEXX SYSTEMS, INC.
Reel/Frame 017507/0280 →
Assignment of Assignor's Interest
May 30, 2006
From: ASTEX PLASMAQUEST, INC., NEXX SYSTEMS PACKAGING, LLC
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 017931/0809 →
Assignment of Assignor's Interest
Nov 5, 2007
From: NEXX SYSTEMS, INC.
To: HERCULES TECHNOLOGY GROWTH CAPITAL, INC.
Reel/Frame 020064/0111 →
Assignment of Patent Security Interest
Jun 28, 2010
From: NEXX SYSTEMS, INC.
To: COMERICA BANK
Reel/Frame 024599/0050 →
Release of Security Interest
Nov 7, 2011
From: ENTERPRISE PARTNERS VI, L.P., AS COLLATERAL AGENT; ENTERPRISE PARTNERS VI, L.P.; ENTERPRISE PARTNERS V, L.P.; POST, RICHARD S.
To: NEXX SYSTEMS, INC., A DELAWARE CORPORATION
Reel/Frame 027184/0423 →
Release of Security Interest
Nov 7, 2011
From: HERCULES TECHNOLOGY GROWTH CAPITAL, INC.
To: NEXX SYSTEMS, INC., A DELAWARE CORPORATION
Reel/Frame 027182/0505 →
Release of Security Interest
Oct 18, 2012
From: COMERICA BANK
To: NEXX SYSTEMS, INC.
Reel/Frame 029151/0161 →