IP Library › Granted Patent US 6,682,288
Granted Patent Utility
US 6,682,288 · Confirmation No. 8476

SUBSTRATE PROCESSING PALLET AND RELATED SUBSTRATE PROCESSING METHOD AND MACHINE

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Quick Facts
Patent No.
US 6,682,288
App. No.
09/916,643
Filed
2001-07-27
Granted
2004-01-27
Pub. No.
US20020033133A1
Art Unit
3652
PTA
-54 days