Granted Patent
Utility
US 6,821,912
· Confirmation No. 9211
SUBSTRATE PROCESSING PALLET AND RELATED SUBSTRATE PROCESSING METHOD AND MACHINE
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2014-01-10 | SES.LOSS |
Notification of loss of entitlement to small entity status | 1 | View | |
| 2014-01-10 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-05-11 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2012-05-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-05-05 | PET.POA.WDRW |
Request for withdrawal as attorney or agent | 2 | View | |
| 2009-05-05 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-05-05 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2004-11-01 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2004-10-22 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 1 | View | |
| 2004-10-22 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 1 | View | |
| 2004-06-21 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-06-21 | PA.. |
Power of Attorney | 3 | View | |
| 2004-06-21 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2004-04-15 | PA.. |
Power of Attorney | 4 | View | |
| 2004-03-23 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 6 | View | |
| 2004-03-23 | 1449 |
List of References cited by applicant and considered by examiner | 6 | View | |
| 2004-03-23 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-03-23 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-03-23 | FWCLM |
Index of Claims | 1 | View | |
| 2004-03-16 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2003-12-10 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-12-10 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2003-12-10 | XT/ |
Extension of Time | 1 | View | |
| 2003-12-10 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2003-06-13 | CTNF |
Non-Final Rejection | 7 | View | |
| 2003-06-13 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-06-13 | NFDR |
Notice of Formal Drawings Required | 1 | View | |
| 2003-06-06 | SRNT |
Examiner's search strategy and results | 16 | View | |
| 2003-05-30 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-05-29 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-05-15 | A.NE |
Response After Final Action | 3 | View | |
| 2003-05-15 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2003-05-09 | SRNT |
Examiner's search strategy and results | 8 | View | |
| 2003-03-07 | CTFR |
Final Rejection | 7 | View | |
| 2003-03-07 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2002-12-16 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2002-12-16 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2002-12-16 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2002-12-16 | FOR |
Foreign Reference | 8 | View | |
| 2002-12-16 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2002-09-11 | CTNF |
Non-Final Rejection | 6 | View | |
| 2002-09-11 | 892 |
List of references cited by examiner | 1 | View | |
| 2002-09-11 | 1449 |
List of References cited by applicant and considered by examiner | 6 | View | |
| 2002-09-06 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2002-09-05 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2002-01-04 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2002-01-04 | DRW |
Drawings-only black and white line drawings | 13 | View | |
| 2001-12-10 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 5 | View | |
| 2001-11-02 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 3 | View | |
| 2001-11-02 | OATH |
Oath or Declaration filed | 10 | View | |
| 2001-09-04 | PEFN |
Pre-Exam Formalities Notice | 1 | View | |
| 2001-07-27 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-07-27 | ADS |
Application Data Sheet | 2 | View | |
| 2001-07-27 | SPEC |
Specification | 32 | View | |
| 2001-07-27 | CLM |
Claims | 4 | View | |
| 2001-07-27 | ABST |
Abstract | 1 | View | |
| 2001-07-27 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2001-07-27 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2001-07-27 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2001-07-27 | FWCLM |
Index of Claims | 1 | View | |
| 2001-07-27 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-07-27 | DRW |
Drawings-only black and white line drawings | 13 | View | |
| 2001-07-27 | SPEC |
Specification | 33 | View | |
| 2001-07-27 | CLM |
Claims | 5 | View | |
| 2001-07-27 | ABST |
Abstract | 1 | View | |
| 2001-07-27 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-07-27 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2001-07-27 | ADS |
Application Data Sheet | 2 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
438/782
H10P72/18
H10P72/50
C23C14/50
C23C14/568
Y10S414/135
Y10S414/136
Y10S414/138
Y10S414/14
Y10S414/141
Prosecution
- Examiner
- NGUYEN, KHIEM D
- Art Unit
- 2823
- Customer No.
- 42532
- Docket No.
- NEX-006C
- Confirmation No.
- 9211
Publication
- Pub. No.
- US20020034883A1
- Pub. Date
- 2002-03-21
Patent Term Adjustment
-100days
RELEASE OF SECURITY INTEREST
Recorded 2011-11-07
from
ENTERPRISE PARTNERS V, L.P.,
ENTERPRISE PARTNERS VI, L.P.,
ENTERPRISE PARTNERS VI, L.P., AS COLLATERAL AGENT,
POST, RICHARD S.
RELEASE OF SECURITY INTEREST
Recorded 2011-11-07
from
NEXX SYSTEMS, INC.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2007-11-05
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-04-21
SECURITY AGREEMENT
Recorded 2004-11-05
from
NEXX SYSTEMS, INC.
SECURITY AGREEMENT
Recorded 2004-11-04
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-01-16
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-10-01
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,821,912
- App. No.
- 09/917,224
- Filed
- 2001-07-27
- Granted
- 2004-11-23
- Pub. No.
- US20020034883A1
- Examiner
- NGUYEN, KHIEM D
- Art Unit
- 2823
- PTA
- -100 days
External Links