Balancing pressure to improve a fluid seal
View Patent ↗A method and apparatus for fluid sealing a workpiece retained by a workpiece holder are described. A pressure differential can be formed across a fluid seal to counteract fluid attempting to penetrate the fluid seal, which can contaminate the underside of the workpiece. The apparatus can include a ring forming a barrier to fluid entry with the workpiece and a source providing pressure to form the pressure differential. The pressure or the pressure differential can counteract hydroscopic fluid pressure or hydrostatic fluid pressure that is acting to force fluid through the barrier between the ring and the workpiece.
1. An apparatus for fluid sealing a workpiece, comprising:
a ring forming a barrier to fluid entry with the workpiece when a force is applied to the ring, the barrier having opposing first and second sides; and
a source of fluid pressure on the first side, of the barrier to fluid entry, configured to cause a pressure differential across the first and second sides and establish the barrier preventing the fluid on the second side of the barrier from crossing the barrier.
2. The apparatus of claim 1 wherein the pressure differential across the first and second sides, formed by the source of fluid pressure, is disposed so that fluid on the second side is prevented from entering the barrier.
3. The apparatus of claim 1 wherein the source of fluid pressure is configured to provide a pressurizing fluid on the first side of the barrier to prevent the fluid on the second side of the barrier from crossing the barrier.
4. The apparatus of claim 1 wherein the source of fluid pressure is configured to provide pressurizing fluid on the first of the barrier to counteract hydroscopic fluid pressure that is acting to force fluid between the ring and the workpiece.
5. The apparatus of claim 1 wherein the source of fluid pressure is configured to provide pressurizing fluid on the first side of the barrier to counteract hydrostatic fluid pressure that is acting to force fluid between the ring and the workpiece.
6. The apparatus of claim 1 wherein the source of fluid pressure is configured to provide a pressure on the first side of the barrier that exceeds a pressure on the second side of the barrier.
7. The apparatus of claim 1 wherein the source of fluid pressure is configured to provide a pressure on the first side of the barrier between about 0.1 psi and about 2.0 psi.
8. The apparatus of claim 1 further comprising a workpiece holder to retain the workpiece in one of a vertical, substantially vertical, horizontal, or substantially horizontal configuration.
9. The apparatus of claim 1 further comprising:
a member defining at least one retaining feature; and
a ring comprising at least one engagement feature engageable with the at least one retaining feature of the member;
wherein the member is flexed to provide an engagement force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.
10. An apparatus for fluid sealing a workpiece, comprising:
a ring forming a barrier to fluid entry with the workpiece when a force is applied to the ring;
a source of pressure on a first side of the barrier to fluid entry to cause a pressure differential across the barrier to prevent fluid on a second side of the barrier from crossing the barrier; and
a workpiece holder defining a groove, at least a portion of the ring and at least a portion of the workpiece disposed over the groove and the source disposed within the groove.
11. The apparatus of claim 10 wherein:
the workpiece holder comprises a seal between the groove and a recess defined by the workpiece holder and adjacent an under surface of the workpiece; and
the workpiece holder further defining a vent in fluid communication with the recess, such that the vent directs pressure that crosses the seal away from the under surface of the workpiece.
12. The apparatus of claim 10 wherein:
the workpiece holder comprises a seal between the groove and a recess defined by the workpiece holder and adjacent an under surface of the workpiece; and
the seal comprises an elastomer member to prevent pressure from entering the recess.
13. An apparatus for retaining a workpiece comprising:
a workpiece holder having a surface and defining a groove extending from the surface;
a ring, at least a portion of which is disposed over the groove;
a member disposed at least substantially within the groove and engageable with the ring, the member providing an engagement force causing the ring to form a barrier to fluid entry with the workpiece, the barrier having opposing first and second sides; and
a source of fluid pressure on the first side, of the barrier to fluid entry, configured to cause a pressure differential across the first and second sides and establish the barrier to prevent fluid on the second side of the barrier from crossing the barrier.
14. The apparatus of claim 13 wherein the pressure differential, formed by the source of fluid pressure, is disposed so that fluid is prevented from crossing a second barrier to fluid entry formed between the ring and the surface of the workpiece holder.
15. The apparatus of claim 13 wherein the pressure differential across the first and second sides is disposed so that fluid on the second side is prevented from entering the barrier.
16. The apparatus of claim 13 wherein the source of fluid pressure is configured to provide a pressurizing fluid on the first side of the barrier to prevent the fluid on the second side of the barrier from crossing the barrier.
17. The apparatus of claim 13 wherein the source of fluid pressure is configured to provide a pressure on the first side of the barrier that exceeds a pressure on the second side of the barrier.
18. The apparatus of claim 13 wherein the source of fluid pressure is configured to provide a pressure on the first side of the barrier between about 0.1 psi and about 2.0 psi relative to ambient.
19. The apparatus of claim 13 wherein:
the member defines at least one retaining feature; and
the ring comprising at least one engagement feature engageable with the at least one retaining feature of the member;
wherein the member is flexed to provide the engagement force to the at least one engagement feature to cause the ring to form at least one of the first barrier or the second barrier.
20. The apparatus of claim 19 wherein the flexing of the member effects pulling the at least one engagement feature of the ring to cause the ring to push against the workpiece to form at least one of the first barrier or the second barrier.
21. The apparatus of claim 19 wherein the ring comprises at least one contact adapted to form an electrical connection with the workpiece.
22. An apparatus for fluid sealing a workpiece, comprising:
means for providing a first force to cause a ring to form a barrier to fluid entry with the workpiece, the barrier having opposing first and second sides; and
means for preventing fluid from crossing the barrier to fluid entry by forming a fluid pressure differential across the first and second sides and establishing the barrier preventing the fluid on the second side from crossing the barrier.