Patent Assignment
Reel/Frame 048068/0928
Change of Name
Recorded: 2019-01-14
Pages: 5
Assignor
TEL NEXX, INC.
Executed: 2018-10-05
Assignee
ASM NEXX, INC.
900 MIDDLESEX TURNPIKE, BUILDING 6, BILLERICA, MASSACHUSETTS, 01821-3929
Covered Properties
(27)
Method and Apparatus for Fluid Processing a Workpiece
Method and Apparatus for Fluid Processing a Workpiece
Balancing Pressure to Improve a Fluid Seal
Substrate processing pallet with cooling
Wetting a Workpiece Surface in a Fluid-Processing System
Seed Layer Deposition in Microscale Features
Method and Apparatus for Fluid Processing a Workpiece
Balancing Pressure to Improve a Fluid Seal
Method for Fluid Processing a Workpiece
Method and Apparatus for Fluid Processing a Workpiece
Substrate Loader and Unloader Having a Bernoulli Support
Substrate Loader and Unloader Having an Air Bearing Support
Substrate Loader and Unloader
Substrate Holder
Electro Chemical Deposition and Replenishment Apparatus
Electro chemical deposition and replenishment apparatus
Parallel Single Substrate Processing System
Parallel Single Substrate Processing System with Alignment Features on a Process Section Frame
Parallel Single Substrate Marangoni Module
Parallel Single Substrate Processing System
Edge Bevel Removal Apparatus and Method
Apparatus for Fluid Processing a Workpiece
Electrochemical Deposition Apparatus with Remote Catholyte Fluid Management
Method for Increasing Adhesion of Copper to Polymeric Surfaces
Electrochemical Deposition Apparatus and Methods for Controlling the Chemistry Therein
Electrochemical Deposition Apparatus and Methods for Controlling the Chemistry Therein
Workpiece Loader for a Wet Processing System
Related Assignments
(25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Apr 7, 2005
From: KEGLER, ARTHUR; HARRELL, JOHN; LIU, ZHENQIU; WU, QUNWEI
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 016032/0321 →
Corrective Assignment to Correct the Name of the First Assignor Previously Recorded on Reel 016032 Frame 0321.
May 23, 2005
From: KEIGLER, ARTHUR; HARRELL, JOHN; LIU, ZHENGIU; WU, QUNWEI
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 016268/0578 →
Assignment of Assignor's Interest
Feb 16, 2006
From: KEIGLER, ARTHUR; WU, QUNWEI; LIU, ZHENQIU; HARRELL, JOHN
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 017177/0399 →
Assignment of Assignor's Interest
Apr 21, 2006
From: NEXX SYSTEMS PACKAGING LLC
To: NEXX SYSTEMS, INC.
Reel/Frame 017507/0280 →
Assignment of Assignor's Interest
Jun 1, 2007
From: GOODMAN, DANIEL; KEIGLER, ARTHUR; GOLOVATO, STEPHEN; FELSENTHAL, DAVID
To: NEXX SYSTEMS PACKAGING, LLC
Reel/Frame 019370/0613 →
Assignment of Assignor's Interest
Nov 5, 2007
From: NEXX SYSTEMS, INC.
To: HERCULES TECHNOLOGY GROWTH CAPITAL, INC.
Reel/Frame 020064/0111 →
Assignment of Assignor's Interest
Jun 17, 2009
From: NEXX SYSTEMS PACKAGING, LLC
To: NEXX SYSTEMS, INC.
Reel/Frame 022836/0094 →
Assignment of Assignor's Interest
Apr 27, 2010
From: KEIGLER, ARTHUR
To: NEXX SYSTEMS, INC.
Reel/Frame 024295/0450 →
Assignment of Patent Security Interest
Jun 28, 2010
From: NEXX SYSTEMS, INC.
To: COMERICA BANK
Reel/Frame 024599/0050 →
Assignment of Assignor's Interest
Jul 23, 2010
From: KEIGLER, ARTHUR; CHIU, JOHANNES; LIU, ZHENQIU; GOODMAN, DANIEL
To: NEXX SYSTEMS, INC.
Reel/Frame 024730/0968 →
Release of Security Interest
May 16, 2011
From: HERCULES TECHNOLOGY GROWTH CAPITAL, INC.
To: NEXX SYSTEMS, INC.
Reel/Frame 026277/0147 →
Grant of Security Interest
Jun 23, 2011
From: NEXX SYSTEMS, INC., A DELAWARE CORPORATION
To: COMERICA BANK, A TEXAS BANKING ASSOCIATION
Reel/Frame 026480/0576 →
Assignment of Assignor's Interest
Oct 24, 2011
From: GOODMAN, DANIEL; KEIGLER, ARTHUR; FISHER, FREEMAN
To: NEXX SYSTEMS, INC.
Reel/Frame 027106/0647 →
Assignment of Assignor's Interest
Oct 24, 2011
From: GOODMAN, DANIEL; KEIGLER, ARTHUR; FISHER, FREEMAN; GUARNACCIA, DAVID G.
To: NEXX SYSTEMS, INC.
Reel/Frame 027106/0744 →
Release of Security Interest
Nov 7, 2011
From: HERCULES TECHNOLOGY GROWTH CAPITAL, INC.
To: NEXX SYSTEMS, INC., A DELAWARE CORPORATION
Reel/Frame 027182/0505 →
Assignment of Assignor's Interest
Jan 4, 2012
From: GOODMAN, DANIEL; KEIGLER, ARTHUR; FISHER, FREEMAN
To: NEXX SYSTEMS, INC.
Reel/Frame 027478/0124 →
Assignment of Assignor's Interest
Apr 6, 2012
From: GOODMAN, DANIEL; KEIGLER, ARTHUR; GUARNACCIA, DAVID G.
To: NEXX SYSTEMS, INC.
Reel/Frame 028006/0582 →
Assignment of Assignor's Interest
Jun 25, 2012
From: GUARNACCIA, DAVID; KEIGLER, ARTHUR; PAPAPANAYIOTOU, DEMETRIUS; CHIU, JOHANNES
To: TEL NEXX, INC.
Reel/Frame 028438/0270 →
Merger, Change of Name
Jul 18, 2012
From: NEXX SYSTEMS, INC.; SUB NEXX, INC.
To: TEL NEXX, INC.
Reel/Frame 028583/0348 →
Merger, Change of Name
Jul 20, 2012
From: NEXX SYSTEMS, INC.; SUB NEXX, INC.
To: TEL NEXX, INC.
Reel/Frame 028604/0516 →
Merger, Change of Name
Jul 20, 2012
From: NEXX SYSTEMS, INC.; SUB NEXX, INC.
To: TEL NEXX, INC.
Reel/Frame 028604/0144 →
Merger, Change of Name
Jul 20, 2012
From: NEXX SYSTEMS, INC.; SUB NEXX, INC.
To: TEL NEXX, INC.
Reel/Frame 028604/0291 →
Merger, Change of Name
Jul 20, 2012
From: NEXX SYSTEMS, INC.; SUB NEXX, INC.
To: TEL NEXX, INC.
Reel/Frame 028604/0432 →
Merger, Change of Name
Jul 20, 2012
From: NEXX SYSTEMS, INC.; SUB NEXX, INC.
To: TEL NEXX, INC.
Reel/Frame 028607/0976 →
Merger, Change of Name
Jul 20, 2012
From: NEXX SYSTEMS, INC.; SUB NEXX, INC.
To: TEL NEXX, INC.
Reel/Frame 028607/0492 →