Method and apparatus for fluid processing a workpiece
View Patent ↗A method and apparatus for retaining a workpiece against a workpiece holder are described. A flexible member can be used to provide a substantially uniform force to securely retain the workpiece, which can allow the workpiece to be consistently positioned in a process module. In one detailed embodiment, a barrier to fluid entry is formed between the workpiece and a ring for retaining the workpiece against a workpiece holder. This provides a reliable seal during fluid processing to prevent fluid from reaching the underside of a workpiece. In various embodiments, the workpiece holder can be used to align a workpiece in a process module or to hold one or more workpieces in a configuration that allows for higher throughput.
1. An apparatus for fluid sealing a workpiece, comprising:
a flexible member defining at least one retaining feature;
a ring comprising at least one engagement feature engageable with the at least one retaining feature of the flexible member; and
workpiece holder to which the flexible member and the ring are removably attached;
wherein the flexible member is flexed to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.
2. The apparatus of claim 1 wherein the flexible member is arranged so that the force provided by the flexible member causes the flexible member to pull the at least one engagement feature of the ring to cause the ring to push against the workpiece to form the barrier to fluid entry.
3. The apparatus of claim 1 wherein the flexible member comprises at least one flex feature adapted to provide the force substantially normal to the plane of the flexible member to form the barrier to fluid entry.
4. The apparatus of claim 1 wherein the flexible member defines a plurality of flex features positioned about a perimeter of the flexible member to provide the force at least substantially uniformly from the perimeter of the flexible member.
5. The apparatus of claim 4 wherein the plurality of flex features are positioned about an inner perimeter of the flexible member.
6. The apparatus of claim 4 wherein the plurality of flex features are positioned about an outer perimeter of the flexible member.
7. The apparatus of claim 4 wherein the plurality of flex features are positioned about both the inner and outer perimeters of the flexible member.
8. The apparatus of claim 1 further comprising a backing member adapted to apply a force to flex the flexible member.
9. The apparatus of claim 8 wherein the backing member comprises push pins to contact the flexible member.
10. The apparatus of claim 8 further comprising an inflatable bladder adjacent the backing member for moving the backing member to apply the force to flex the flexible member.
11. The apparatus of claim 1 wherein the flexible member comprises at least one tab section for engaging at least one tooth feature of the workpiece holder.
12. The apparatus of claim 1 wherein the ring comprises a first elastomer region for forming the barrier to fluid entry with a surface of the workpiece.
13. The apparatus of claim 1 wherein the ring comprises a second elastomer region for forming a second barrier to fluid entry with a surface of the workpiece holder.
14. The apparatus of claim 1 wherein the ring comprises at least one contact adapted to form an electrical connection with the workpiece.
15. The apparatus of claim 1 wherein the workpiece has a substantially non-circular shape.
16. The apparatus of claim 1 wherein the workpiece holder defines a hole that passes from a first surface to a second surface, the diameter of the hole being smaller than the diameter of the ring, the hole for processing a plurality of surfaces of the workpiece.
17. The apparatus of claim 1 wherein the flexible member is adapted to provide the force substantially normal to the plane of the flexible member.
18. The apparatus of claim 1 wherein the ring retains the workpiece while the force is applied.
19. The apparatus of claim 1 wherein the workpiece holder has a surface arranged so that the force provided by the flexible member retains the workpiece against a portion of the surface of the workpiece holder.
20. The apparatus of claim 1 wherein the flexible member comprises a spring-like material.
21. The apparatus of claim 1 wherein the flexible member comprises stainless steel.
22. The apparatus of claim 1 wherein the flexible member comprises titanium.
23. The apparatus of claim 1 wherein the ring is adapted to rotate to engage the at least one engagement feature with the at least one retaining feature.
24. The apparatus of claim 1 wherein the at least one engagement feature comprises studs.
25. The apparatus of claim 1 wherein the at least one retaining feature comprises capture slots.
26. The apparatus of claim 1 wherein the flexible member defines a plurality of retaining features.
27. The apparatus of claim 1 wherein the ring comprises a plurality of engagement features.
28. The apparatus of claim 1 wherein the flexible member is a substantially planar, ring-shaped member.
29. The apparatus of claim 1 wherein the flexible member is flexed into an overextended configuration wherein engagement is made between the at least one engagement feature of the ring and the at least one retaining feature of the flexible member.
30. The apparatus of claim 1 wherein the flexible member is flexed into an overextended configuration wherein the at least one retaining feature captures the at least one engagement feature of the ring.
31. The apparatus of claim 1 wherein the flexible member is adapted to create the force when the flexible member deflects from an overextended state towards a relaxed state.
32. An apparatus for fluid sealing a workpiece, comprising:
a first means defining at least one retaining feature;
a ring comprising at least one engagement means engageable with the at least one retaining feature; and
a second means for flexing the first means to provide a force to the at least one engagement means to cause the ring to form a barrier to fluid entry with the workpiece; and
a workpiece holder to which the first means and the ring are removably mounted.