Balancing pressure to improve a fluid seal
View Patent ↗A method of fluid sealing a workpiece is provided. The method includes providing a force to cause a ring to form a barrier to fluid entry with the workpiece and preventing fluid from crossing the barrier to fluid entry by forming a pressure differential across the barrier.
1. A method of fluid sealing a workpiece, comprising:
providing a force to cause a ring to form a barrier to fluid entry with the workpiece where the barrier has opposing first and second sides; and
preventing fluid from crossing the barrier to fluid entry by providing a source of fluid pressure on the first side of the barrier to form a pressure differential across the barrier to prevent the fluid on the second side of the barrier from crossing the barrier.
2. The method of claim 1 further comprising preventing fluid from entering the barrier.
3. The method of claim 1 further comprising counteracting hydroscopic fluid pressure that is acting to form the fluid between the ring and the workpiece.
4. The method of claim 1 further comprising counteracting hydrostatic fluid pressure that is acting to force the fluid between the ring and the workpiece.
5. The method of claim 1 wherein pressure on the first side of the barrier exceeds pressure on the second side of the barrier.
6. The method of claim 1 wherein the pressure on the first side of the barrier comprises between about 0.1 psi and about 2.0 psi relative to ambient.
7. The method of claim 1 further comprising retaining the workpiece in one of a vertical, substantially vertical, horizontal, or substantially horizontal configuration.
8. The method of claim 1 further comprising:
forming a second barrier to fluid entry between the ring and a workpiece holder; and preventing fluid from crossing the second barrier.
9. The method of claim 1 wherein forming the barrier to fluid entry comprises:
placing the workpiece on the ring;
engaging at least one engagement feature of the ring with at least one retaining feature defined by a member; and
flexing the member to provide an engagement force to the at least one engagement feature to cause the ring to form the barrier to fluid entry with the workpiece.
10. The method of claim 1 further comprising venting pressure away from an under surface of the workpiece.
11. A method of fluid sealing and processing a workpiece, comprising:
providing a force to cause a ring to form a barrier to fluid entry with the workpiece;
preventing fluid from crossing the barrier to fluid entry by forming a pressure differential across the barrier; and
depositing a metal or a plastic on a surface of the workpiece.
12. A method of fluid sealing and processing a workpiece, comprising:
providing a force to cause a ring to form a barrier to fluid entry with the workpiece;
preventing fluid from crossing the barrier to fluid entry by forming a pressure differential across the barrier; and
dissoluting a metal or a plastic on a surface of the workpiece.