Substrate loader and unloader having an air bearing support
A substrate separation chuck which is adapted to separate a substrate from an adhering surface. The substrate separation chuck has a support adapted to support the adhering surface. An air bearing surface is adapted to support the substrate, the air bearing surface axially moveable relative to the support. The air bearing surface has a first position adjacent the substrate with the substrate coupled to the adhering surface. The air bearing surface is moveable from the first position to a second position separating the substrate from the adhering surface without contact between the substrate and the air bearing surface.
1. A mechanism adapted to separate a substrate from a sealing surface, the mechanism comprising:
a support structure adapted to grip the sealing surface;
a moveable chuck positioned within the support structure so that it forms a retaining support structure for the movable chuck, the moveable chuck having a non-contact substrate clamping portion; and
a controller configured for providing one or more predetermined combinations of air bearing pressure and partial vacuum caused by gas flow of the non-contact substrate clamping portion to generate a non-contact force on the substrate;
wherein the non-contact force overcomes adhesive forces between the sealing surface and the substrate, and wherein the non-contact force transports and positions the substrate with the moveable chuck.
2. The mechanism of claim 1 wherein the non-contact substrate clamping portion has an air bearing region and a vacuum region.
3. The mechanism of claim 1 wherein the non-contact substrate clamping portion is a substantially porous media.
4. The mechanism of claim 1 wherein porosity at an outer region of the non-contact substrate clamping portion is larger than porosity at an inner region of the non-contact substrate clamping portion.
5. The mechanism of claim 1 wherein pressure supplied to an outer edge of the non-contact substrate clamping portion is larger than pressure supplied to a central region of the non-contact substrate clamping portion.
6. The mechanism of claim 1 wherein the moveable chuck is constrained to remain substantially parallel to the sealing surface.
7. The mechanism of claim 1 wherein the non-contact substrate clamping portion has an air bearing pattern that is axisymmetric.
8. The mechanism of claim 1 wherein the non-contact substrate clamping portion has an air bearing pattern that increases lift at an outer region of the non-contact substrate clamping portion as compared to an inner region of the non-contact substrate clamping portion.
9. The mechanism of claim 1 wherein the non-contact substrate clamping portion is axially moveable relative to the retaining support structure with a predetermined motion profile.
10. The mechanism of claim 1 wherein the support structure is movable so that the substrate held by the non-contact substrate clamping portion is movable between different positions wherein the substrate plane when at the different positions defines an angle therebetween.