Patent Assignment
Reel/Frame 016965/0877
Assignment of Assignor's Interest
Recorded: 2005-09-09
Pages: 6
Assignors
WU, QUNWEI
Executed: 2005-07-25
KEIGLER, ARTHUR
Executed: 2005-07-25
LIU, ZHENQIU
Executed: 2005-07-25
HARRELL, JOHN
Executed: 2005-07-25
BOWLER, STEVE
Executed: 2005-07-25
Assignee
NEXX SYSTEMS PACKAGING, LLC
5 SUBURBAN PARK DRIVE, BILLERICA, MASSACHUSETTS, 01821-3904
Covered Property
(1)
Method and apparatus for fluid processing and drying a workpiece
Application:
11/155,008 →
Publication:
US 2005/0283993
Related Assignments
(5)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Apr 21, 2006
From: NEXX SYSTEMS PACKAGING LLC
To: NEXX SYSTEMS, INC.
Reel/Frame 017507/0280 →
Assignment of Assignor's Interest
Nov 5, 2007
From: NEXX SYSTEMS, INC.
To: HERCULES TECHNOLOGY GROWTH CAPITAL, INC.
Reel/Frame 020064/0111 →
Assignment of Patent Security Interest
Jun 28, 2010
From: NEXX SYSTEMS, INC.
To: COMERICA BANK
Reel/Frame 024599/0050 →
Release of Security Interest
Nov 7, 2011
From: HERCULES TECHNOLOGY GROWTH CAPITAL, INC.
To: NEXX SYSTEMS, INC., A DELAWARE CORPORATION
Reel/Frame 027182/0505 →
Release of Security Interest
Oct 18, 2012
From: COMERICA BANK
To: NEXX SYSTEMS, INC.
Reel/Frame 029151/0161 →