IP Library Patent Application 10983179
Patent Application
App. No. 10/983,179

Cathode arrangement for atomizing a rotatable target pipe

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Quick Facts
Patent No.
US None
App. No.
10/983,179
Abstract

A quick attachment system for cathodes is described. One embodiment of the system comprises a laterally movable support shaft; a flange connected to the support shaft, the flange including a cavity locking element and a shoulder locking element; a bordering separator connectable to a target pipe, the bordering separator comprising ring extensions for engaging the cavity locking element of flange; and a straining ring configured to engage the bordering separator and the shoulder locking element of the flange to thereby secure the laterally movable shaft to the target pipe.

Claims (32)

1 . A quick attachment system for cathodes, the system comprising:

a laterally movable support shaft;

a flange connected to the support shaft, the flange including a cavity locking element and a shoulder locking element;

a bordering separator connectable to a target pipe, the bordering separator comprising ring extensions for engaging the cavity locking element of flange; and

a straining ring configured to engage the bordering separator and the shoulder locking element of the flange to thereby secure the laterally movable shaft to the target pipe.

2 . The system of claim 1 , wherein the straining ring is a one-piece straining ring.

3 . The system of claim 1 , wherein the bordering separator is configured to rotate coaxially when engaged with the cavity locking element of the flange.

4 . The system of claim 1 , further comprising:

a support structure configured to support the support shaft.

5 . A rotatable cathode system comprising:

a target pipe;

a laterally movable, rotatable support shaft configured to rotate the target pipe;

a flange connected to the support shaft, the flange including a cavity locking element and a shoulder locking element;

a bordering separator connectable to a target pipe, the bordering separator comprising ring extensions for engaging the cavity locking element of flange; and

a straining ring configured to engage the bordering separator and the shoulder locking element of the flange to thereby secure the laterally movable shaft to the target pipe.

6 . A rotatable cathode system comprising:

a target pipe including a target-pipe ring flange;

a rotatable support shaft configured to rotate the target pipe;

a support-shaft ring flange connected to the support shaft, the support-shaft ring flange including a latch; and

a straining ring configured to engage the support-shaft ring flange and the latch to thereby secure the support shaft to the target pipe.

7 . The system of claim 6 , further comprising:

a thrust piece engagable with the target pipe; and

a hub engagable with the thrust piece and the target-pipe flange.

8 . The system of claim 6 , wherein the straining ring comprises a fork connector.

9 . The system of claim 8 , wherein the support-shaft ring flange comprises a retention pin for engaging the fork connector.

10 . A target pipe system for securing a target pipe to a rotatable support shaft that includes a support-shaft ring flange, the system comprising:

a target pipe including a target-pipe ring flange; and

a straining ring configured to engage the target-pipe flange and the support-shaft ring flange to thereby secure the support shaft to the target pipe.

11 . The system of claim 10 , wherein the straining ring includes a hook ring sector for engaging a latch on the support-shaft ring flange.

12 . A target pipe system for securing a target pipe to a support shaft that includes a flange with a cavity locking element and a shoulder element, the system comprising:

a bordering separator connectable to a target pipe, the bordering separator comprising ring extensions for engaging the cavity locking element of flange; and

a straining ring configured to engage the bordering separator and the shoulder locking element of the flange to thereby secure the laterally movable shaft to the target pipe.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 9, 2008
From: APPLIED FILMS CORPORATION
To: APPLIED MATERIALS, INC.
Reel/Frame 020929/0932 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 16, 2005
From: MARQUARDT, DIETMAR; SAUER, ANDREAS
To: APPLIED FILMS GMBH & CO. KG
Reel/Frame 016368/0339 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 16, 2005
From: NEWCOMB, RICHARD; TRUBE, SCOTT; RISO, TOM; KAWAKAMI, KEN
To: APPLIED FILMS CORPORATION
Reel/Frame 016368/0348 →