Patent Assignment
Reel/Frame 020929/0932
Assignment of Assignor's Interest
Recorded: 2008-05-09
Received: 2008-05-09
Pages: 7
Assignor
APPLIED FILMS CORPORATION
Executed: 2008-05-09
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CA, 95054, UNITED STATES
Covered Properties
(8)
Coated substrate created by systems and methods for modulation of power and power related functions of PECVD discharge sources to achieve new film properties
Application:
11/492,628 →
System and method for power function ramping of microwave liner discharge sources
Application:
11/264,540 →
System and Method for Modulation of Power and Power Related Functions of Pecvd Discharge Sources to Achieve New Film Properties
Application:
11/264,596 →
System and method for controlling ion density and energy using modulated power signals
Application:
11/152,469 →
System and method for modulating power signals to control sputtering
Application:
11/152,470 →
Cathode arrangement for atomizing a rotatable target pipe
Application:
10/983,179 →
Non-bonded rotatable targets for sputtering
Application:
10/955,889 →
Power coupling for high-power sputtering
Application:
10/820,896 →