Magnetic random access memory and method of manufacturing the same
View Patent ↗A magnetic random access memory includes, a lower electrode, a magnetoresistive element which is arranged above the lower electrode and has side surfaces, and a protective film which covers the side surfaces of the magnetoresistive element, has a same planar shape as the lower electrode, and is formed by one of sputtering, plasma CVD, and ALD.
1. A magnetic random access memory comprising:
a lower electrode having contiguous first and second portions;
a magnetoresistive element arranged only above the first portion of the lower electrode and having side surfaces and an upper surface; and
a first protective film continuously covering the side surfaces and the upper surface of the magnetoresistive element and an upper surface of the second portion of the lower electrode, having a same planar shape as the lower electrode, and formed by one of sputtering, plasma CVD, and ALD.
2. The memory according to claim 1 , wherein the first protective film is one of an AlO x film, an SiN film, and an SiO 2 film.
3. The memory according to claim 1 , wherein side surfaces of the first protective film coincide with side surfaces of the lower electrode.
4. The memory according to claim 1 , further comprising:
a second protective film formed on the first protective film and essentially formed of a material different from a material of the first protective film.
5. The memory according to claim 4 , wherein the second protective film is formed by one of sputtering, plasma CVD, and ALD.
6. The memory according to claim 4 , wherein the first protective film/second protective film comprises one of an AlO x film/SiN film, AlO x film/SiO 2 film, SiN film/AlO x film, SiN film/SiO 2 film, SiO 2 film/AlO x film, and SiO 2 film/SiN film.
7. The memory according to claim 4 , wherein one of the first protective film and the second protective film is essentially formed of the material having tension, and the other of the first protective film and the second protective film is essentially formed of the material having stress.
8. The memory according to claim 4 , wherein the first protective film is essentially formed of the material having a thermal resistance lower than a thermal resistance of the material of the second protective film.
9. The memory according to claim 4 , wherein a thickness of the first protective film is different from a thickness of the second protective film.
10. The memory according to claim 4 , wherein the first protective film and the second protective film have a same planar shape.
11. The memory according to claim 4 , wherein side surfaces of the first protective film coincide with side surfaces of the second protective film.
12. The memory according to claim 1 , further comprising:
an upper electrode having an upper surface and a lower surface in contact with the upper surface of the magnetoresistive element; and
the first protective film in direct contact with the side surfaces of the magnetoresistive element, the upper surface of the upper electrode, and the upper surface of the second portion of the lower electrode.
13. The memory according to claim 4 , wherein the second protective film is formed on only the first protective film at an upper portion of the side surfaces of the magnetoresistive element.
14. The memory according to claim 1 , further comprising:
a contact arranged below the second portion of the lower electrode and connected with the second portion of the lower electrode.